• Title/Summary/Keyword: Mo nitride

Search Result 66, Processing Time 0.029 seconds

Catalytic Ammonia Decomposition on Nitridation-Treated Catalyst of Mo-Al Mixed Oxide (Mo-Al 복합 산화물의 질화반응 처리된 촉매상에서 암모니아 촉매 분해반응)

  • Baek, Seo-Hyeon;Youn, Kyunghee;Shin, Chae-Ho
    • Korean Chemical Engineering Research
    • /
    • v.60 no.1
    • /
    • pp.159-168
    • /
    • 2022
  • Catalytic activity in ammonia decomposition reaction was studied on Mo-Al nitride obtained through temperature programmed nitridation of calcined Mo-Al mixed oxide prepared by varying the MoO3 quantity in the range of 10-50 wt%. N2 sorption analysis, X-ray diffraction analysis (XRD), X-ray photoelectron spectroscopy (XPS) and H2-temperature programmed reduction (H2-TPR), and transmission electron microscopy (TEM) to investigate the physicochemical properties of the prepared catalyst were performed. After calcination at 600 ℃, the XRD of Mo-Al oxide showed γ-Al2O3 and Al2(MoO4)3 phases, and the nitride after nitridation showed an amorphous form. The specific surface area after nitridation by topotactic transformation of MoO3 to nitride was increased due to the formation of Mo nitride, and the Mo nitride was observed to be supported on γ-Al2O3. As for the catalytic activity in the ammonia decomposition reaction, 40 wt% MoO3 showed the best activity, and as the nitridation time increases, the activity increased, and thus the activation energy decreased.

Atomic Layer $MoS_2$ Field-effect Transistors on Hexagonal Boron Nitride Substrate

  • Yu, Yeong-Jun;Lee, Gwan-Hyeong;Hone, James;Kim, Philip
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.02a
    • /
    • pp.192-192
    • /
    • 2012
  • The next generation electronics need to not only be smaller but also be more flexible. To meet such demands, electronic devices using two dimensional (2D) atomic crystals like graphene, hexagonal boron nitride (h-BN), molybdenum disulfate ($MoS_2$) and organic thin film have been studied intensely. In this talk, I will demonstrate the $MoS_2$ field effect transistor (FET) toward performance enhancement by insulating h-BN substrate.

  • PDF

Effects of Nitrogen and Precipitates on the Mechanical Properties of 26Cr-2Mo Superferritic Stainless Steel Welds (26Cr-2Mo 수퍼 페라이트계 스테인리스강의 용접부 기계적 성질에 미치는 질소 및 석출물의 영향)

  • 황의순;이하미;김성욱;서영대;이창희;안상곤;이용득
    • Journal of Welding and Joining
    • /
    • v.20 no.5
    • /
    • pp.63-71
    • /
    • 2002
  • One of the shortcoming of ferritic stainless steels is their limited toughness. The most important factor governing the toughness of ferritic stainless steels is hewn to be their interstitial contents. Due to the limited solubility of carbon and nitrogen in the ferrite matrix, it is difficult to avoid carbide and nitride precipitates. In the study, the role of nitrogen on the toughness of 260r-2Mo superferritic stainless steel welds has been investigated using alloys containing various nitrogen levels between 100 and 1640 ppm. Mechanical properties of weld metals have been evaluated by microhardness, Charpy impact test and notch tensile test. The alloys are mainly embrittled by the grain boundary and intragranular nitride precipitation. Grain boundary precipitates are considered to be more deleterious than intrauanular nitrides. Fracture mechanism have been elucidated through microscopic evaluation of notch tensile test

Diffusion barrier characteristics of molybdenum nitride films for ultra-large-scale-integrated Cu metallization (I); Surface morphologies and characteristics of sputtered molybdenum nitride films

