• 정보저장시스템학회논문집
• /
• 제7권2호
• /
• pp.60-64
• /
• 2011

Chemical mechanical planarization is one of the core processes in fabrication of semiconductors, which are increasingly used for information storage devices like solid state drives. For higher data capacity in storage devices, CMP process is required to show ultimate precision and accuracy. In this work, 2-dimensional finite element models were developed to investigate the effects of the slurry particle impact on microscratch generation and the phenomena generated at pad-particle-wafer contact interface. The results revealed that no plastic deformation and corresponding material removal could be generated by simple impact of slurry particles under real CMP conditions. From the results of finite element simulations, it could be concluded that the pad-particle mixture formed in CMP process would be one of major factors leading to microscratch generation.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
• /
• pp.147-150
• /
• 1998

Since P-ELD(powders type electroluminescent device) phenomena were found by G.Destriau at first In 1936, lots of studying was performed in order to realize surface emission devices and flat panel display as a backlight. Due to the problem of low luminance and color and so on, it was delayed. Recently using electric field and thermal effect which can change it\`s molecular arrangement, it can be developed using photoelectric properties of P-ELD. P-ELD in this study was prepared by casting method. Basic structure is ITO/Phosphor/insulator/Al sheet, each layer was mixed by binder, which concentration 11p(poise) for phosphor, 8p(poise) fort insulator. Dielectric properties was investigated first and emission properties of P-ELD based on ZnS:Mn,Cu/ZnS:Cu,Br mixture. P-ELD prepared in this work exhibits about 100cd/㎡ 1-kHz simusoidal excitation.

• 설비공학논문집
• /
• 제4권3호
• /
• pp.175-182
• /
• 1992

Freezing of the binary solution ($H_2O-NaCl$) saturating a packed bed of spheres is investigated experimentally. The system is cooled through its top surface, and the bottom is maintained at a temperature above the liquidus. Experiments are performed on the hypolutectic side, and the cold wall temperature is lower than the eutectic point. The effects of initial mixture concentration, superheat and glass bead diameter on temperature and concentration distributions are investigated. Supercooling was observed only at early times of the freezing process for experiments with 5% initial salt concentration. Flow visualization experiments and mushy-liquid interface position observations revealed natural convection in the liquid region. Remelting phenomena was not observed at both the solid-mushy and mushy-liquid interfaces.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 추계학술대회 논문집
• /
• pp.569-572
• /
• 2001

Selective, highly stable determination of epinephrine(adrenalin) was achieved in cyclic voltammetric measurement carried out at electrochemically treated conductive boron-doped diamond electrode. Boron-doped diamond electrodes were prepared on single crystal Si wafers by microwave plasma chemical vapor deposition and B$_2$O$_3$ was dissolved in acetone/methanol(1:1) mixture solution so that the B/C weight ratio ca. 10$^3$ppm.. Epinephrine is a kind of catecholamines, which secreted from adrenal marrow cells. The serious problem to detection of epinephrine is the interference phenomena of electroactive constituent, including AA. In this study, electrochemical treatment of BDD was carried out to discriminate between epinephrine and AA responses. Experimental results showed that the peak potential of AA oxidation shift to the positive direction and the oxidation peak of epinephrine was unchanged. The effect of electrochemical treatment was maintained up to 40hrs.

• 한국분말야금학회:학술대회논문집
• /
• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
• /
• pp.156-157
• /
• 2006

The preparation of composite powders for plasma spraying by an in-house designed mechanofusion process is investigated. Results show that dry particle coating depends on the chemical and mechanical properties of powders. In metal/oxide and metal/oxide/carbide powder mixtures, fine ceramic particles coat the surface of the metallic coarser particles. A nearly rounded shape of the final composite particles is induced by the mechanical energy input with no formation of new phases. However with the carbide/metal powdered system, only an intimate mixture of components is achieved. It is suggested that the coating mechanism is governed by agglomeration and rolling phenomena.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
• /
• pp.167-169
• /
• 2002

Selective, highly stable determination of serotonin was achieved in cyclic voltammetric measurement carried out at electrochemically treated conductive boron-doped diamond electrode. Boron-doped diamond electrodes were prepared on single crystal Si wafers by microwave plasma chemical vapor deposition and $B_2O_3$ was dissolved in acetone/methanol(9:1) mixture solution so that the B/C weight ratio ca. $10^4ppm$. Serotonin is a kind of indoleamines, which secreted from adrenal marrow cells. The serious problem to detection of serotonin is the interference phenomena of electroactive constituent, including AA. In this study, electrochemical treatment of HDD was carried out to discriminate between serotonin and AA responses. Experimental results showed that the peak potential of AA oxidation shift to the positive direction and the oxidation peak of serotonin was unchanged.

