• Journal of the Optical Society of Korea
• /
• v.18 no.1
• /
• pp.71-77
• /
• 2014

We present design and fabrication of a multi-focusing microlens array (MLA) using a thermal reflow method. To obtain multi-focusing properties with different numerical apertures at the elemental lens of the MLA, double-cylinder photoresist (PR) structures with different diameters were made within the guiding pattern with both photolithographic and partial developing processes. Due to the base PR layer supporting the thermal reflow process and the guiding structure, the thermally reflowed PR structure had different radii of curvatures with lens shapes that could be precisely modeled by the initial volume of the double-cylinder PR structures. Using the PR template, the hexagonally packed multi-focusing MLA was made via the replica molding method, which showed four different focal lengths of 0.9 mm, 1.1 mm, 1.6 mm, and 2.5 mm, and four different numerical apertures of 0.1799, 0.2783, 0.3973, and 0.4775.

• Journal of the Semiconductor & Display Technology
• /
• v.6 no.3
• /
• pp.65-70
• /
• 2007

A method to focus the object in camera system by applying the Hill climb algorithm from optical lens moving device (VCM; Voice coil motor) is proposed. The focusing algorithm from VCM is focus on the object but in these criteria is a well-known drawback; the focus is good only at same distance objects but the focus is bad (blur image) at different distance objects because of the DOF (Depth of focus) or DOF (Depth of field) at the optical characteristic. Here, the new camera system that describes the Reflector of free curvature systems (or Diffractive Fresnel lens) and the partition of focusing window area is proposed. The method to improve the focus in all areas (different distance objects) is proposed by new optical system (discrete auto in-focus) using the Reflector of free curvature systems (or Diffractive Fresnel lens) and by applying the partition of all areas. The proposal is able to obtain good focus in all areas.

• Journal of the Semiconductor & Display Technology
• /
• v.8 no.4
• /
• pp.43-48
• /
• 2009

The aim of this paper is to describe the development of the electron-beam optic analysis algorithm for simulating the e-beam behavior concerned with electrostatic lenses and their focal properties in the micro-column of the multi-beam lithography system. The electrostatic lens consists of an array of electrodes held at different potentials. The electrostatic lens, the so-called einzel lens, which is composed of three electrodes, is used to focus the electron beam by adjusting the voltages of the electrodes. The optics of an electron beam penetrating a region of an electric field is similar to the situation in light optics. The electron is accelerated or decelerated, and the trajectory depends on the angle of incidence with respect to the equi-potential surfaces of the field. The performance parameters, such as the working distances and the beam diameters are obtained by the computational simulations as a function of the focusing voltages of the einzel lens electrodes. Based on the developed simulation algorithm, the high performance of the micro-column can be achieved through optimized control of the einzel lens.

• Journal of the Korean Society for Precision Engineering
• /
• v.27 no.2
• /
• pp.70-77
• /
• 2010

This study proposed an auto focusing method for a multi-focus image in assembling lens modules in digital camera phones. A camera module in a camera phone is composed of a lens barrel, an IR glass, a lens mount, a PCB board and aspheric lenses. Alignment among the components is one of the important factors in product quality. Auto-focus is essential to adjust image quality of an IR glass in a lens holder, but there are two focal points in the captured image due to thickness of IR glass. So, sharpness, probability and a scale factor are defined to find desired focus from a multi-focus image. The sharpness is defined as clarity of an image. Probability and a scale factors are calculated using pattern matching with a registered image. The presented algorithm was applied to a lens assembly machine which has 5 axes, two vacuum chucks and an inspection system. The desired focus can be determined on the local maximum of the sharpness, the probability and the scale factor in the experiment.

