• 제목/요약/키워드: Multilayered films

검색결과 125건 처리시간 0.035초

순차 증착한 InSb 박막의 전자 이동도 향상을 위한 대용융 재결정에 관한 연구 (A Study on the Zone Melting Recrystallization of Sequentially Evaporated InSb Thin Films for Improvement of the Electron Mobility)

  • 김병윤;현규택;주승기
    • 전자공학회논문지A
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    • 제30A권6호
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    • pp.31-37
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    • 1993
  • InSb thin films were fabricated by zone melting recrystallization of In/Sb multilayered thin films prepared by sequential evaporation. Unreacted metal phase or dispersed metal precipitates lowered the electron mobility and the electron mobility increased with development of (111) prefered orientation. Properties of the film could be controlled by changing mzximum temperature and scanning speed, and the electron mobility as high as 12, 000 cm $^2$/Vsec could be obtained under the optimized conditions.

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