• Title/Summary/Keyword: Molybdenum target

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Contact Microscopy by Using Soft X-ray Radiation from Iodine Laser Produced Plasma (옥소레이저 플라즈마에서 발생된 연 X-선을 이용한 밀착현미경기술)

  • 최병일;김동환;공홍진;이상수
    • Korean Journal of Optics and Photonics
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    • v.1 no.1
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    • pp.46-51
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    • 1990
  • Laser plasma was generated by a 1GW iodine photodissociation laser ($\lambda$=1.315$\mu\textrm{m}$, E=12.7J) whose output beam was focused on a molybdenum target surface. The experiment was conducted in a vacuum chamber under 1D-sTorr and several tens of laser shooting were necessary for sufficient exposure for the PBS resist of 111m thickness. Aluminium was coated on the top of the resist by 0.1$\mu\textrm{m}$ thickness which acts as an X-ray filter to cut off the visible and the ultraviolet lights. A bio-specimen was put directly on the aluminium coated resist and located at a distance of 3 cm from the X-ray source. The replicas of a steel mesh, spider's web. and a red blood cell were obtained by this technique and were observed by Nomarski microscope and SEM. The limitation of its resolution is determined by the X-ray source size and Fresnel diffraction effect, and its theoretical prediction is well matched with the experimental results. In this experiment, a resolution better than 0.1$\mu\textrm{m}$ could be obtained. ained.

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