• 한국화재소방학회:학술대회논문집
• /
• 한국화재소방학회 1997년도 International Symposium on Fire Science and Technology
• /
• pp.185-192
• /
• 1997

The combustion of cellulose insulation treated with Borax, Boric acid and Aluminum Sulfate as combustion retardants is examined by candle type combustion tester. The cellulose fibers in cellulose insulation are classified by diameter as less than 0.2mm, 0.2mm-0.5mm, 0.5mm-2mm and more than 2mm. The burning behavior of cellulose insulation are studied by LOI (Limit Oxygen Index: Beginning point of smoldering), L- point (Lower point of combustion transition from smoldering- flaming to flaming combustion), LOI, L-point and H-point rise with the increasing particle size of cellulose fibers because thermal decomposition rate of cellulose fiber decreases. The phenomena of combustion transition from smoldering to flaming combustion are determined by the generating rate of combustible gas and the formation rate of combustible gas mixture within the zone of cellulose fiber heated.

• 펄프종이기술
• /
• 제30권3호
• /
• pp.7-14
• /
• 1998

It is well known that the recycling of pulp generates a lot of fines, and cause the hornification of fiber. Both phenomena have been contributed to a limited use of recycled fiber. Among several means which can improve the properties of recycled fiber, enzymatic treatments are considered as an effective means. Thus the effects of xylanase on the properties of recycled pulp were investigated in this study Xylanase treatment showed some refining effect at a small dosage while the fines and fibrils were reduced at higher dosage as shown in the treatment with cellulase-hemicellulase. The interesting finding is that the WRV of recycled fiber treated with xylanase was higher than that treated with the mixture of cellulase and hemicellulase. Breaking length and tear index of recycled fiber treated with xylanase were also higher.

• Bulletin of the Korean Chemical Society
• /
• 제19권9호
• /
• pp.947-951
• /
• 1998

$K_2NiF_4$-type layered compounds of the ($C_nH_{2n+1}NH_3)_2SnCl_4$ (n=2, 4, 6, 8, and 10) system have been synthesized from a stoichiometric mixture of $SnCl_2$ and alkyl ammonium salt using a low temperature solution technique under the inert atmosphere condition. Their crystal structures are assigned to the orthorhombic system by X-ray powder diffraction analysis. The a and b cell parameters show small changes. However, the c parameter is varied significantly according to the increment of alkyl chains of the organic layer which is located between inorganic layers in the compounds. The conformational phase transitions of the compounds are studied by the DSC in the temperature range of 300 to 500 K. FT-IR and Raman spectra are analyzed in the ranges of 1300 to 4000 cm-1 and of 50 to 360 $cm^{-1}$ with Ar-laser (λ=514.5 nm) excitation, respectively. Photoluminescence phenomena are observed for some compounds. The bond-length of Sn-Cl is determined by the EXAFS spectroscopic analysis.

• 반도체디스플레이기술학회지
• /
• 제17권4호
• /
• pp.91-96
• /
• 2018

In this study temperature distribution and gas flow inside a planetary type reactor in which a number of satellites on a spinning susceptor were rotating were analyzed using numerical simulation. Effects of flow rates on gas flow and temperature distribution were investigated in order to obtain design parameters. The commercial computational fluid dynamics software CFD-ACE+ was used in this study. The multiple-frame-of-reference was used to solve continuity, momentum and energy conservation equations which governed the transport phenomena inside the reactor. Kinetic theory was used to describe the physical properties of gas mixture. Effects of the rotation speed of the satellites was clearly seen when the inlet flow rate was small. Thickness of the boundary layer affected by the satellites rotation became very thin as the flow rate increased. The temperature field was little affected by the incoming flow rate of precursors.