• Title/Summary/Keyword: Mo Film

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Structural, Electrical and Optical Properties of $HfO_2$ Films for Gate Dielectric Material of TTFTs

  • Lee, Won-Yong;Kim, Ji-Hong;Roh, Ji-Hyoung;Moon, Byung-Moo;Koo, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.331-331
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    • 2009
  • Hafnium oxide ($HfO_2$) attracted by one of the potential candidates for the replacement of si-based oxides. For applications of the high-k gate dielectric material, high thermodynamic stability and low interface-trap density are required. Furthermore, the amorphous film structure would be more effective to reduce the leakage current. To search the gate oxide materials, metal-insulator-metal (MIM) capacitors was fabricated by pulsed laser deposition (PLD) on indium tin oxide (ITO) coated glass with different oxygen pressures (30 and 50 mTorr) at room temperature, and they were deposited by Au/Ti metal as the top electrode patterned by conventional photolithography with an area of $3.14\times10^{-4}\;cm^2$. The results of XRD patterns indicate that all films have amorphous phase. Field emission scanning electron microscopy (FE-SEM) images show that the thickness of the $HfO_2$ films is typical 50 nm, and the grain size of the $HfO_2$ films increases as the oxygen pressure increases. The capacitance and leakage current of films were measured by a Agilent 4284A LCR meter and Keithley 4200 semiconductor parameter analyzer, respectively. Capacitance-voltage characteristics show that the capacitance at 1 MHz are 150 and 58 nF, and leakage current density of films indicate $7.8\times10^{-4}$ and $1.6\times10^{-3}\;A/cm^2$ grown at 30 and 50 mTorr, respectively. The optical properties of the $HfO_2$ films were demonstrated by UV-VIS spectrophotometer (Scinco, S-3100) having the wavelength from 190 to 900 nm. Because films show high transmittance (around 85 %), they are suitable as transparent devices.

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Treatment of Osteoid Osteoma with Radio-frequency - A case report - (유골 골종의 경피적 고주파 파괴술 - 1례 보고-)

  • Seo, Jai-Gon;Kim, Jee-Hyoung;Ahn, Choong-Mo
    • The Journal of the Korean bone and joint tumor society
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    • v.6 no.1
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    • pp.35-40
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    • 2000
  • We report the radio-frequency ablation technique applied on an osteoid osteoma under CT guide and review other new methods of treatment for the osteoid osteoma. An 18-year-old boy with an osteoid osteoma at the left proximal tibia, which was visible at plain film and MRI. He was treated by the percutaneous radio-frequency ablation technique under CT guide after a needle biopsy. He is free from any symptom and able to do daily activities. So, we proposed that the percutaneous radio-frequency ablation technique under CT guide is the effective and safe treatment method for an osteoid osteoma.

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Using a Bismuth-film Glassy Carbon Electrode Based on Anodic Stripping Voltammetry to Determine Cadmium and Lead in a Standard Rice Flour (양극벗김전위법 비스무스막 유리탄소전극을 이용한 표준 쌀 분말 내 카드뮴과 납 측정)

  • Kim, Hak-Jin;Son, Dong-Wook;Mo, Chang-Yeon;Han, Jae-Woong;Kim, Gi-Young;Park, Sang-Won;Om, Ae-Son
    • Journal of Biosystems Engineering
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    • v.34 no.5
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    • pp.377-381
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    • 2009
  • Excessive presence of heavy metals in environment may contaminate plants and fruits grown in that area. Rapid on-site monitoring of heavy metals can provide useful information to efficiently characterize heavy metal-contaminated sites and minimize the exposure of the contaminated food crops to humans. This study reports on the evaluation of a bismuth-coated glassy carbon electrode for simultaneous determination of cadmium (Cd) and lead (Pb) in a NIST-SRM 1568a rice flour by anodic stripping voltammetry (ASV). The use of a supporting electrolyte 0.1 M $HNO_3$ at a dilution ratio (sample pretreated with acid digestion in a microwave oven: supporting electrolyte) of 1:1 provided well-defined, sharp and separate peaks for Cd and Pb ions, thereby resulting in strongly linear relationships between Cd and Pb concentrations and peak currents measured with the electrode ($R^2\;=\;0.97$, 0.99 for Cd and Pb, respectively). The validation test results for spiked standard solutions with different concentrations of Cd and Pb gave acceptable predictability for both spiked Cd and Pb ions with mean prediction errors of 6 to 30%. However, the applicability of the electrode to the real rice flour sample was limited by the fact that Cd concentrations spiked in the rice flour sample were overly estimated with relatively high variations even though Pb ion could be quantitatively measured with the electrode.

