• Title/Summary/Keyword: N deposition

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Effects of Deposition and Annealing Conditions on Structural and Magnetic Properties of CoNbZr Alloy Films (제조 조건 및 열처리 조건에 따르는 CoNbZr 합금 박막의 구조 및 자기적 성질에 관한 연구)

  • 양준석;이성래
    • Journal of the Korean Magnetics Society
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    • v.10 no.2
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    • pp.54-61
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    • 2000
  • The structural and magnetic properties of sputtered CoNbZr alloy films were investigated. In the as-deposited $Co_{87.0}$N $b_{8.5}$Z $r_{4.5}$ film deposited at 2 mTorr and 130 W, we observed the minimum coercivity of 1.75 Oe, the maximum resistivity of 3000 $\mu$Ω.cm and permeability of 1095 at 100 MHz. As the Ar pressure or the RF input power increased, the permeability of films at 100 MHz decreased and the coercivity increased because of the development of columnar structure and the formation of unstable amorphous phase. Permeability lower than 100 and coercivity of 60 Oe were observed in film deposited at 1 mTorr or 190 W due to the formation of crystalline phase. Magnetic anisotropy field of as-deposited films could be reduced by rotating field annealing for 120 minutes at 30$0^{\circ}C$. After the annealing, the anisotropy field (Hk) decreased from 1.43 Oe to 0.3 Oe and the permeability increased from 1095 to 1345 because defects in as-deposited films were eliminated by the annealing.aling.

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The Product properties of Bituminous Coal in Two-Stage Pyrolysis (유연탄의 이단 열분해에 따른 생성물의 특성)

  • 송광섭;이상남;윤형기;김상돈
    • Journal of Energy Engineering
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    • v.2 no.2
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    • pp.208-214
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    • 1993
  • Pyrolysis of bituminous coal has been carried out in a two-stage fixed bed reactor to produce high heating value gas(7000 kcal/N㎥) for industrial or town gas usage. The effects of coke catalyst, pyrolysis temperature (468∼565$^{\circ}C$), and catalytic cracking temperature (700∼850$^{\circ}C$) on the product gas properties from pyrolysis of bituminous coal have been determined. From pyrolysis of Dong Jin coal with coke, the carbon deposition on catalyst is found to be less than 5% of product tar and approximately 15% of total energy iii the parent coal can be recovered as high heating value gas. Oil composition in the product tar from the two-stage pyrolysis is higher than that from low-temperature pyrolysis. The tar produced from pyrolysis below 516$^{\circ}C$ can be easily catalytically cracked but, the tar produced above 565$^{\circ}C$ cannot be cracked easily with catalyst. From the product gas analysis, the catalytic cracking temperature should be maintained below 800$^{\circ}C$ since cracking speed of ethylene increases remarkably with the cracking temperature above 800$^{\circ}C$.

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Study on the Curative Effects of the Semyung-Gangji-tang on the Atherosclerosis in Hyperlipidemic Rabbits (세명항지탕이 토끼의 죽상동맥경화증에 미치는 영향)

  • 김규열;서일복
    • The Journal of Korean Medicine
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    • v.22 no.3
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    • pp.105-118
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    • 2001
  • Objectives : The prescription of Semyung-Gangji-tang, designed for the treatment of hyperlipidemia and atherosclerosis, consists of herbs good for treating blood stasis and phlegm stagnancy. It invigorates the liver, kidneys and spleen. Its medical nature is not too cold or too hot and increases human vital energy. The purpose of this study is to examine the curative effects of Semyung-Gangji-tang on atherosclerosis in hyperlipidemic rabbits. Methods : Twenty-four male NZW rabbits, around 2kg of body weight, were divided into 4 groups. Group I served as the normal group. Group II served as the atherogenic model group, fed a 1 % cholesterol diet for 8 weeks and sacrificed. Group III served as the atherogenic control group, fed with a 1 % cholesterol diet for 8 weeks and with a normal diet for the next 4 weeks. Group IV served as the treatment group treated the same as the control group and medicated with Semyung-Gangji-tang for the last 4 weeks. Three animals of group I and six animals of group n were sacrificed at 8 weeks. Five animals of group I , five animals of group III and IV were sacrificed at 12 weeks. Pathological examinations and image analysis were performed on the collected tissue samples. Results : The percentage of lipid deposition area of thoracic aortas of group IV($41.74{\pm}8.93%$) at 12 weeks was decreased compared with the group III ($71.30{\pm}12.74%$) at 12 weeks, but a statistical difference was not observed. The percentage of group IV at 12 weeks was significantly decreased (P<0.05) compared with the group n ($76.41{\pm}7.43%$) at 8 weeks. Histopathologically, advanced atheromas with calcification of aortic arches were observed in all animals of the control group at 12 weeks, but were observed in 2 animals of the treatment group at 12 weeks. Histopathologically, atheromas with calcification of thoracic aortas were observed with major atherogenic lesions in control group at 12 weeks, but simple fibro-fatty streaks were observed major atherogenic lesions in treatment group at 12 weeks. Conclusions : These results indicate that Semyung-Gangji-tang has antiatherogenic effects on experimentally induced atherosclerosis in rabbits.