• Journal of the Optical Society of Korea
• /
• v.4 no.1
• /
• pp.62-65
• /
• 2000

A new type of multi-viewing zone screen for multiview 3-D display is described. The screen is made by stacking a Fresnel lens and a reflective prism array plate. The screen performs both focusing and beam dividing functions and directs very narrow light beams to three viewing zones for three spectators. The results of experimental testing of the screen have demonstrated that current technology of Fresnel lens and prism grooves on PMMA(Ploymethyl Methacrylate) allows manufacture of screen having a pixel size of about 1-2 mm. This size is reasonable enough for a screen with dimensions about 1m size. Optical qualities of Fresnel lenses and grooved prism arrays achieve an angular resolution for the screen of several angular minutes.

• Proceedings of the Optical Society of Korea Conference
• /
• 2003.02a
• /
• pp.40-41
• /
• 2003

(self-focusing)을 이용한 커렌즈 모드록킹(Kerr-lens mode-locking； KLM) 방법을 이용하면 간단한 구조를 갖는 공진기로 100 펨토초(femto=10-13) 미만의 레이저 펄스를 생성할 수 있다. KLM 티타늄사파이어(Ti：sapphire) 레이저의 발달로 10 펨토초 영역의 레이저 펄스를 간단하게 생성할 수 있게 되었으며 특히, 넓은 스펙트럼 폭을 가지는 처프거울(chirped mirror)의 사용과 정확한 분산의 보정을 통한 5 펨토초(800 nm 파장의 두 주기에 해당) 영역의 레이저 펄스 생성도 보고되고 있다.

• Particle and aerosol research
• /
• v.13 no.2
• /
• pp.53-63
• /
• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.3
• /
• pp.383-388
• /
• 2011

The cold hollow cathode gas ion source is under development for multi aperture focused ion beam (FIB) system. In this paper, we describe the cold hollow cathode ion source design and the general ion source performance using Ar gas. The glow discharge characteristics and the ion beam current density at various operation conditions are investigated. This ion source can generate maximum ion beam current density of approximately 120 mA/$cm^2$ at ion beam potential of 10 kV. In order to effectively transport the energetic ions generated from the ion source to the multi-aperture focused ion beam(FIB) system, the einzel lens system for ion beam focusing is designed and evaluated. The ions ejected from the ion source can be forced to move near parallel to the beam axis by adjusting the potentials of the einzel lenses.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.08a
• /
• pp.392-392
• /
• 2011

Carbon nanotubes (CNT) emitter has widely become an attractive mechanism that draws growing interests for cold cathode field emission.$^{1,2}$ CNT yarns have demonstrated its potential as excellent field emitters.$^3$ Extensive simulations were carried out in designing a CNT yarn-based cathode assembly. The focal spot size dependence on the anode surface of the geometric parameters such as axial distance of the electrostatic focus lens from the cathode and the applied bias voltages at the cathode, grid mesh and electrostatic focus lens were studied. The detailed computer simulations using Opera 3D electromagnetic software$^4$ had revealed that a remarkable size of focal spot under a focusing lens triode type set-up design was achieved. The result of this optimization simulation would then be applied for the construction of the CNT yarn based micro-focus x-ray tube with its field emission characteristics evaluated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.04a
• /
• pp.129-132
• /
• 2000

The PDP(Plasma Display Panel) barrier rib material on the glass substrate was patterned for fabrication of the PDP cell using Nd:YAG laser(1064 nm) which can generate the second(532 nm) and forth(266 nm) harmonic wave by HGM(harmonic generation modules). At a scan speed of 20 ${\mu}m/s$ with the second harmonic wave(532 nm) of Nd:YAG laser, the etching threshold laser fluence of the PDP material was 6.5 $mJ/cm^2$ and a sample(thickness = 180 ${\mu}m$) on the glass substrate was removed clearly at a laser fluence of 19.5 $mJ/cm^2$. In order to increase the throughput of the fabrication we divided a single-beam into multi-beams by using a metal mask between the sample and the focusing lens. As a result, 10 lines of PDP cell were formed by one laser beam scanning at a scan speed of 200 ${\mu}m/s$ and a laser fluence of 2.86 $J/cm^2$.