• 제목/요약/키워드: Morphology characteristic

검색결과 333건 처리시간 0.025초

RF-Sputtering법에 의한 CoSi2/Si 박막 형성에 관한 특성 (The Characteristic of Formation CoSi2/Si Thin Film by the RF-Sputtering Method)

  • 조금배;이강연;최연옥;김남오;정병호
    • 전기학회논문지
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    • 제59권7호
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    • pp.1255-1258
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    • 2010
  • In this paper, the $CoSi_2$ thin films with thicknesses of about $5{\mu}m$ were deposited on n-type silicon (111) substrates by RF magnetron sputtering method using a $CoSi_2$ target (99.99%). The flow rate of argon of 50 sccm, substrate temperature of $100^{\circ}C$, RF power of 60 watts, deposition time of 30 minutes, and the vacuum of $1\times10^{-6}$ Torr. The annealing treatments of the $CoSi_2$ thin film were performed from 500, 700 and $900^{\circ}C$ for 1h in air ambient by an electric furnace. In order to investigate the $CoSi_2$ thin film X-ray diffraction patterns were measured using the X-ray diffractometer (XRD). The structure of the thin films were investigated by using scanning the electron microscope (SEM) were used for review. The surface morphology of the thin films was measured with a atomic force microscopy (AFM). Temperature dependence of sheet resistivity and property of Hall effect was measured in the $CoSi_2$ thin film.

불평형 마그네트론 스파터링에 의해 형성된 MgO 박막의 micro 방전에 미치는 bias 전압의 영향에 관한 연구 (Effect of Bias Voltage on the Micro Discharge Characteristic of MgO Thin Film Prepared by Unbalanced Magnetron Sputtering)

  • 김영기;김인성;정주영;조정수;박정후
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.2032-2034
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    • 2000
  • The performance of ac plasma display panels (PDP) is influenced strongly by the surface glow discharge characteristics on the MgO thin films. This paper deals with the surface slew discharge characteristics and some physical properties of MgO thin films prepared by reactive RF planar unbalanced magnetron sputtering in connection with ac PDP. The samples prepared with the do bias voltage of -10V showed lower discharge voltage and lower erosion rate by ion bombardment than those samples prepared by conventional magnetron sputtering or E-beam evaporation. The main factor that improves the discharge characteristics by bias voltage is considered to be due to the morphology changes or crystal structure of the MgO thin film by ion bombardment during deposition process.

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해수분위기에서 스테인리스강 배관 소켓 용접부의 선택적 부식 (Selective Corrosion of Socket Welds of Stainless Steel Pipes Under Seawater Atmosphere)

  • 부명환;이장욱;이종훈
    • Corrosion Science and Technology
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    • 제19권4호
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    • pp.224-230
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    • 2020
  • Stainless steel has excellent corrosion resistance. The drawback is that pitting occurs easily due to the concentration of chloride. In addition, corrosion of socket weld, which is structurally and chemically weaker than the other components of the pipe, occurs rapidly. Since these two phenomena overlap, pinhole leakage occurs frequently in the seawater pipe socket welds made of stainless steel at the power plants. To analyze this specific corrosion, a metallurgical analysis of the stainless steel socket welds, where the actual corrosion occurred during the power plant operation, was performed. The micro-structure and chemical composition of each socket weld were analyzed. In addition, selective corrosion of the specific micro-structure in a mixed dendrite structure comprising γ-austenite (gamma-phase iron) and δ-ferrite (iron at high temperature) was investigated based on the characteristic micro-morphology and chemical composition of the corroded area. Finally, the different corrosion stages and characteristics of socket weld corrosion are summarized.

SiO$_2$ 완충층이 ZnO 박막의 물성 및 IDT/ZnO/SiO$_2$/Si 다층막 구조 표면탄성파 소자의 특성에 미치는 영향 (Effects of SiO$_2$ Buffer Layer on Properties of ZnO thin films and Characteristics of SAW Devices with a Multilayered Configuration of IDT/ZnO/SiO$_2$/Si)

  • 이진복;이명호;박진석
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제51권9호
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    • pp.417-422
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    • 2002
  • ZnO thin films were deposited on various substrates, such as Si-(111), SiO$_2$(5000 $\AA$ by thermal CVD)/Si-(100), and SiO$_2$(2000 $\AA$ by RF sputtering)/Si-(100). The (002)-orientation, surface morphology and roughness, and electrical resistivity of deposited films were measured and compared in terms of substrate. Surface acoustic wave(SAW) filters with a multilayered configuration of IDT/ZnO/SiO$_2$/Si were also fabricated and the IDT was obtained using a lift-off method. From the frequency-response characteristics of fabricated devices, the insertion loss and side-lobe rejection were estimated. The experimental results showed that the (002)-oriented growth nature of ZnO films, which played a crucial role of determining the characteristic of SAW device, was strong1y dependent upon the SiO$_2$buffer.