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Hepatic transcriptional changes in critical genes for gluconeogenesis following castration of bulls

  • Fassah, Dilla Mareistia;Jeong, Jin Young;Baik, Myunggi
    • Asian-Australasian Journal of Animal Sciences
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    • v.31 no.4
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    • pp.537-547
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    • 2018
  • Objective: This study was performed to understand transcriptional changes in the genes involved in gluconeogenesis and glycolysis pathways following castration of bulls. Methods: Twenty Korean bulls were weaned at average 3 months of age, and castrated at 6 months. Liver tissues were collected from bulls (n = 10) and steers (n = 10) of Korean cattle, and hepatic gene expression levels were measured using quantitative real-time polymerase chain reaction. We examined hepatic transcription levels of genes encoding enzymes for irreversible reactions in both gluconeogenesis and glycolysis as well as genes encoding enzymes for the utilization of several glucogenic substrates. Correlations between hepatic gene expression and carcass characteristics were performed to understand their associations. Results: Castration increased the mRNA (3.6 fold; p<0.01) and protein levels (1.4 fold; p<0.05) of pyruvate carboxylase and mitochondrial phosphoenolpyruvate carboxykinase genes (1.7 fold; p<0.05). Hepatic mRNA levels of genes encoding the glycolysis enzymes were not changed by castration. Castration increased mRNA levels of both lactate dehydrogenase A (1.5 fold; p<0.05) and lactate dehydrogenase B (2.2 fold; p<0.01) genes for lactate utilization. Castration increased mRNA levels of glycerol kinase (2.7 fold; p<0.05) and glycerol-3-phosphate dehydrogenase 1 (1.5 fold; p<0.05) genes for glycerol utilization. Castration also increased mRNA levels of propionyl-CoA carboxylase beta (mitochondrial) (3.5 fold; p<0.01) and acyl-CoA synthetase short chain family member 3 (1.3 fold; p = 0.06) genes for propionate incorporation. Conclusion: Castration increases transcription levels of critical genes coding for enzymes involved in irreversible gluconeogenesis reactions from pyruvate to glucose and enzymes responsible for incorporation of glucogenic substrates including lactate, glycerol, and propionate. Hepatic gluconeogenic gene expression levels were associated with intramuscular fat deposition.

고 진공 (UHV) 조건을 이용하여 구리 나노 분말에 도포한 1-octanethiol 기상 자기조립박막(SAMs)의 두께 조절에 관한 연구

  • Gwon, Jin-Hyeong;Kim, Dong-Gwon;No, Ji-Yeong;Park, Sin-Yeong;Lee, Tae-Hun;Yang, Jun-Mo;Lee, Seon-Yeong
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2010.05a
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    • pp.23.1-23.1
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    • 2010
  • Alkanethiol (CH3(CH2)nSH) 자기 조립 박막은 금, 은, 팔라듐 그리고 구리와 같은 금속 물질과 결합하여 산화 방지 보호막, 생화학적 멤브레인 그리고 케미컬 센서로 널리 이용되었다. 전도성을 가진 많은 금속 분말 중에서, 구리는 뛰어난 열, 전기 전도성과 풍부한 양으로 다른 귀금속에 비교하여 경제성까지 갖춘 물질이다. 그러나 이러한 구리 나노 분말은 대기에 노출된 구리 분말이 쉽게 산화된다는 결정적인 단점 때문에 그동안 널리 이용되지 못하였다. 이러한 구리의 단점을 극복하고 뛰어난 전도성의 특징을 이용하고자, Langmuir-Blodgett (LB), layer by layer (LbL), electrophoretic deposition (EPD), self-assembled monolayer (SAM)과 같은 구리 나노 분말 위에 유기 박막을 형성하고자 하는 많은 방법이 시도되어왔다. 이러한 방법들 대부분은 습식 방법으로 진행되었으며, 약 2-nm 두께의 SAM 구조를 형성할 수 있음이 많은 연구를 통하여 확인되었다. 그러나 습식 기반의 SAM 구조는 단지 수일 동안만 유효하며, 이는 코팅을 수행하면서 점차 떨어지는 source solvent의 순도와 적합하지 않은 코팅 조건, 그리고 이러한 원인으로 형성된 부실한 막질 구조 때문으로 추측된다. 게다가 이러한 습식 기반 공정은 코팅 막의 두께 조절과 코팅 시 solvent의 순도를 일정하게 유지하는 것이 매우 복잡하고 어려운 작업으로 알려져 왔다. 본 실험에서는 고 진공 챔버 (< $4.0{\times}10-6$ torr) 시스템을 이용하여 습식 기반 공정의 문제점을 극복하고 구리 나노 분말의 산화를 막기 위한 실험을 진행하였다. 1-octanethiol (CH3(CH2)7SH)은 중간 길이의 hydrocarbon (n=7) 구조를 가진 특징 때문에 코팅 물질로 사용되었다. 게다가, alkanethiol 족 특유의 물질인 황(sulfur)은 구리와 결합하여 산화방지 보호막의 역할을 수행할 수 있다. 저 진공 조건에서는 10-nm의 multilayer가 일괄적으로 코팅됨을 확인할 수 있었다. 본 실험에서는 약 10-nm 두께의 자기 조립 박막(self assembled monolayers: SAMs)이 고 진공 조건에서 구리 나노 분말 표면 위에 코팅 조건의 변경을 통해서 5-nm에서 10-nm 두께의 1-octanethiol SAMs 구조를 얻어낼 수 있었다. 이는 고 진공 조건에서 1-octanethiol SAMs의 코팅 두께를 조절함으로 다양한 크기의 분말에 코팅 물질로 쓰일 수 있음을 알 수 있다.

