• 한국분말재료학회지
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• 제31권1호
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• pp.43-49
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• 2024

In this study, a core-shell powder and sintered specimens using a mechanically alloyed (MAed) Ti-Mo powder fabricated through high-energy ball-milling are prepared. Analysis of sintering, microstructure, and mechanical properties confirms the applicability of the powder as a sputtering target material. To optimize the MAed Ti-Mo powder milling process, phase and elemental analyses of the powders are performed according to milling time. The results reveal that 20 h of milling time is the most suitable for the manufacturing process. Subsequently, the MAed Ti-Mo powder and MoO₃ powder are milled using a 3-D mixer and heat-treated for hydrogen reduction to manufacture the core-shell powder. The reduced core-shell powder is transformed to sintered specimens through molding and sintering at 1300 and 1400℃. The sintering properties are analyzed through X-ray diffraction and scanning electron microscopy for phase and porosity analyses. Moreover, the microstructure of the powder is investigated through optical microscopy and electron probe microstructure analysis. The Ti-Mo core-shell sintered specimen is found to possess high density, uniform microstructure, and excellent hardness properties. These results indicate that the Ti-Mo core-shell sintered specimen has excellent sintering properties and is suitable as a sputtering target material.

• 방사성폐기물학회지
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• 제13권2호
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• pp.155-161
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• 2015

몰리브덴-99의 붕괴에 의해 생산되는 테크네튬-99m 은 방사선 진단에 중요한 역할을 담당하고 있다. 몰리브덴-99 는 주로 우라늄-235의 핵분열에 의해 생산되고 있으며, 이를 위해 고농축 우라늄 표적 또는 저농축 우라늄 표적이 연구로에서 조사된다. 현재는 고농축 우라늄의 사용에 따른 핵확산 문제를 저감하기 위해 저농축 우라늄 표적의 사용이 권장되고 있다. 본 연구는 몰리브덴-99 생산 시설의 계획 단계에서 방사성 폐기물 관리 전략을 정의하기 위하여 저농축 우라늄의 사용이 방사성 폐기물의 흐름에 미치는 영향을 분석하였다. 저농축 우라늄 표적 사용 시 우라늄 함유 폐기물의 부피가 6배 이상 증가하기 때문에 우라늄 고밀도 표적의 사용과 고온 정수압 압축법의 활용이 제안되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.389-389
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• 2012

Molybdenum is one of the most important materials used as a back ohmic contact for $Cu(In,Ga)(Se,S)_2$ (CIGS) solar cells because it has good electrical properties as an inert and mechanically durable substrate during the absorber film growth. Sputter deposition is the common deposition process for Mo thin films. Molybdenum thin films were deposited on soda lime glass (SLG) substrates using direct-current planar magnetron sputtering technique. The outdiffusion of Na from the SLG through the Mo film to the CIGS based solar cell, also plays an important role in enhancing the device electrical properties and its performance. The structure, surface morphology and electrical characteristics of Mo thin films are generally dependent on deposition parameters such as DC power, pressure, distance between target and substrate, and deposition temperature. The aim of the present study is to show the resistivity of Mo layers, their crystallinity and morphologies, which are influenced by the substrate temperature. The thickness of Mo films is measured by Tencor-P1 profiler. The crystal structures are analyzed using X-ray diffraction (XRD: X'Pert MPD PRO / Philips). The resistivity of Mo thin films was measured by Hall effect measurement system (HMS-3000/0.55T). The surface morphology and grain shape of the films were examined by field emission scanning electron microscopy (FESEM: Hitachi S-4300). The chemical composition of the films was obtained by the energy dispersive X-ray spectroscopy (EDX). Finally the optimum substrate temperature as well as deposition conditions for Mo thin films will be developed.

• 한국광학회:학술대회논문집
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• 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.49-53
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• 1990

Laser plasma was generated by a 1 GW iodine photodissociation laser(λ=1.315${\mu}{\textrm}{m}$, E-12.7J) whose output beam was focused on a molybdenum target surface. The experiment was conducted in the vacuum chamber under 10-5Torr and several tens of laser shooting were necessary for sufficient exposure to the PBS resist. A speciman was put directly on the resist and located at a distance of 3cm from the X-ray source. The replicas of a mesh, spider's tread, a red blood cell were obtained by PBS resist and were analyzed by Nomarski and SEM. Two main effects of limitation in resolution, source size and Fresnel diffraction, are mentioned and compared with the experimental result. In this experiment, a resolution better than 1000A could be obtained.

• 한국진공학회지
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• 제15권1호
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• pp.103-109
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• 2006

전자빔원으로 탄소나노튜브에 기초를 두고 있는 고휘도 마이크로빔 X선원용 타첫이 설계되었다. X-선원은 다음과 같은 제원을 따른다. $1\times10^{11} phs/s.mm^2.mrad^2$. 고휘도, 5 mm의 빔의 크기, $20\~40keV$ 평균 X-선 에너지. 제원을 만족시키기 위해서 구성, 물질, 타겟의 두께와 필요한 빔전류와 같은 타켓의 설계 변수들은 MCNPX code를 통해서 최적화되었다. 설계 변수들은 투과형 타겟 구조를 위해 X-선원의 스펙트럼과 세기의 분포의 계산으로부터 결정되었다 진공압력과 국소화된 열의 누적을 견디기 위한 투과형 타겟 구조를 위해서 구조적인 안정성과 온도 분포도 또한 고려되었다. 타겟 물질은 몰리보덴으로 선택되었고 최적화된 두께는 2mm로서 150mm 두께의 베릴륨이 붙여져 있다 부가적으로 투과형 타겟의 최대 온도가 안정적인 작동의 한계 내에서 유지될 수 있다는 것을 계산을 통하여 알게 되었다.

• 한국의학물리학회:학술대회논문집
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• 한국의학물리학회 2002년도 Proceedings
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• pp.396-399
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• 2002

Intense quasi-monochromatic x-ray irradiation from the linear plasma target is described. The plasma x-ray generator employs a high-voltage power supply, a low-impedance coaxial transmission line, a high-voltage condenser with a capacity of about 200 nF, a turbo-molecular pump, a thyristor pulse generator as a trigger device, and a flash x-ray tube. The high-voltage main condenser is charged up to 55 kV by the power supply, and the electric charges in the condenser are discharged to the tube after triggering the cathode electrode. The x-ray tube is of a demountable triode that is connected to the turbo molecular pump with a pressure of approximately 1 mPa. As electron flows from the cathode electrode are roughly converged to the molybdenum target by the electric field in the tube, the weakly ionized plasma, which consists of metal ions and electrons, forms by the target evaporating. In the present work, the peak tube voltage was almost equal to the initial charging voltage of the main condenser, and the peak current was about 20 kA with a charging voltage of 55 kV. When the charging voltage was increased, the linear plasma x-ray source grew, and the characteristic x-ray intensities of K-series lines increased. The quite sharp lines such as hard x-ray lasers were clearly observed. The quasi-monochromatic radiography was performed by a new film-less computed radiography system.

• 한국방사선학회논문지
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• 제17권1호
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• pp.107-114
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• 2023

엑스선형광분석은 비파괴적으로 시료에 포함된 원소와 농도를 분석할 수 있는 기법으로 과학 및 산업 분야에 광범위하게 사용되고 있다. 다양한 물질을 포함한 혼합물 또는 화합물 분석의 정밀도 향상을 위해 10 keV 근방의 저에너지와 20 keV 근방의 에너지 영역에 높은 강도 분포를 갖는 엑스선관이 요구된다. 두 에너지 영역에서 높은 강도 분포를 갖는 스펙트럼을 얻기 위하여 9.65 keV의 특성엑스선을 가지는 텅스텐과 17.48 keV의 몰리브덴 두 물질을 적층한 구조의 표적을 가지는 투과형 엑스선관을 몬테카를로 전산모사를 통해 스펙트럼을 분석하였다. W-Mo 구조의 표적을 통해 10 keV와 20 keV 근방의 강한 강도를 갖는 특성엑스선을 얻었다. 또한 4 ㎛ 두께의 Mo-W multilayers 구조의 표적을 통해 최적의 강도 분포를 갖는 스펙트럼을 얻을 수 있음을 확인하였다. 다양한 표적 물질을 선택 조합하고 두께 최적화를 통해 원하는 에너지 대역에서 높은 강도 분포를 갖는 스펙트럼을 얻는 것이 가능하다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.460-463
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• 2002

$MoO_3$ thin films were deposited on electrode and heater screen-printed alumina substrates in $O_2$ atmosphere by RF reactive sputtering using Molybdenum metal target. The deposition was performed at $300^{\circ}C$ with 350W of a forward power in an $Ar-O_2$ atmosphere. The working pressure was maintained at $3{\times}10^{-2}mtorr$ and all deposited films were annealed at $500^{\circ}C$ for 5hours. To investigate gas sensing characteristics of the addition doped $MoO_3$ thin film, Co, Ni and Pt were used as adding dopants. The sensing properties were investigated in tenn of gas concentration under exposure of reducing gases such as $H_2$, $NH_3$ and CO at optimum working temperature. Co-doped $MoO_3$ thin film shows the maximum 46.8% of sensitivity in $NH_3$ and Ni-doped $MoO_3$ thin film exhibits 49.7% of sensitivity in $H_2$.

• 한국전기전자재료학회논문지
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• 제16권8호
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• pp.705-710
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• 2003

MoO$_3$thin films were deposited on electrode of alumina substrates in $O_2$atmosphere by RF reactive sputtering using molybdenum metal target. The deposition was performed at 30$0^{\circ}C$ with 350 W of a forward power in an Ar-O$_2$atmosphere. The working pressure was maintained at 3$\times$10$^{-2}$ torr and all deposited films were annealed at 50$0^{\circ}C$ for 5 hours. The surface morphology of films was observed by using a SEM and crystalline phases were analyzed by using a XRD. To investigate gas sensing characteristics of the doped MoO$_3$thin film, Co, Ni and Pt were used as dopants. The sensing properties were investigated in term of gas concentration under exposure of reducing gases such as H$_2$, NH$_3$and CO at optimum working temperature. Co-doped MoO3 thin film shows the maximum 46.8 % of sensitivity in NH$_3$ and Ni-doped MoO$_3$thin film exhibits 49.7 % of sensitivity in H$_2$.

• 한국재료학회지
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• 제28권11호
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• pp.627-632
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• 2018

Two dimensional(2D) crystals, composed of a single layer or a few atomic layers extracted from layered materials are attracting researchers' interest due to promising applications in the nanoelectromechanical systems. Worldwide researchers are preparing devices with suspended 2D materials to study their physical and electrical properties. However, during the fabrication process of 2D flakes on a target substrate, contamination occurs, which makes the measurement data less reliable. We propose a dry transfer method using poly-methyl methacrylate(PMMA) for the 2D flakes to transfer onto the targeted substrate. The PMMA is then removed from the device by an N-Methyl-2-pyrrolidone solution and a critical point dryer, which makes the suspended 2D flakes residue free. Our method provides a clean, reliable and controllable way of fabricating micrometer-sized suspended 2D nanosheets.