  • Jeon, Seok-Ryong;Lee, You-Kee;Park, Jong-Wan
    • Journal of Korean Vacuum Science & Technology
    • /
    • v.1 no.1
    • /
    • pp.24-29
    • /
    • 1997
  • Surface morphologies and fundamental characteristics of molybdenum nitride films deposited by reactive dc magnetron sputtering were studied for application to Cu diffusion barrier. A phase transformation from Mo to $\gamma$-Mo$_2$N phase at 0.5$N_2$ flow ratio.($N_2$/(Ar+$N_2$)) equal to and larger than 0.2, whereas a second phase transformation to $\gamma$-MoN phase at 0.5 N2 flow ratio, With the variation of the N2 ratio the surface morphologies of the films were generally smooth except the cases of 0.2 and 0.3$N_2$ gas rations, where build-up of film stresses occurred. $\gamma$-Mo$_2$N film was found to crystallize at the deposition temperature of 40$0^{\circ}C$. The surfaces of $\gamma$-Mo$_2$N films deposited up to 40$0^{\circ}C$ were smooth, but the film deposited at 50$0^{\circ}C$ had very rough surface morphology. It seems that this was due to the building-up of thermal stresses at the high deposition temperature, which might lead to hillock formation.

Characteristics of Molybdenum Nitride Diffusion Barrier for Copper Metallization (Cu 금속배선을 위한 Molybdenum Nitride 확산 방지막 특성)

  • Lee, Jeong-Yeop;Park, Jong-Wan
    • Korean Journal of Materials Research
    • /
    • v.6 no.6
    • /
    • pp.626-631
    • /
    • 1996
  • Reactive dc magnetron sputtering 법을 이용하여 증착한 molybdenum mitride 박막의 Cu 확산 방지막 특성을 조사하였다. Cu 확산 방지막으로서 molybdenum nitride 박막의 열적안정성을 관찰하기 위하여 molybdenum nitride 박막 위에 Cu를 evaporation 법으로 증착하고 진공 열처리하였다. Cu/r-Mo2N/si 구조는 $600^{\circ}C$, 30분간 열처리 시까지 안정하였다. 확산 방지막의 파괴는 $650^{\circ}C$, 30분간 열처리 시부터 격자 확산(lattice diffusion)이나 입계(grain boundary)과 결함(defect)을 통한 확산에 의해 나타나기 시작하였고, 이 때 molybdenum silicide과 copper silicide의 형성에 기인된 것으로 생각되었다. 열처리 이후 Cu/r-Mo2N/Si 사이의 상호반응이 증가하였다. 이는 Rutherford backscattering spectrometry, Auger electron spectroscopy 그리고 Nomarski microscopy 등의 분석을 통해 조사되었다.

  • PDF

Diffusion barrier characteristics of molybdenum nitride films for ultra-large-scale-integrated Cu metallization(II); Effect of deposition conditions on diffusion barrier behavior of molybdenum nitride

  • Lee, Jeong-Joub;Lee, You-Kee;Jeon, Seok-Ryong;Kim, dong-Joon
    • Journal of Korean Vacuum Science & Technology
    • /
    • v.1 no.1
    • /
    • pp.30-37
    • /
    • 1997
  • Interactions of Cu films with Si substrates separated by thin layers of molybdenum and molybdenum nitride were investigated in the viewpoint of diffusion barrier to copper. the diffusion barrier behavior of the layers was studied as functions of deposition and annealing conditions by cross-sectional transmission electron microscopy and Nomarski microscopy. the layers deposited at $N_2$ gas ratios of 0.4 and 0.5 exhibited good diffusion barrier behaviors up to $700^{\circ}C$, mainly due to the phase transformation of molybdenum to $\gamma$-Mo$_2$N phase. The increase in the N gas ratio in deposition elevates the lower limit of barrier failure temperature. Futhermore, amorphous molybdenum nitride films deposited at 20$0^{\circ}C$ and 30$0^{\circ}C$ did not fail, while the crystalline $\gamma$-Mo$_2$N films deposited at 40$0^{\circ}C$ and 50$0^{\circ}C$ showed signs of interlayer interactions between Cu and Si after annealing at 75$0^{\circ}C$ for 30 minutes. Therefore, the amorphous nature of the molybdenum nitride layer enhanced its ability to reduce Cu diffusion and its stability as a diffusion barrier at elevated temperatures.

Over 8% efficient nanocrystal-derived Cu2ZnSnSe4 solar cells with molybdenum nitride barrier films in back contact structure

  • Pham, Hong Nhung;Jang, Yoon Hee;Park, Bo-In;Lee, Seung Yong;Lee, Doh-Kwon
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2016.02a
    • /
    • pp.426.2-426.2
    • /
    • 2016
  • Numerous of researches are being conducted to improve the efficiency of $Cu_2ZnSnSe_4$ (CZTSe)-based photovoltaic devices, which is one of the most promising candidates for low cost and environment-friendly solar cells. In this work, we concentrate on the back contact of the devices. A proper thickness of $MoSe_2$ in back contact structure is believed to enhance adhesion and ohmic contact between Mo back contact and absorber layer. Nevertheless, too thick $MoSe_2$ layers that are grown during high-temperature selenization process can impede the current collection, thus resulting in low cell performance. By applying molybdenum nitride as a barrier in back contact structure, we were able to control the thickness of $MoSe_2$ layer, which resulted in lower series resistance and higher fill factor of CZTSe devices. The phase transformation of Mo-N binary system was systematically studied by changing $N_2$ concentration during the sputtering process. With a proper phase of Mo-N fabricated by using an adequate partial pressure of $N_2$, the efficiency of CZTSe solar cells as high as 8.31% was achieved while the average efficiency was improved by about 2% with respect to that of the referent cells where no barrier layer was employed.

  • PDF

FEM Residual Stress Analysis and Mechanical Properties of Silicon Nitride/Stainless Steel Joint with Multi-Interlayer (다층중간재를 사용한 질화규소/스테인레스 강 접합체의 잔류응력 해석 및 기계적 특성)

  • 박상환;김태우;최영화
    • Journal of the Korean Ceramic Society
    • /
    • v.33 no.2
    • /
    • pp.127-134
    • /
    • 1996
  • The thermal residual stresses were estimated for brazed Si3N4/S.S.316 joints with Cu/Mo multi-interlayers using FEM, and their bending strengths at room temperature were measured for various interlayer configura-tions. The Cu, Mo multi-interlayer decreased the maximum residual stress in Si3N4 and caused the residual stress redistribution rsulting in the high residual stress at Mo interlayer. The stress distribution in the joints as well as the maximum residual stress in silicon nitride were found to be main factors for determining bending strengths and Weibull modulous of the joints. The bending strength of the brazed Si3N4/S.S.316 joints with specific Cu, Mo multi-interlayer system were found to be above 400 MPa.

  • PDF

Effect of Interlayers on the Bending Strength of Silicon Nitride/Staineless Steel Joints (중간재가 질화규소/스테인레스 스틸 접합체의 굽힘강도에 미치는 영향)

  • 박상환;최영화;김태우
    • Journal of the Korean Ceramic Society
    • /
    • v.33 no.3
    • /
    • pp.251-258
    • /
    • 1996
  • The reactions between an active metal brazing alloy and interlayers together with the effects of interlayer type on the interfacial microstructure change were investiaged for silicon nitride/stainless steel joint. The bending strengths were measured for joints with Mo, Cu, Ni interlayer type of different thicknesses. It was found that the interlayer with a low yield strength value is effective to improve the bending strength of the Si3N4/stainless steel joint. The maximum joint strength obtained at room temperature for a laminated Cu/Mo interlayer was about 460 MPa. The combined use of Mo and thin Cu layer was found to be effective in enhancing the bending strength for the Si3N4/S.S.316 joint.

  • PDF