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Characteristics of $Cu(In,\;Ga)Se_2$ Thin Film So1ar Cells with Deposition Conditions of PN Junction Interface (PN 접합면의 증착조건에 따른 $Cu(In,\;Ga)Se_2$ 박막 태양전지 특성)

  • Kim, S.K.;Lee, J.C.;Kang, K.H.;Yoon, K.H.;Park, I.J.;Song, J.;Han, S.O.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.331-334
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    • 2003
  • Photovoltaics is considered as one of the most promising new energy technology, because its energy source is omni present, pollution-free and inexhaustive. It is agreed that these solar cells must be thin film type because thin film process is cost-efficive in the fact that it uses much less raw materials and can be continuous. The defect chalcopyrite material $CuIn_3Se_5$ has been identified as playing an essential role in efficient photovoltaic action in $CuInSe_2$-based devicesm It has been reported to be of n-type conductivity, forming a p-n junction with its p-type counterpart $CuInSe_2$. Because the most efficient cells consist of the $Cu(In,Ga)Se_2$ quarternary, knowledge of some physical properties of the Ga-containing defect chalcopyrite $Cu(In,Ga)_3Se_5$ may help us better understand the junction phenomena in such devices.

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Control of Plasma Characteristic to Suppress Production of HSRS in SiH4/H2 Discharge for Growth of a-Si: H Using Global and PIC-MCC Simulation

  • Won, Im-Hui;Gwon, Hyeong-Cheol;Hong, Yong-Jun;Lee, Jae-Gu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.312-312
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    • 2011
  • In SiH4/H2 discharge for growth process of hydrogenated amorphous silicon (a-Si:H), silane polymers, produced by SiH2 + Sin-1H2n ${\rightarrow}$ SinH2n+2, have no reactivity on the film-growing surface. However, under the SiH2 rich condition, high silane reactive species (HSRS) can be produced by electron collision to silane polymers. HSRS, having relatively strong reactivity on the surface, can react with dangling bond and form Si-H2 networks which have a close correlation with photo-induced degradation of a-Si:H thin film solar cell [1]. To find contributions of suggested several external plasma conditions (pressure, frequency and ratio of mixture gas) [2,3] to suppressing productions of HSRS, some plasma characteristics are studied by numerical methods. For this study, a zero-dimensional global model for SiH4/H2 discharge and a one-dimensional particle-in-cell Monte-Carlo-collision model (PIC-MCC) for pure SiH4 discharge have been developed. Densities of important reactive species of SiH4/H2 discharge are observed by means of the global model, dealing 30 species and 136 reactions, and electron energy probability functions (EEPFs) of pure SiH4 discharge are obtained from the PIC-MCC model, containing 5 charged species and 15 reactions. Using global model, SiH2/SiH3 values were calculated when pressure and driving frequency vary from 0.1 Torr to 10 Torr, from 13.56 MHz to 60 MHz respectively and when the portion of hydrogen changes. Due to the limitation of global model, frequency effects can be explained by PIC-MCC model. Through PIC-MCC model for pure SiH4, EEPFs are obtained in the specific range responsible for forming SiH2 and SiH3: from 8.75 eV to 9.47 eV [4]. Through densities of reactive species and EEPFs, polymerization reactions and production of HSRS are discussed.