Effect of Degraded Al-doped ZnO Thin Films on Performance Deterioration of CIGS Solar Cell (고온 및 고온고습 환경 내에서 ZnO:Al 투명전극의 열화가 CIGS 박막형 태양전지의 성능 저하에 미치는 영향)

  • Kim, Do-Wan;Lee, Dong-Won;Lee, Hee-Soo;Kim, Seung-Tae;Park, Chi-Hong;Kim, Yong-Nam
    • Journal of the Korean Ceramic Society
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    • v.48 no.4
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    • pp.328-333
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    • 2011
  • The influence of Al-doped ZnO (AZO) thin films degraded under high temperature and damp heat on the performance deterioration of Cu(In,Ga)$Se_2$ (CIGS) solar cells was investigated. CIGS solar cells with AZO/CdS/CIGS/Mo structure were prepared on glass substrate and exposed to high temperature ($85^{\circ}C$) and damp heat ($85^{\circ}C$/85% RH) for 1000 h. As-prepared CIGS solar cells had 64.91% in fill factor (FF) and 12.04% in conversion efficiency. After exposed to high temperature, CIGS solar cell had 59.14% in FF and 9.78% in efficiency, while after exposed to damp heat, it had 54.00% in FF and 8.78% in efficiency. AZO thin films in the deteriorated CIGS solar cells showed increases in resistivity up to 3.1 times and 4.4 times compared to their initial resistivity after 1000 h of high temperature and damp heat exposure, respectively. These results can be explained by the decreases in carrier concentration and mobility due to diffusion or adsorption of oxygen and moisture in AZO thin films. It can be inferred that decreases in FF and conversion efficiency were caused by an increase in series resistance, which resulted from an increase in resistivity of AZO thin films degraded under high temperature and damp heat.

Evaluation of ROC Curve in High Kilovoltage Technique Using Simulated Nodules on Chest (고관전압 흉부촬영의 가상결절을 이용한 ROC평가)

  • Ahn, Jin-Shin;Chang, Myung-Mi;Chung, Kyung-Mo;Cheung, Hwan;Lim, Jung-Ki;Kim, Jong-Hyo
    • Journal of radiological science and technology
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    • v.15 no.2
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    • pp.25-30
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    • 1992
  • With transmitted dose through chest which has the problem of wide variations in absorption, simple film/screen combination method makes it diffucult to image lung field, mediastinum and retrocardiac areas. In order to overcome this, it is very common to use the high kilovoltage technique in diminishing the differences between high and low contrast. We have been adopting this method at department of diagnostic radiology, Seoul National University Hospital. To compare the image of it with that of low kilovoltage technique, we did radiographic tests using beans on the skin. We marked off into three anatomical categories such as lungs, mediastinum and near diaphragm, then attached a bean on a marked area at random. In order to compare with high and low, we took a radiography of high($120{\sim}140\;kVp$) and low($70{\sim}90\;kVp$) kilovoltage tehchniques, respectively at the same time. We have done experiments 320 cases. We evaluated the results of test in response to sensitivity(true positive) and specificity(true negative). In evaluating, we gave them points from 1 to 5 according to true or false. With given points by a radiologist having much experiences, we could acquire the percentage of sensitivity and specificity. The percentage made us to get the schematic table of ROC curve of those two methods. Consequently, high kilovoltage technique appeared 18% better than low kilovoltage technique for detecting beans with our apparatus.

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A study on the CIGS thin film solar cells by Ga content (Ga 함유량에 따른 $Cu(In_{1-x}Ga_{x})Se_2$ 박막 태양전지에 관한 연구)

  • Song, Jin-Seob;Yoon, Jae-Ho;Ahn, Se-Jin;Yoon, Kyung-Hoon
    • 한국신재생에너지학회:학술대회논문집
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    • 2007.06a
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    • pp.339-342
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    • 2007
  • $Cu(In_{1-x}Ga_{x})Se_2$(CIGS)는 매우 큰 광흡수계수를 가지고 있으므로 박막형 태양전지의 광흡수층 재료로서 많은 연구가 진행되고 있다. 박막이 태양전지의 광흡수층으로 이용되기 위해서는 큰 결정크기와 평탄한 표면, 적당한 전기적 특성을 가져야 한다. 이러한 특성들은 CIGS 박막의 조성에 큰 영향을 받고 있는 것으로 보고되고 있다. 본 연구에서는 동시증발법을 이용하여 Cu/(In+Ga) 비를 0.9로 고정한 후 Ga 조성(Ga/(In+Ga)의 비 : 0.32, 0.49, 0.69, 0.8, 1)을 변화시켜 Wide band gap CIGS 박막태양전지를 만들었다. 기판은 soda line glass를 사용하였고 뒷면 전극으로는 Mo를 스퍼터링법으로 증착하였다. 또한 버퍼층으로는 기존에 쓰이고 있는 CdS를 CBD(Chemical Bath Deposition)법으로 층착시켰으며, 윈도우층으로는 i-ZnO/n-ZnO를 스파터링 법으로 층착하였다. 그리고 앞면전극으로는 Al을 E-beam 으로 증착하였다. 분석은 XRD, SEM, QE로 분석하였다. 위 실험에서 얻은 결과로는 Ga/(In+Ga)비가 증가할수록 Cu(In,Ga)Se2 박막은 회절 peak들이 큰 회절각으로 이동하였고, 이것은 Ga 원자와 In 원자의 원자반경의 차이에서 기인된 것으로 사료된다. 또한 Ga 조성이 증가할수록 단파장 쪽으로 이동하는 것을 볼 수 있으며, Voc가 증가하다가 에너지 밴드캡이 1.62 eV 이상에서는 Voc가 감소하는 것을 볼 수 있는데 이것은 Ga 조성이 증가할수록 에너지 밴드캡이 커지면서 defect level 이 존재하기 때문인 것으로 사료된다. Ga/(In+Ga)비가 1일 때의 변환효율은 8.5 %이고, Voc : 0.74 (V), Jsc : 17.2 ($mA/cm^{2}$), F.F : 66.6(%) 이다.

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Wafer-level Vacuum Packaging of a MEMS Resonator using the Three-layer Bonding Technique (3중 접합 공정에 의한 MEMS 공진기의 웨이퍼레벨 진공 패키징)

  • Yang, Chung Mo;Kim, Hee Yeoun;Park, Jong Cheol;Na, Ye Eun;Kim, Tae Hyun;Noh, Kil Son;Sim, Gap Seop;Kim, Ki Hoon
    • Journal of Sensor Science and Technology
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    • v.29 no.5
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    • pp.354-359
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    • 2020
  • The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

Studies on Effect of S/Se Ratio on the Properties of Cu2ZnSn(SxSe1-x)4 (CZTSSe) Thin Films by Sulfo-Selenization of Stacked Precursor Thin Films (열처리 시 S/Se 분말 비율에 따른 Cu2ZnSnSe4 (CZTSSe) 박막의 합성 및 특성 평가)

