• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.434-437
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• 2003

Evaluation or the patterning accuracy of e-beam lithography machines requires a high precision inspection system that is capable of measuring the true xy-locations of fiducial marks generated by the e-beam machine under test. Fiducial marks are fabricated on a single photo mask over the entire working area in the form of equally spaced two-dimensional grids. In performing the evaluation, the principles of self-calibration enable to determine the deviations of fiducial marks from their nominal xy-locations precisely, not being affected by the motion errors of the inspection system itself. It is. however, the fact that only repeatable motion errors can be eliminated, while random motion errors encountered in probing the locations of fiducial marks are not removed. Even worse, a random error occurring from the measurement of a single mark propagates and affects in determining locations of other marks, which phenomenon in fact limits the ultimate calibration accuracy of e-beam machines. In this paper, we describe an uncertainty analysis that has been made to investigate how random errors affect the final result of self-calibration of e-beam machines when one uses an optical inspection system equipped with high-resolution microscope objectives and a precision xy-stages. The guide of uncertainty analysis recommended by the International Organization for Standardization is faithfully followed along with necessary sensitivity analysis. The uncertainty analysis reveals that among the dominant components of the patterning accuracy of e-beam lithography, the rotationally symmetrical component is most significantly affected by random errors, whose propagation becomes more severe in a cascading manner as the number of fiducial marks increases

• Journal of the Korean Society for Precision Engineering
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• v.12 no.2
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• pp.37-47
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• 1995

In recent years, it has been variously developed for testing the accuracy of circular motion of NC machine tools, for example Telescoping Ball Bar Method by Bryan, Circular test Method by Knapp and $r^{-{\theta} }$ Method by Tsutsumi etc., but these methods are all 2-dimentional measuring methods on plane. These simple methods of circular motion accuracy test of NC machine tools have been studied by many reserchers as above, but it is not yet settled in the code of measuring methods of motion errors of NC machine tools, because of errors of measuring units and sensors, and also especially the difficulties of centering of measuring units and the spindle of machining center. In this paper, in use of 2 rotary encoders and 1 magnetic type linear scale with resolution of 0.5 .mu. m, it has become possible for measuring of 3 dimentional space motion accuracy.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.3
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• pp.361-368
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• 1997

In order to eliminate position errors existing at the steady state in the motion control of robotic manipulators, a new fuzzy control algorithm is propeosed using three variables, position error, velocity error and integral of position errors as input variables of the fuzzy controller. Although the number of input variables of the fuzzy controller is increased from two to three, the number of fuzzy control rules is just increased by two. Three dimensional look-up table is used to reduce the computational time in real-time control, and a technique reducing the amount of necessary memory is introduced. Simulation and experimental studies show that the position errors at the steady state are decreased more than 90% compared to those of existing fuzzy controller when the proposed fuzzy controller is applied to the 2 axis direct drive SCARA robot manipulator.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.26-31
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• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.423-430
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• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.39 no.6
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• pp.630-640
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• 2002

The compressed video bitstream is very sensitive to transmission errors. If we lost packet or received with errors during the transmission, not only the current frame will be corrupted, but also errors will propagate to succeeding frames. Error concealment is a data recovery technique that enables the decoder to conceal effects of transmission errors by predicting the lost or corrupted video data from the previously reconstructed error free information. Motion vection recovery and motion compensation with the estimated motion vector is a good approach to conceal the corrupted macroblock data. In this paper, we prove that it is reasonable to use the estimated motion vector to conceal the lost macroblock by providing macroblock distortion models. After we propose a new motion vector recovery algorithm based on optical flow fields, we compare its performance to those of conventional error concealment methods. The proposed algorithm has smaller computational complexity than those of conventional algorithms.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.489-490
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• 2012

• Journal of the Korean Institute of Telematics and Electronics B
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• v.32B no.5
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• pp.777-787
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• 1995

This paper presents a new method for automatically calibrating robot link (Kinematic) parameters during the process of estimating motion parameters of a moving object. The motion estimation is performed based on stereo cameras mounted on the end-effector of a robot manipulator. This approach significantly differs from other calibration approaches in that the calibration is achieved by simply observing the motion of the moving object (without resorting to any other external calibrating tools) at numerous and widely varying joint-angle configurations. A differential error model, which expresses the measurement errors of a robot in terms of robot link parameter errors and motion parameters, is developed. And then a measurement equation representing the true measurement values is derived. By estimating the above two kinds of parameters minimizing the difference between the measurement equations and the true moving pattern, the calibration of the robot link parameters and the estimation of the motion parameters are accomplished at the same time.

• Proceedings of the Korea Society for Simulation Conference
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• 1998.10a
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• pp.120-123
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• 1998

In animating an articulated entity with motion capture data, especially when the reconstruction is based on forward kinematics, there could be large discrepancies at the end effector. The small errors in joint angles tend to be amplified as the forward kinematics positioning progresses toward the end effector. In this paper, we present an algorithm that enhances the motion capture data to reduce positional errors at the end effector. The process is optimized so that the characteristics of the original joint angle data is preserved in the resulting motion. The frames at which the end-effector position needs to be accurate are designated as“keyframes”(e.g. starting and ending frames). In the algorithm, corrections by inverse kinematics are performed at sparse keyframes and they are interpolated with a cubic spline which produces a curve best approximating the measured joint angles. The experiment proves that our algorithm is a valuable tool to improve measured motion especially when end-effector trajectory contains a special goal.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.22 no.1
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• pp.16-23
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• 2011

This paper suggests a motion compensation technique using GPS/IMU data in order to compensate for phase error caused by undesired motion of radar platform. An actual flight trajectory would be deviate from an ideal straight-constant trajectory with a constant velocity for SAR imaging, due to pitch, roll and yaw motion of aircraft caused by turbulence. This leads to blurred SAR images due to inter-pulse phase errors as well as along-track velocity errors. If the motion compensation is carried out to reduce those errors, SAR image quality can be significantly improved. Simulation results show that the motion compensation technique introduced in this paper is an effective tool to improve SAR image quality against severe motion of radar platform.