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Reduced Graphene Oxide Field-effect Transistor as a Transducer for Ion Sensing Application

  • Nguyen, T.N.T.;Tien, Nguyen Thanh;Trung, Tran Quang;Lee, N.E.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.562-562
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    • 2012
  • Recently, graphene and graphene-based materials such as graphene oxide (GO) or reduced graphene oxide (R-GO) draws a great attention for electronic devices due to their structures of one atomic layer of carbon hexagon that have excellent mechanical, electrical, thermal, optical properties and very high specific surface area that can be high potential for chemical functionalization. R-GO is a promising candidate because it can be prepared with low-cost from solution process by chemical oxidation and exfoliation using strong acids and oxidants to produce graphene oxide (GO) and its subsequent reduction. R-GO has been used as semiconductor or conductor materials as well as sensing layer for bio-molecules or ions. In this work, reduced graphene oxide field-effect transistor (R-GO FET) has been fabricated with ITO extended gate structure that has sensing area on ITO extended gate part. R-GO FET device was encapsulated by tetratetracontane (TTC) layer using thermal evaporation. A thermal annealing process was carried out at $140^{\circ}C$ for 4 hours in the same thermal vacuum chamber to remove defects in R-GO film before deposition of TTC at $50^{\circ}C$ with thickness of 200 nm. As a result of this process, R-GO FET device has a very high stability and durability for months to serve as a transducer for sensing applications.

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$Si_3N_4$/HfAlO 터널 절연막을 이용한 나노 부유 커패시터의 전기적 특성 연구

  • Lee, Dong-Uk;Lee, Hyo-Jun;Kim, Dong-Uk;Kim, Eun-Gyu;Yu, Hui-Uk;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.279-279
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    • 2011
  • 나노 입자를 이용한 비휘발성 메모리 소자의 전기적 특성 향상을 위하여 일함수가 Si 보다 큰 금속, 금속산화물, 금속 실리사이드 나노입자를 이용한 다양한 형태의 메모리 구조가 제안되어져 왔다.[1] 특히 이와 같은 나노 부유 게이트 구조에서 터널 절연막의 구조를 소자의 동작 속도를 결정하는데 이는 터널링 되어 주입되는 전자의 확률에 의존하기 때문이다. 양자 우물에 국한된 전하가 누설되지 않으면서 주입되는 전자의 터널링 확률을 증가시키기 위하여, dielectric constant 와 barrier height를 고려한 다양한 구조의 터널 절연막의 형태가 제안 되었다.[2-3] 특히 낮은 전계에서도 높은 터널링 확률은 메모리 소자의 동작 속도를 향상시킬 수 있다. 본 연구에서는 n형 Si 기판위에 Si3N4 및 HfAlO를 각각 1.5 nm 및 3 nm 로 atomic layer deposition 방법으로 증착하였으며 3~5 nm 지름을 가지는 $TiSi_2$$WSi_2$ 나노 입자를 형성한 후 컨트롤 절연막인 $SiO_2$를 ultra-high vacuum sputtering을 사용하여 20 nm 두께로 형성 하였다. 마지막으로 $200{\mu}m$ 지름을 가지는 Al 전극을 200 nm 두께로 형성하여 나노 부유 게이트 커패시터를 제작하였다. 제작된 소자는 Agilent E4980A precision LCR meter 및 HP 4156A precision semiconductor parameter analyzer 를 사용하여 전기용량-전압 및 전류-전압 특성분석을 하여 전하저장 특성 및 제작된 소자의 터널링 특성을 확인 하여 본 연구를 통하여 제작된 나노 부유 게이트 커패시터 구조가 메모리 소자응용이 가능함을 확인하였다.

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Effect of $Al_2O_3$ pre-layers formed using protective Si-oxide layer on the growth of ultra thin ${\gamma}-Al_2O_3$ epitaxial layer (보호용 실리콘 산화막을 이용하여 제조된 $Al_2O_3$ 예비층이 초박막 ${\gamma}-Al_2O_3$ 에피텍시의 성장에 미치는 영향)

  • Jung, Young-Chul;Jun, Bon-Keun;Ishida, Makoto
    • Journal of Sensor Science and Technology
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    • v.9 no.5
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    • pp.389-395
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    • 2000
  • In this paper, we propose the formation of an $Al_2O_3$ pre-layer using a protective Si-oxide layer and Al layer. Deposition of a thin film layer of aluminum onto a Si surface covered with a thin Si-oxide layer and annealing at $800^{\circ}C$ led to the growth of epitaxial $Al_2O_3$ layer on Si(111). And ${\gamma}-Al_2O_3$ layer was grown on the $Al_2O_3$ per-layer. Etching of the Si substrate by $N_2O$ gas could be avoided in the initial growth stage by the $Al_2O_3$ pre-layer. It was confirmed that the $Al_2O_3$ pre-layer was effective in improving the surface morphology of the very thin ${\gamma}-Al_2O_3$ films.

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