A Polycrystalline CdZnTe Film and Its X-ray Response Characteristics for Digital Radiography

  • Kim, Jae-Hyung;Park, Chang-Hee;Kang, Sang-Sik;Nam, Sang-Hee
    • Transactions on Electrical and Electronic Materials
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    • 제4권5호
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    • pp.15-18
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    • 2003
  • The Cd$\_$1-x/Zn$\_$x/Te film was produced by thermal evaporation for the flat-panel X-ray detector. The crystal structure and the surface morphology of poly crystalline Cd$\_$1-x/Zn$\_$x/Te film were examined using XRD and SEM, respectively. The leakage current and X-ray sensitivity of the fabricated films were measured to analyze the X-ray response characteristic of Zn in a polycrystalline CdZnTe thin film. The leakage current and the output charge density of Cd$\_$0.7/Zn$\_$0.3/Te thin film were measured to 0.3 1nA/$\textrm{cm}^2$ and 260 pC/$\textrm{cm}^2$ at an applied voltage of 2.5 V/$\mu\textrm{m}$, respectively. Experimental results showed that the increase of Zn doping rates in Cd$\_$1-x/Zn$\_$x/Te detectors reduced the leakage current and improved the X-ray sensitivity significantly. The leakage current was drastically diminished by the formation of thin parylene layer in the Cd$\_$0.7/Zn$\_$0.3/Te detector.

Nd:YAG 레이저로 표면처리된 ITO를 전극으로 한 유기EL 소자의 특성 (Surface treatment of ITO with Nd:YAG laser and OLED device characteristic)

  • 노임준;신백균;김형권;김용운;임응춘;박강식;정무영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1359-1360
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    • 2006
  • lTO(Indium-Tin-Oxide) was used as anode material for OLED. Characteristics of ITO have great effect on efficiency of OLEDS(Organic light emitting diodes). ITO surface was treated by Nd:YAG laser in order to improve its chemical properties, wettability, adhesive property and to remove the surface contaminants while maintaining its original function. In this study, main purpose was to improve the efficiency of OLEDs by the ITO surface treatment: ITO surface was treated using a Nd:YAG(${\lambda}=266nm$, pulse) with a fixed power of 0.06[w] and various stage scanning velocities. Surface morphology of the ITO was investigated by AFM. Test OLEDs with surface treated ITO were fabricated by deposition of TPD (HTL), Ald3 (ETL/TML) and Al (cathode) thin films. Device performance of the OLEDs such as V-I-L was investigated using Source Measurement Unit (SMU: Keithly. Model 2400) and Luminance Measurement (TOPCON. BM-8).

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림프절로 전이된 비인두 미분화 암종의 세침흡인 세포학적 소견 -주로 방추형 세포의 양상을 나타낸 1례- (Fine Needle Aspiration Cytology of Metastatic Nasopharyngeal Undifferentiated Carcinoma of Lymph Node - Report of a Case Presenting Spindle Cell Pattern -)

  • 민동원;이광길
    • 대한세포병리학회지
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    • 제4권1호
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    • pp.35-40
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    • 1993
  • We describe a case of fine needle aspiration cytology of metastatic nasopharyngeal carcinoma in the lymph node of the neck presenting a predominantly spindle cell pattern. A 36 year-old male patient complained of dysesthesia on the right face and a palpable neck mass. Fine needle aspiration was done on the neck mass. Tumor cells were present in syncytial groups or singly with mainly spindle shaped nuclei, vesicular chromatin, thin and regular nuclear membrane, occasional prominent nucleoli and a few fool of cellular cohesiveness. The cytoplasm was scant and pale with ill-defined borders. Mature lymphocytes were present in the background of aspirates and within the tumor cell clusters. Histologically, the tumor of nasopharynx showed several areas of spindle cell pattern. Because the tumor cells showed a predominantly spindle shape with vesicular nuclear chromatin, the differential diagnosis of spindle cell sarcoma or granuloma of epithelioid clils were considered, but the characteristic morphology of the nuclei with vesicular chromatin and prominent nucleoli, and cellular cohesiveness were important in making the diagnosis of nasopharyngeal carcinoma. The possibility of metastatic carcinoma should always be considered in fine needle aspiration cytology of the lymph node in the neck because the incidence of metastatic carcinoma, particularly of the nasopharyngeal carcinoma in the lymph nodes of the neck is relatively high.

