• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.223-224
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.599-602
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• 2000

A new dressing technique with utilizes electrolytic phenomenon for realizing effective mirror surface grindings with metal bonded super-abrasive wheels is called “Electrolytic In-process Dressing Grinding”. This technique enabled metal bonded micro-grain wheels, such as micro-grain cast iron fiber bonded wheels, to be used for mirror surface finish processes effectively. But this technique requires a lot of knowledge and experience to perform. And the condition of dressing is variable according to the time. Therefore adaptation of Monitoring and Control technique is needed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.629-632
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• 2005

ELID(ELectrolytic In-process Dressing) grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP(Magnetic Assisted Polishing) has been used as a polishing method due to its high polishing efficiency and to its resulting in a superior surface quality. This study describes an effective fabrication method combining ELID and MAP of nano-precision mirror grinding for glass-lens molding mould, such as WC-Co, which are extensively used in precision tooling material. And for the optics glass-ceramic named Zerodure, which is extensively used in precision optics components too. The experimental results show that the combined method is very effective in reducing the time required for final polishing. The best surface roughness of the polished glass-ceramic was within 1.7nm Ra in this study.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.6
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• pp.16-25
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• 1999

In recent years, grinding techniques for precision machining of brittle materials used in die, model and optical parts have been improved by using superfine abrasive wheel and precision grinding machine. The completion of optimum dressing of superfine abrasive wheel makes possible the effective precision grinding of die steel(STD-11). In this study, a new system and the grinding mechanism of optimum in-process electrolytic dressing were proposed. This method can carry out optimum in-process electrolytic dressing of superfine abrasive wheel. Therefore, the optimum in-process electrolytic dressing is a good method to obtain the efficiency and mirror-like grinding of STD-11.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.6
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• pp.45-51
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• 1996

Silicon wafers are required to be finished under the roughness of nanometer order for the subsequent chip fabrication processes. Recently, the finish grinding techniques have been researched for the improvement of accuracy and surface roughness simultaneously. Among them, the grinding technique using fine abrasive has been known as an easily accessible method. However, the manufacture of the fine grit grinding wheel has been very difficult because of the coherence of the grits. In this paper, the development of the ultrafine grit silica($SiO_2$) grinding wheel by the combination of the binder coating and the vacuum forming techniques is reported. And, the mechanochemical removal effects of the grinding conditions are discussed. Finally, a successful result of Ra O.4nm. Rmax 4nm in the ground surface roughness of a 6 inch silicon wafer was achieved.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.92-97
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• 1994

The there axis CNC grinding machine tool for ultra-precison mirror surface grinding of advanced materials such as ceramics and other hard and brittle materials was designed and manufactured. The grinding machine is composed of the air spindle, the high damping resin concrete bed, and the three axis CNC controller with the high resolution AC servo motor. To investigate the dynamic properties of the grinding machine, the natural frequencies of the spindle and the headstock were experimentally measured. The truing method using the break truer to revise the shape of the metal bonded diamond wheel was developed. Form the results of the machining using the prototype three axis CNC grinding machine manufactured, the mirror surface were achieved.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.1
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• pp.59-64
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• 2005

This paper describes an investigation about the fluid delivering method that minimizes the generation of hydrodynamic pressure and improves the grinding accuracy. Traditionally, grinding fluid is delivered for the purpose of cooling, chip flushing and lubrication. Hence, a number of conventional investigations are focused on the delivering method to maximize fluid flux into the contact arc between the grinding wheel and the work piece. It is already known that hydrodynamic pressure generates due to this fluid flux, and that it affects the overall grinding resistance and machining accuracy. Especially in the ultra-precision mirror grinding process that requires extremely small amount of cut per pass, its influence on the machining accuracy becomes more significant. Therefore, in this paper, a new delivering method of grinding fluid is proposed with focus on minimizing the hydrodynamic pressure effect. Experimental data indicates that the proposed method is effective not only to minimize the hydrodynamic pressure but also to improve the machining accuracy.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.3
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• pp.48-54
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• 2003

This paper deals with mirror grinding of a small-sized aspherical lens by a resin bonded diamond spherical wheel. Up to now, a spherical lens has been used for the lens of the optical communication optical part. However, recently, aspherical optical parts are mainly used in order to attempt the improvement in image quality and miniaturization of the optical device. It is possible to manufacture the aspherical lens which is presently being used in optical instrument through ultra-precision machining technology. Also, to realize compactness, efforts are being made to produce a micro aspherical lens, fur which the development of a high-precision, micro molding die is inevitable. Therefore, extensive research is being done on methods of producing a micro aspherical surface by high-precision grinding. In this paper, the spherical wheel was trued by cup-shaped truer and tool path was calculated by the radius of curvature of the wheel after truing and dressing. Then in the aspherical grinding experiment, WC material which is used as a melding die for the small-sized aspherical lens was ground. The results showed that a form accuracy of 0.1918 $\mu\textrm{m}$ P-V and a surface roughness of 0.064 $\mu\textrm{m}$ Rmax could be achieved.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.82-87
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• 2001

This paper deals with mirror grinding of a small-sized aspherical lens by the resin bonded diamond spherical wheel. Up to now, a spherical lens has been used for the lens of the optical communication optical part. However, recently, the aspherical optical parts are mainly used in order to attempt the improvement in image quality and miniaturization of the optical device. It is possible to manufacture the aspherical lens which is presently being used in optical instrument through ultra-precision machinery technology. Also, to realize compactability, efforts are being made to produce a micro aspherical lens, for which the development of a high-precision, micro molding die is inevitable. Therefore, extensive research is being done on methods of producing an micro aspherical surface by high-precision grinding. In this paper, the spherical wheel was trued by cup-type truer and tool path was calculated by the radius of curvature of wheel after truing and dressing. And then in the aspherical grinding experiment, WC material which is used as a molding die for the small-sized aspherical lens was ground. It results was that a form accuracy of 0.1918${\mu}m$ P-V and a surface roughness of 0.064${\mu}m$ Rmax.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.459-464
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• 2000

In this paper, it verifies the relationships between wheel velocity and surface roughness with the mirror surface grinding using electrolytic in-process dressing (ELID). In the general, as wheel velocity is high, surface roughness is better on the base of grinding theory. However, the relationships between wheel velocity and surface roughness is undefined due to the effect of electro-chemical dressing and the characteristics of materials. According to above relationships, ELID grinding experiment is carried out by following the change of wheel velocity. As the result of this study, it is found that surface roughness is not better as linearly as the increase of wheel velocity, but the limit of wheel velocity exists according to the characteristics of materials. Also, in contradiction to the present trend of high wheel velocity of manufacturing system for high surface integrity, it is able to expected to the base on the development of new ultra precision grinding method with the practicality of mirror surface grinding using ELID grinding method.