• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.426-428
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• 2007

A simple method is presented for fabricating micro/nanoscale combined hierarchical structures using a two-step UV-assisted capillary molding technique. This lithographic method consists of two steps: (i) fabrication of partially cured polymer microstructures using a PDMS mold and (ii) subsequent nanofabrication using a high-resolution polyurethane acrylate (PUA) mold on top of the pre-formed microstructures. Using this technique, various micro/nano hierarchical structures were fabricated with minimum resolution down to 70 nm over a large area with very good reproducibility.

• 소성∙가공
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• 제31권5호
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• pp.290-295
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• 2022

Recently, the use of high-tech ceramic parts in functional electronic parts, automobile parts and semiconductor equipment parts is increasing. These ceramics materials are required to have high reproducibility, reliability, large size and complex shapes. The researchers initiated the work to develop a new shaping method called gel casting, which allows high performance ceramic materials with a complex shape to be produced. The manufacturing process parameters of gel casting include uniform mixing of the initiator, bubble removal, and slip injection. In this study, we analyzed the dispersion and gelation characteristics according to the change in the additive content of the alumina slurry in the gel casting process. The alumina slurry for gel casting was prepared by mixing a solvent, a monomer and a dispersant through a ball mill. Alumina powder and a gelation initiator were added to the mixed solution, and ball milling was performed for 24 hours. A viscosity of 6,435 cps and a stable zeta potential value were obtained under the conditions of alumina powder content of 55 vol% and dispersant 2.0 wt%. After curing for 12 hours by adding aps 0.1wt%, TEMED 0.2wt%, and Monomer 3, 5wt%, it was possible to separate from the molding cup, confirming that the gelation was completed.

• Korean Chemical Engineering Research
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• 제48권1호
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• pp.33-38
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• 2010

구리 이온 농도를 측정하기 위하여 생체재료를 사용하여 마이크로플루이딕 시스템을 제작하였다. 은 전극에 세포막을 모방한 이중층 지질막(bilayer lipid membrane; BLM)을 피복하여 제2 구리 이온 농도를 감지하도록 하였다. 은 전극에 지지된 BLM은 그 안정성이 증대되었다. 은에 지지된 이중층 지질막(s-BLM)은 은 전선을 지질 (phosphatidylcholine; PC) 용액에 담갔다가 KCl 용액에 담글 때 자기조립 특성에 의하여 용이하게 형성할 수 있다. 이 지지된 이중층 지질막(s-BLM)은 $Cu^{2+}$의 농도와 s-BLM을 통과하는 전류 간의 상관 관계를 결정하기 위하여 사용되었다. 얻어진 상관관계는 선형을 보였으며 높은 재현성을 가졌다. $Cu^{2+}$ 농도가 $10{\sim}130{\mu}M$인 범위에서 $Cu^{2+}$ 농도와 전류의 상관관계를 나타내기 위하여 보정 곡선을 구축하였다. 이 보정 곡선을 미지 시료의 $Cu^{2+}$ 농도 측정에 사용하였다. 지지된 이중층 지질막이 구비된 마이크로플루이딕 시스템은 PDMS(polydimethyl siloxane)를 사용하여 전형적인 연질 포토리소그라피와 몰딩 기법으로 제작하였다. 집적된 마이크로플루이딕 시스템은 은 전선을 절단하지 않고도 은 표면을 활성화시키는 기능, 은 표면에 이중층 지질막을 피복하는 기능, KCl 완충 용액을 주입하는 기능, $Cu^{2+}$를 포함한 시료를 주입하는 기능, 시료 중의 $Cu^{2+}$ 농도를 측정하는 기능 등 다중 기능을 가지도록 하였다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2012년도 춘계학술발표대회
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• pp.81.2-81.2
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• 2012

To fabricate a metal mold for injection molding, hot-embossing and imprinting process, mechanical machining, electro discharge machining (EDM), electrochemical machining (ECM), laser process and wet etching ($FeCl_3$ process) have been widely used. However it is hard to get precise structure with these processes. Electrochemical etching has been also employed to fabricate a micro structure in metal mold. A through mask electrochemical micro machining (TMEMM) is one of the electrochemical etching processes which can obtain finely precise structure. In this process, many parameters such as current density, process time, temperature of electrolyte and distance between electrodes should be controlled. Therefore, it is difficult to predict the result because it has low reliability and reproducibility. To improve it, we investigated this process numerically and experimentally. To search the relation between processing parameters and the results, we used finite element simulation and the commercial finite element method (FEM) software ANSYS was used to analyze the electric field. In this study, it was supposed that the anodic dissolution process is predicted depending on the current density which is one of major parameters with finite element method. In experiment, we used stainless steel (SS304) substrate with various sized square and circular array patterns as an anode and copper (Cu) plate as a cathode. A mixture of $H_2SO_4$, $H_3PO_4$ and DIW was used as an electrolyte. After electrochemical etching process, we compared the results of experiment and simulation. As a result, we got the current distribution in the electrolyte and line profile of current density of the patterns from simulation. And etching profile and surface morphologies were characterized by 3D-profiler(${\mu}$-surf, Nanofocus, Germany) and FE-SEM(S-4800, Hitachi, Japan) measurement. From comparison of these data, it was confirmed that current distribution and line profile of the patterns from simulation are similar to surface morphology and etching profile of the sample from the process, respectively. Then we concluded that current density is more concentrated at the edge of pattern and the depth of etched area is proportional to current density.