  • Gang, Myeng Gil;He, Ming Rui;Hong, Chang Woo;Kim, Jin Hyeok
    • Current Photovoltaic Research
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    • v.2 no.4
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    • pp.177-181
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    • 2014
  • $Cu_2ZnSn(S_xSe_{1-x})_4$ (CZTSSe) absorber thin films were prepared on Mo coated soda lime glass substrates by sulfo-selenization of sputtered stacked Zn-Sn-Cu precursor thin films. The Zn-Sn-Cu precursor thin films were sulfo-selenized inside a graphite box containing S and Se powder using rapid thermal processing furnace at $540^{\circ}C$ in Ar atmosphere with pre-treatment at $300^{\circ}C$. The effect of different S/Se ratio on the structural, compositional, morphological and electrical properties of the CZTSSe thin films were studied using XRD (X-ray diffraction), XRF (X-ray fluorescence analysis), FE-SEM (field-emission scanning electron microscopy), respectively. The XRD, FE-SEM, XRF results indicated that the properties of sulfo-selenized CZTSSe thin films were strongly related to the S/Se composition ratio. In particular, the CZTS thin film solar cells with S/(S+Se)=0.25 shows best conversion efficiency of 4.6% ($V_{oc}$ : 348 mV, $J_{sc}$ : $26.71mA/cm^2$, FF : 50%, and active area : $0.31cm^2$). Further detailed analysis and discussion for effect of S/Se composition ratio on the properties CZTSSe thin films will be discussed.

Analysis on the dielectric characteristics of a composite insulation system composed of LN2 and GN2

  • Kim, Junil;Lee, Onyou;Mo, Young Kyu;Bang, Seungmin;Kang, Jong O;Lee, Hongseok;Nam, Seokho;Kang, Hyoungku
    • Progress in Superconductivity and Cryogenics
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    • v.17 no.3
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    • pp.33-36
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    • 2015
  • A liquid nitrogen ($LN_2$) is usually used to be a coolant and insulant for a HTS coil system. HTS wires for a superconducting apparatus may be surrounded by gaseous nitrogen ($GN_2$) due to film boiling generated by a quench or voids occurred by electrical breakdown. The increased maximum electric field intensity at $GN_2$ may result in the degradation of dielectric strength of a HTS coil system. In this paper, a study on the dielectric characteristics of a composite insulation system composed of $LN_2$ and $GN_2$ is performed. A sphere-to-plane electrode system made with stainless steel is used to perform the experiments under AC and lightning impulse voltage condition. A sphere electrode is surrounded by $GN_2$ and a plane electrode is immersed into $LN_2$ to conduct dielectric experiments with a composite insulation system. The dielectric experiments are performed according to the level of $LN_2$ from the plane electrode to a sphere electrode. It is found that the dielectric characteristics of a composite insulation system are dependent on the level of $LN_2$ and the field utilization factor of an electrode system.

Bioreactor Systems for the Cometabolic Biodegradation of Trichloroethlene (트리클로로에틸렌의 공동대사적 생분해를 위한 생물반응기 시스템)

  • 이은열
    • KSBB Journal
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    • v.16 no.6
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    • pp.527-532
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    • 2001
  • Trichlooethylene (TCE) has become a widespread contaminant in air, soil, and underground water due to extensive industrial used and improper disposals. Since TCE is a suspected carcinogen and constitutes public health concerns, many treatment systems have been investigated to remove this hazardous waste. One of the most premising reactor systems for the treatment of TCE is trickling biofilter (TBF), in which monooxygenase (MO), the corresponding enzyme for initiating primary substrate oxidation, fortuitously degrades TCE via cometabolism. TCE, however, is not easily treated by simple TBF. This is mainly due to the toxicities of TCE and its degradation products to microbial film in TBF. In this paper, recent progresses on the development of bioreactor system for the treatment of TCE, especially gas-phase TCE, are reviewed. The potentials of novel biofilm reactor systems were also discussed for the long-term continuous treatment of TCE.

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