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스퍼터링 코팅층을 중간재로 사용한 동(Cu)의 저온 접합(제1보) (Low Temperature Bonding of Copper with Interlayers Coated by Sputtering(Part 1))

  • 김대훈
    • 연구논문집
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    • 통권24호
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    • pp.63-79
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    • 1994
  • This article reports a experimental study of the method to achieve a bond joint at lower temperature in a short time. DC magnetron sputtering of Sn, Sn/Pb, Sn/In and Sn/Cu on copper substrate was provided as an interlayer for Cu to Cu bonding under the air environment. Various examination was conducted and investigated on the effect of experimental parameters such as coating materials, coating time(or coating thickness), bonding temperature and bonding time etc. Bonding was performed at the temperature of $210^\circC-320^\circC$ for 0sec and interfacial reaction between the coated layer and copper substrate was examined using optical, scanning electron microscope and x-ray diffractometer. From the obtained results, it was found that intermetallic compounds layer consisted of $\eta-phase(Cu_6Sn_5)$ and $\beta-phase(Cu_3Sn)$ was formed at the joint interface for almost all coating materials. But the dominant phase formed in the preetched Cu substrate coated with Sn was $\beta-phase$. A characteristic morphology looks like a reaction ring, which was believed as the strong interconnecting regions between two substrates, was found to be formed on the reaction surface of copper substrates. The morphologies and compositions of the intermetallics, which depends on the regions of the reaction surface, was appeared as greatly different. Based on above results, the new bonding process to make the joint at lower temperature for short time can be admitted as a feasible process.

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자기공명영상장치(磁氣共鳴映像裝置)에서 움직임허상(虛像)의 위치제어(位置制御)에 관(關)한 연구(硏究) (A Study on Locational Control of Motion Ghost in Magnetic Imaging System)

  • 이후민
    • 대한방사선기술학회지:방사선기술과학
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    • 제16권2호
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    • pp.19-26
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    • 1993
  • Magnetic Resonance Image represents three-dimensional diagnostic imaging technique using both nuclear magnetic resonance phenomenon and computer. Compared with computed tomography (CT), MRI have advantages harmless to patient's body, three-dimensional image with high resolution and disadvantages long data acquisition time because of long T1 relaxation time, relatively low signal to noise ratio, high cost of setting, also. As physiologic motion of tissue results in motion ghost in MRI, high 2.0Tesla make improve low signal to noise ratio. This study have aim to improve image quality with controling motion ghost of tissue. Supposing a moving pixel in constant frequency, one pixel make two ghosts which are same size and different anti-phase. So, this study will show adjust parameter on locational control of motion ghost. Author made moving phantom replaced by respiratory movement of human, researched change of motion frequency, FOV by location shift, and them decided optimal FOV (field of view). The results are as follows: 1. The frequency content of the motion determines how far the image always appear in phase-encoding direction, the morphology of the ghost image is characteristic of the direction of the motion and its amplitude. 2. Double FOV of fixed signal object for locational control of motion ghost is recommended. Decreasement of spatial resolution by increasing FOV can compensate on increasing of matrix in spite of scan time increasement.

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무전해 코발트계 석출막에 미치는 기판의 영향 (Effect of Substrate on Electroless Co-Base Deposited Films)

  • 한창석;천창환;한승오
    • 한국재료학회지
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    • 제19권6호
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    • pp.319-324
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    • 2009
  • The deposition behavior and structural and magnetic properties of electroless Co-B and Co-Fe-B deposits, as well as the amorphous ribbon substrates, were investigated. These Co-based alloy deposits exhibited characteristic polycrystalline structures and surface morphology and magnetic properties that were dependent on the type of amorphous substrates. The catalytic activity sequence of the amorphous ribbon electrodes for anodic oxidation of DMAB was estimated from the current density-potential curve in the anodic partial electrolytic bath that did not contain the metal ions. Both the deposition rate and potential in the initial region were obtained in order of the catalytic activity, depending on the alloy compositions of the substrates. The deposition rate linearly varied against the deposition time. The initial deposition potential may have also determined the structural and magnetic properties of the deposit based on the thickness of ${\mu}m$ order. Furthermore, a basic study of the electroless deposition processes on an amorphous ribbon substrate has been carried out in connection with the structural and magnetic properties of the deposits.