• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.897-900
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• 2002

The collimation mirror will be used for thermal vacuum testing of spacecraft. The reflection mirror system to generate parallel beam inside the thermal vacuum chamber. A 600mm diameter aspheric Collimation mirror was fabricated by ultra-precision single point diamond turning (SPDT). Aluminum alloy for mirror substrates is known to be easily machining, but not polishable due to its ductility. Aspheric large collimation reflector without a conventional polishing process, the surface roughness of 10nmRa, and the from error of $\lambda/2 ~\lambda/4(\lambda$ =632.8 nm) for reference curved surface 600 mm has been required. The purpose of this research is to find the optimum machining conditions for reflector cutting of A16061-T651 and apply the SPDT technique to the manufacturing of ultra precision optical components of metal aspheric reflector.

• 한국기계가공학회지
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• 제6권4호
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• pp.22-27
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• 2007

This study aims to find the optimal cutting conditions, when ellipse mirrors consisted Aluminum alloy were made it the Millimeter-Wave Interferometer System mirror with several tools on the High-Speed Machine. Machining technique for precision machining characteristics of ellipse mirrors consisted Al6061 matter by Ball endmill is reported in this paper., Results of machining on the High-Speed Machine(using NCD(Natural Crystalline diamond), WC and coated TiAlN ${\phi}6mm$ ball endmill tool) had measurement of surface roughness and form accuracy with cutting conditions(the Feed rate, the Depth of cut and the Cutting speed). the Millimeter-Wave Interferometer System ellipse mirror had been machined foundational precision machining characteristics of aluminum.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.660-665
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of grinding wheel in the in-feed machining method. In this study, grinding experiments by the rotary surface grinding machine with straight type wheels ware conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding n/c equipment with an ELID wit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2 - 6 nm in Ra.

• 한국정밀공학회지
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• 제29권3호
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• pp.247-252
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• 2012

This study has been focused on application of ELID mirror-surface grinding technology for manufacturing single crystal optic sapphire. Single crystal sapphire is a superior material with optic properties of high performance as light transmission, thermal conductivity, hardness and so on. Mirror-surface machining technology is necessary to use sapphire as optic parts. The ELID grinding system has been set up for machining of the sapphire material. According to the ELID experimental results, it shows that the surface of sapphire can be eliminated by metal bonded wheel with micron abrasives and the surface roughness of 60nmRa can be gotten using grinding wheel of 2,000 mesh in 4.5um, depth of cut. In this study, the chemical experiments after ELID grinding also has been conducted to check chemical reaction between workpiece and grinding wheel on ELID grinding process. It shows that the chemical reaction has not happened as the results of the chemical experiments.

• 한국세라믹학회지
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• 제49권1호
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• pp.90-94
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• 2012

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for metal matrix ceramic composites using in high precision mirror for optics. The experimental studies have been carried out to get mirror surface by grinding for composites, Al-SiC, Al-graphite and Mg-SiC. Grinding process is carried out with varying abrasive mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester and SEM measurement system. ELID grinding technology could be applied successfully for the mirror-surface manufacturing processes in spite of ductility of metal matrix material. As the results of experiments, surface roughness of Al-SiC(45 wt%) has been the most superior in these experimental work-pieces as 0.021 ${\mu}m$ Ra.

• 한국생산제조학회지
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• 제9권2호
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• pp.119-124
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• 2000

In this paper based on geometric optics and geometric modeling aspheric surface of the side mirror mold with dead angle reduced have been designed and machined in a CNC machining center, Surface roughness of the mold was evaluat-ed by usin the surface shaping system. Surface generating simulation of a ball endmill process is investigated. Through the simulation based on the surface-shaping system 3-D engineered surfaces and properties of engineered surfaces are obtained, Computer simulation provides the effective working conditions through the prediction of geometric properties of engineered surfaces. The rear view mirror and room mirror play important role on the safe driving condition as a observation of environment but the rear view mirror can not provide complete information of driving environments due to the existence of the dead angle. The analysis on the shape of formed mirror shows that the proposed me？ improves range of a driver's sight.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.13-14
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• 2007

• 한국정밀공학회지
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• 제23권6호
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• pp.29-36
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• 2006

• 반도체디스플레이기술학회지
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• 제18권4호
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• pp.1-5
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• 2019

This study has been focused on properties of surface technology for large diameter upper electrode using in high density plasma process as like semi-conductor manufacturing process. The experimental studies have been carried out to get mirror surface for upper electrode. For a formation of high surface quality upper electrode, single crystal silicon upper electrode has been mechanical and chemical machining worked. Mechanical machining work of the upper electrode is carried out with varying mesh type using diamond wheel. In case of chemical machining work, upper electrode surface roughness was observed to be strongly dependent upon the etchant. The different surface roughness characteristics were observed according to etchant. The machining result of the surface roughness and surface morphology have been analyzed by use of surface roughness tester, laser microscope and ICP-MS.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.38-43
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• 2007

This paper describes ultrasonically assisted grinding used to obtain a glossy surface quickly and precisely. High-quality surfaces are required for plastic injection molding dies used in the production of plastic parts such as dials for cellular phones. Traditionally, in order to finish the dies, manual polishing by a skilled worker has been required after the machining processes, such as electro discharge machining (EDM), which leaves an affected layer, and milling, which leaves tooling marks. However, manual polishing causes detrimental geometrical deviations of the die and consumes several days to finish a die surface. Therefore, a machining process for finishing dies without manual polishing to improve the surface roughness and form accuracy would be extremely valuable. In this study, a 3D positioning machine equipped with an ultrasonic spindle was used to conduct grinding experiments. An electroplated diamond tool was used for these experiments. Generally, diamond tools cannot grind steel because of excessive wear as a result of carbon atoms diffusing into bulk steel and chips. However, ultrasonically assisted grinding can achieve a fine surface (roughness Rz of $0.4{\mu}m$) on die steel without severe tool wear. The final aim of this study is to realize mirror surface grinding for injection molding dies without manual polishing. To do this, it is necessary to fabricate an electroplated diamond tool with high form accuracy and low run-out. This paper describes a tool-making method for high precision grinding and the grinding performance of a self-electroplated tool. The ground surface textures, tool performance and tool life were investigated A ground surface roughness Rz of 0.14 um was achieved Our results show that the spindle speed, feed rate and cross feed affected the surface texture. One tool could finish $5000mm^2$ of die steel surface without any deterioration of the ground surface roughness.