• Title/Summary/Keyword: Multi-monitoring system

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A Monitoring System for Functional Input Data in Multi-phase Semiconductor Manufacturing Process (다단계 반도체 제조공정에서 함수적 입력 데이터를 위한 모니터링 시스템)

  • Jang, Dong-Yoon;Bae, Suk-Joo
    • Journal of Korean Institute of Industrial Engineers
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    • v.36 no.3
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    • pp.154-163
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    • 2010
  • Process monitoring of output variables affecting final performance have been mainly executed in semiconductor manufacturing process. However, even earlier detection of causes of output variation cannot completely prevent yield loss because a number of wafers after detecting them must be re-processed or cast away. Semiconductor manufacturers have put more attention toward monitoring process inputs to prevent yield loss by early detecting change-point of the process. In the paper, we propose the method to efficiently monitor functional input variables in multi-phase semiconductor manufacturing process. Measured input variables in the multi-phase process tend to be of functional structured form. After data pre-processing for these functional input data, change-point analysis is practiced to the pre-processed data set. If process variation occurs, key variables affecting process variation are selected using contribution plot for monitoring efficiency. To evaluate the propriety of proposed monitoring method, we used real data set in semiconductor manufacturing process. The experiment shows that the proposed method has better performance than previous output monitoring method in terms of fault detection and process monitoring.

The Development of Multi-channel Electrical Conductivity Monitoring System and its Application in the Coastal Aquifer (다채널 전기전도도 모니터링 시스템의 개발과 연안지역 공내수 모니터링에 대한 적용 사례)

  • Shin, Je-Hyun;Hwang, Se-Ho;Park, Kwon-Gyu;Park, Yun-Seong;Byun, Joong-Moo
    • Geophysics and Geophysical Exploration
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    • v.8 no.2
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    • pp.156-162
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    • 2005
  • Particularly in research related to seawater intrusion the change of fluid electrical conductivity is one of major concerns, and effective monitoring can help to optimize a water pumping performance in coastal areas. Special considerations should be given to the mounting of sensors at proper depth during the monitoring design since the vertical distribution of fluid electrical conductivity is sensitive to the characteristics of seawater intrusion zone. This tells us the multi-channel electrical conductivity monitoring is of paramount consequence. It, however, is a rare event when this approach becomes routinely available in that commonly used commercial stand-alone type sensors are very expensive and inadequate for a long term monitoring of electrical conductivity or water level due to their restricted storage and difficulty of real-time control. For this reason, we have developed a real-time monitoring system that could meet these requirements. This system is user friendly, cost-effective, and easy to control measurement parameters - sampling interval, acquisition range, and others. And this devised system has been utilized for the electrical conductivity monitoring in boreholes, Yeonggwang-gun, Korea. Monitoring has been consecutively executed for 24 hours, and the responses of electrical conductivity at some channels have been regularly increased or decreased while pumping up water. It, with well logging data implemented before/after pumping water, verifies that electrical conductivity changes in the specified depths originate from fluid movements through sand layer or permeable fractured rock. Eventually, the multi-channel electrical conductivity monitoring system makes an effective key to secure groundwater resources in coastal areas.

The Study on the Monitoring of Temperature and Humidity in Public Utilization Facilities (다중 이용 시설에 대한 온.습도 모니터링에 관한 연구)

  • Choi, Man-Yong;Chae, Kyung-Hee;Kim, Ki-Bok;Kim, Su-Un
    • Proceedings of the SAREK Conference
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    • 2009.06a
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    • pp.1470-1475
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    • 2009
  • Until now for the safety of structures and equipment monitoring technology to measure the amount of the physical, if that is the one, one-point or single-source target is one the most. Therefore, becoming more numerous and complex to measure the amount of physical measurement technology that is comprehensive and complex, multi-source concepts to the monitoring of a multi-sensing technology is required. Have the same characteristics of multi-source multi-use space such as a multi-structure of facilities/equipment is. The people's safety in a multi-use facility will be directly related to life and even a little carelessness can lead to large-scale disaster occurs because of several factors, risks and to manage detect in advance the development of an intelligent monitoring technology is essential. Therefore, this study shows that multiple structures/facilities to improve the quality of human life in research to maintain a safe and comfortable living space for multi-source intelligence to the development of monitoring technology to achieve that goal, and the ubiquitous sensor network system on the basis of the wireless transmission module, and multiple research facilities/equipment for the ultra-small sensors for health monitoring study was performed.

