• Transactions on Electrical and Electronic Materials
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• v.18 no.1
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• pp.25-29
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• 2017

This paper presents a unique pressure sensor design for environmental applications. The design uses a new geometry for a multi bossed beam-membrane structure with a SOI (silicon-on-insulator) substrate and a mechanical transducer. The Intellisuite MEMS CAD design tool was used to build and analyze the structure with FEM (finite element modeling). The working principle of the multi bossed beam structure is explained. FEM calculations show that a sensing diaphragm with Mises stress can provide superior linear response compared to a stress-free diaphragm. These simulation results are validated by comparing the estimated deflection response. The results show that, the sensitivity is enhanced by using both the novel geometry and the SOI substrate.

• Interaction and multiscale mechanics
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• v.3 no.3
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• pp.257-266
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• 2010

A novel resonance based proximity DC current sensor is proposed. The sensor consists of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end. When the sensor is placed in proximity to a wire carrying DC current, resonant frequency of the beam changes with change in current. This change in resonant frequency is used to determine the current through the wire. The structure is simulated in micro and meso scale using COMSOL Multi physics software and the sensor is found to be linear with good sensitivity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04a
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• pp.585-590
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• 1995

This paper describes strain distribution analysis of a multiple parallel plate structure for a multi-componenet force and moment sensor. A parallel plate structure which has higher rigidity than a simple beam structure are widely used for multi-component force and moment sensor. The strain distribution in the beams of a parallel plate structure should be accurately calculated to design a high precision multi-component force and moment sensor. We derived equations to calculate the strains for multiple parallel plate structure. It reveals that results from finite element analysis and experiment are in good agreement with results from the derived equations.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.194-201
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• 1998

The beam rotating actuator has been developed. It can be utilized to improve the data transfer rate for the optical disk systems, Newly developed laser beam rotating actuator is applied to put multi-beam spots on more than one track on the optical disk simultaneously. The beam rotating actuator is made of piezoelectric ceramic bimorph as the form of cantilever, Piezoelectric actuators with high resolution, high stiffness and fast frequency response are widely assembled in micropositioning applications. Therefore, the actuator has above 50Hz natural frequency. Beam array is rotated using the dove prism in the end of beamrotator. The dynamic equation of beam rotating actuator is derived theoretically. The actuator is designed on the ground of this analysis. The performance of the beam rotating actuator is verified as the dynamics frequency performance is measured using the dynamic analyzer and sensor.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.54 no.10
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• pp.581-586
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• 2005

The multi-beam side scan sonar system uses the towfish installed sonars, it is an equipment that search images of the bottom surface of the sea in real time. It is a typical equipment that is related to a sea investigation such as a geological survey, seabed communication cable and power line cable placing repair investigation, fish breeding ground investigation, sea purification, relic and mineral investigation, and mine and submarine search. Recently, it is used to sea purification and geological survey that require information of the correct surface of the seabed. Therefore, this research develops multi-beam sensors for a side scan sonar that supply various information with the fast scan speed and correct high resolution that is not a simple underwater investigation equipment.

• Transactions on Electrical and Electronic Materials
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• v.13 no.1
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.413-417
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• 1997

Distributed piezoelectric sensor and actuator have been designed for efficient vibration control of a cantilevered beam. Both PZT and PVDF are used in this study, the former as an actuator and the latter as a sensor for our integrated structure. For the PZT actuator, the position and size have been optimized. Optimal electrode shape of the PVDF sensor has been determined. For multi-mode vibration control, we have used two PZT actuators and a PVDF sensor. Electrode shading of PVDF is more powerful for modal force adjustment than the sizing and positioning of PZT. Finite element method is used to model the structure that includes the PZT actuator and the PVDF sensor. By deciding on or off of each PZT segment, the length and the location of the PZT actuator are optimize. Considering both of the host structure and the optimized actuators, it is designed that the active electrode width of PVDF sensor along the span of the beam. Actuator design is based on the criterion of minimizing the system energy in the control modes under a given initial condition. Sensor is designed to minimize the observation spill-over. Modal control forces for the residual(uncontrolled) modes have been minimized during the sensor design. Genetic algorithm, which is suitable for this kind of discrete problems, has been utilized for optimization. Discrete LQG control law has been applied to the integrated structure for real time vibration control. Performance of the sensor, the actuator, and the integrated smart structure has been demonstrated by experiments.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.637-642
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• 2004

This paper presents a new shape design method for the multi-mode sensor that can detect selected multiple modes for the active vibration control of mechanical structures. The structure used for this study is an isotropic cantilever beam type with a PVDF(polyvinylidene fluoride) which is bonded onto the structure as a sensor. Characteristic behaviors of the sensor are related with the electrode shapes of PVDF. The shape optimization problem is solved by defining a new multi-objective function and using the genetic algorithm. Resulting electrode shape functions have good performances to detect the multiple vibration modes. The results of analytical simulations are compared with those of experiment works. The results agree well each other. Hence, the obtained experimental results give evidence for the validity of the presented theoretical analysis of the electrode shape design problem.

• Journal of Sensor Science and Technology
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• v.6 no.1
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• pp.6-15
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• 1997

This paper presents the multi-objective optimal design of thermopile sensor having beam or membrane structure. The thermopile sensor is composed of $Si_{3}N_{4}/SiO_{2}$ dielectric membrane, Al-polysilicon thermocouples and $RuO_{2}$ thin film for black body. The sensing method is based on the Seebeck effect which is originated from the temperature difference of the two positions, black body and silicon rim. The objective functions of the presented design are sensitivity, detectivity and thermal time constant. The modelling of the sensor is proposed including the package. The multi-objective optimization technique is applied to the design of the sensor not only inspecting the modelling equation but also simulating mathematical programming method. Especially, fuzzy optimization technique is adapted to get the optimal solution which enables the designer to reach the more practical solution. The design constraint of the voltage output originated from the change of the environmental temperature is included for practical use.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.696-699
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• 2004

A side scan sonar system uses the towfish installed sonars, It is an equipment that search images of the bottom surface of the sea in real time. It is a typical equipment that is related to a sea investigation such as a geological survey, seabed communication cable and power line cable placing repair investigation, fish breeding ground investigation, sea purification, relic and mineral investigation, and mine and submarine search. It used to fined objects and investigate on the seabed surface. But, recently, it is used to sea purification and geological survey that require information of the correct surface of the seabed. So, it needs various filtering technique and image processing techniques development to acquire high resolution image. therefore, this research develops a side scan sonar using multi-beam sensors that supply various information with the fast scan speed and correct high resolution that is not a simple underwater investigation equipment.