• Korean Journal of Optics and Photonics
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• v.17 no.2
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• pp.149-158
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• 2006

We have analyzed various tolerances of the multi-configurative microscopic system for inspecting the wire-bonding of a reed frame by using the Gaussian bracket method and the equivalent lens method. The tolerances for the curvature and the thickness, which are axial symmetric tolerances, are given by varying the back focal length within a fecal depth under diffraction-limited conditions. Moreover, by using the trial and error method, the axial non-symmetric tolerances for decenter and tilt are established by assigning the 5% variation of MTF(modulation transfer function) at the spatial frequency of 50 lp/mm and at the field angle of 0.7 field. As the tolerances with the most probable distribution are distributed within the range of the decay rate of less than 5% independent of the probability distribution of tolerances, we can achieve completely the desired design performances of the multi-configurative microscopic system by using the various ranges of these tolerances.

• Korean Journal of Optics and Photonics
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• v.14 no.6
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• pp.613-622
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• 2003

The multi-configurative microscopic system for inspecting the wire-bonding of reed frame is designed. Rays refracted by objective lens group which is composed of common lens group of x2 and x6 are splitted by beam-splitter, and Rays through the central region and the boundary region of the object imaged at x2 and x6 through imaging lens groups, respectively. The depth of wire structure on the reed frame has about $\pm$3 mm, in order to observe by uniform magnification without the dependency on the variation of objective distance generated by the depth of wire structure on the reed frame, imaging lens groups should be moved on nonlinear locus like mechanically compensated zoom lenses. The nonlinear equations for zoom locus are derived by using the Gaussian bracket. Refraction powers and positions of each groups are numerically determined by solving the equations, and initial design data for each groups is obtained by using Seidel third order aberration theory. The optimization technique is finally utilized to obtain this microscopic system.