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Force monitoring of steel cables using vision-based sensing technology: methodology and experimental verification

  • Ye, X.W.;Dong, C.Z.;Liu, T.
    • Smart Structures and Systems
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    • v.18 no.3
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    • pp.585-599
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    • 2016
  • Steel cables serve as the key structural components in long-span bridges, and the force state of the steel cable is deemed to be one of the most important determinant factors representing the safety condition of bridge structures. The disadvantages of traditional cable force measurement methods have been envisaged and development of an effective alternative is still desired. In the last decade, the vision-based sensing technology has been rapidly developed and broadly applied in the field of structural health monitoring (SHM). With the aid of vision-based multi-point structural displacement measurement method, monitoring of the tensile force of the steel cable can be realized. In this paper, a novel cable force monitoring system integrated with a multi-point pattern matching algorithm is developed. The feasibility and accuracy of the developed vision-based force monitoring system has been validated by conducting the uniaxial tensile tests of steel bars, steel wire ropes, and parallel strand cables on a universal testing machine (UTM) as well as a series of moving loading experiments on a scale arch bridge model. The comparative study of the experimental outcomes indicates that the results obtained by the vision-based system are consistent with those measured by the traditional method for cable force measurement.

A Study on the Corrosion Monitoring of Multi-functional Sensors for Reinforced Concrete Structures: Part 1 (철근 콘크리트 구조물용 다기능 멀티센서의 부식 모니터링에 관한 연구: Part 1)

  • Jin, Chung-Kuk;Jeong, Jin-A;Kyoung, Eun-Jin
    • Corrosion Science and Technology
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    • v.11 no.6
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    • pp.270-274
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    • 2012
  • This study represents the result of corrosion monitoring on reinforced concrete specimens by means of multi-functional corrosion monitoring sensors. To confirm the effectiveness of the sensors, eight different kinds of condition were adopted. Test factors were corrosion potential, current, corrosion rate, resistivity, and temperature, which were monitored with the sensors. Through this study, judging corrosion of steel in concrete with single corrosion factor such as corrosion potential was difficult, because many other factors can have an influence on the reaction of corrosion. By using three different kinds of sensors, it could enhance the accuracy of corrosion monitoring.

Development of Wired Monitoring System for Layers Rearing in Muti-tier Layers Battery by Machine Vision (기계시각을 이용한 고단 직립식 산란계 케이지의 유선 감시시스템 개발)

  • Zheng, S.Y.;Chang, D.I.;Lee, S.J.;So, J.K.
    • Journal of Biosystems Engineering
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    • v.31 no.5 s.118
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    • pp.436-442
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    • 2006
  • This research was conducted to design and develop a wired monitoring system for judging if sick or dead layers (SDL) exist in multi-tier layers battery (MLB) by machine vision, and to analyze its performance. In this study, 20 Brown Leghorn (Hi-Brown) layers aged 37 weeks old, were used as the experimental animals. The intensity of concern paid by layers on feed was over 90% during 5 minutes and 30 seconds after providing feed, and normal layers (NL) had been standing to take feed for that period. Therefore, in this study, the optimal judging time was set by this test result. The wired monitoring system developed was consisted of a driving device for carrying machine vision systems, a control program, a RS232 to RS485 convertor, an automatic positioning system, and an image capture system. An image processing algorithm was developed to find SDL in MLB by the processes of binary processing, erosion, expansion, labeling, and reckoning central coordinate of the captured images. The optimal velocity for driving unit was set up as 0.13 m/s by the test results for wired monitoring system, and the proximity switch was controlled not to be operated for 1.0 second after first image captured. The wired monitoring system developed was tested to evaluate the remote monitoring performance at lab-scale laying hen house. Results showed that its judgement success.ate on normal cage (without SDL) was 87% and that on abnormal cage (with SDL) was 90%, respectively. Therefore, it would be concluded that the wired monitoring system developed in this study was well suited to the purpose of this study.

