• Journal of Mechanical Science and Technology
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• 제20권1호
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• 한국정밀공학회지
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• 제22권11호
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• pp.135-141
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• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.

• 한국정밀공학회지
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• 제19권6호
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• pp.77-85
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• 2002

An analysis method which calculates corrective machining information for improving the motion accuracy of linear motion guide Is proposed in this paper. The method is composed of two algorithms. One is the algorithm fur prediction of the motion errors from rail form error. The other is the algorithm for prediction of rail form error from the motion errors of table. Transfer function is utilized in each algorithm, which represents the ratio of bearing reaction force variation to unit magnitude of spatial frequencies of raid from error. As the corrective machining information is acquired from the measured motion errors of table, the method has a merit not to measure rail form error directly. Validity of the method is verified both theoretically and experimentally. By applying the method, linear motion error of test equipment is reduced from 5.97$\mu$m to 0.58$\mu$m, and reduced from 32.78arcsec to 6.21 arcsec in case of angular motion error. From the results, it is confirmed that the method is very effective to improve the motion accuracy of linear motion guide.

• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.62-68
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• 2004

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.129-130
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• 2011

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.671-677
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• 1996

This paper proposes a study on the effects of motion errors for acceleration/ deceleration types. The proposed motion errors are consisted of two errors : one due to transient response of servomechanism and the other due to gain mismatching of positioning servo motor. They are derived from using laplace transformation for the block diagram of general purpose feed drive system. In order to minimize them, the paper proposes second order polynomial regression model by using orthogonal array method which describes one of experimental methodolgies. The validity and reliability of the study was veri lied on a vertical machining center equipped with FANUC 0MC through a series of experiments and analyses.

• 한국방송∙미디어공학회:학술대회논문집
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• 한국방송공학회 2009년도 IWAIT
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• pp.764-767
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• 2009

Motion capture systems allow to measure the precise position of markers on the human body in real time. These captured motion data, the marker position data, have to be fitted by a human skeleton model to represent the motion of the human. Typical human skeleton models approximate the joints using a ball joint model. However, because this model cannot represent the human skeleton precisely, errors between the motion data and the movements of the simplified human skeleton model happen. We propose in this paper a method for measuring a translation component of wrist, and elbow joints on upper limb using optical motion capture system. Then we study the errors between the ball joint model and acquired motion data. In addition, we discuss the problem to estimate motion of human joint using optical motion capture system.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 추계종합학술대회 논문집(4)
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• pp.109-112
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• 2000

Bitstrems corrupted by channel errors are not only difficult to be decoded but also propagate error to other part of the bitstreams when highly compressed video is transmitted over channels with noise such as mobile communication channels. In this paper, error concealment algorithm performed in decoder is proposed when errors occur for transmission. Proposed algorithm searches moving area with homogeneous movement in neighbored blocks when motion vectors are damaged, then recovers motion vectors of missing blocks considering where missing blocks are belong to. Experiment result shows that proposed algorithm exhibits better performance in PSNR than existing error concealment method.

• 한국기계가공학회지
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• 제11권3호
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• pp.48-54
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• 2012

This paper introduces the kinematic calibration method to improve the positioning accuracy of a parallel mechanism. Since all the actuators in the parallel mechanism are controlled simultaneously toward the target position, the volumetric errors originated from each motion element are too complicated. Therefore, the exact evaluation of the error sources of each motion element and its calibration is very important in terms of volumetric errors. In the calibration processes, the measurement of the errors between commands and trajectories is necessary in advance. To do this, a digitizer was used for the data acquisition in 3 dimensional space rather than arbitrary planar error data. After that, the optimization process that was used for reducing the motion errors were followed. Consequently, Levenberg-Marquart algorithm as well as the error data acquisition method turned out effective for the purpose of the calibration of the parallel mechanism.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.288-291
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement