$Si_3N_4$ Coating for Improvement of Anti-oxidation and Anti-wear Properties by Low Pressure Chemical Vapor Deposition
(저압화학기상증착법에 의한 $Si_3N_4$ 내산화.내마모 코팅)
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- Korean Journal of Materials Research
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- v.5 no.7
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- pp.835-841
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- 1995