Compact AUV platform system designed for the experiment of underwater multi-agent development

  • Watanabe, Keisuke
    • 제어로봇시스템학회:학술대회논문집
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    • 2005.06a
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    • pp.2036-2041
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    • 2005
  • The underwater multi-agent technology has many potential for the various activities related to ocean development/conservation in the near future. For example, in such fields as water pollution investigation, aquaculture control, or coral reef research, we feel a growing need for a system that realizes underwater continuous monitoring in the wide rang e. In this case, the target monitoring area will be sliced planar hierarchically toward the depth as monitoring layers, and many AUVs arranged on each layer track the given trajectory and gather various environmental information continuously, with communicating each other in the layer or with other layers. To realize those systems we need to develop AUV multi-agent technologies. So we are now building basic systems for basin experiment for the development of AUV multi-agent behavior. We must experience many situations and problems to be solved for the development of its elemental technologies by using real systems as well as our computer simulations. In this paper we introduce our concept of the experiment in the near future and the hardware/software design of our two types of handy AUVs and ultrasound ranging/communication system for that experiment. One AUV is designed using a 17inches-diameter glass sphere with DOS/V and RT-Linux based subsystems, which is intended to use not only in the basin but also in the calm real sea. The other AUV is designed for the basin experiment using a 7inches-diameter acrylic sphere with low-cost embedded system with SH-2 based subsystems. The basin experiment to verify the basic AUV facilities and ultrasound ranging for position detection was carried out.

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In-Process Monitoring of Chatter Vibration using Multiple Neural Network(II) (복합 신경회로망을 이용한 채터진동의 인프로세스 감시(II))

  • Kim, Jeong-Suk;Kang, Myeong-Chang;Park, Cheol
    • Journal of the Korean Society for Precision Engineering
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    • v.12 no.12
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    • pp.100-108
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    • 1995
  • The In-process minitoring of the chatter vibration is necessarily required to an automatic manufacturing system. In this study, we constructed a multi-sensing system using tool dynamoneter, accelerometer and AE(Acoustic Emission) sensor for a more credible detection of chatter vibration. And a new approach using a multiple neural network to extract the features of multi-sensor for the recognition chatter vibration is proposed. With the Back-propagation training process, the neural network memorize and classify the features of multi-sensor signals. As a result, it is shown by multiple neural network that the chatter vibration can be monitored accurately, and it can be widely used in practical unmanned system.

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A study on the development of multi-task operating system for industrial robot controller (산업용 로보트 제어기의 multi task 운영체계 개발에 관한 연구)

  • 장성석;조영인;김수종;정창범;이인옥
    • 제어로봇시스템학회:학술대회논문집
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    • 1988.10a
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    • pp.497-500
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    • 1988
  • The multi-task operating system called HRMTOS (HUNDAI Robot Multi-task Operating System) was developed for concurrent execution. HRMTOS consists of condition interpreter, queue constructor, task scheduler. Condition interpreter checks the status and condition of request, queue constructor makes queue according to the checked result by condition interpreter, and task scheduler finds the task that will be urgently executed by priority of queue after pending the current excuting task. HRMTOS could execute teaching, playback, monitoring function of multi-robot and could be used more effectively than other robot controllers.

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Implementation of Web Based Monitoring Systems for Multi-Axis Force Control Systems (다축 힘제어 시스템을 위한 웹기반 감시시스템 구현)

  • Lee, Hyun-Chul;Nam, Hyun-Do;Kang, Chul-Goo
    • Proceedings of the KIEE Conference
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    • 2004.07d
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    • pp.2674-2676
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    • 2004
  • In this paper, web based monitoring systems are implemented for multi-axis force control systems of an intelligence robot. A web based monitoring system is implemented by porting Linux at embeded systems which include Xscale processors. A divice driver is developed to receive data from multy-axis force sensors in Linux operation systems. To control this device driver, a soket program for web browser is also developped.

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