• Korean Journal of Optics and Photonics
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• v.4 no.3
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• pp.252-259
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• 1993

A holosymmetric four-mirror system with unit magnification is designed for use in the micro-lithography using a deep ultraviolet wavelength of $0.248 {\mu}m$(KrF excimer laser line). In the holosymmetric system all orders of coma and distortion are zero. By applying this principle to the 4-spherical mirror system, we have obtained only one exact solution for the unit magnification holosymmetric four-spherical mirror system with all zero third order aberrations. For correction of the residual higher order aberrations of the system, aspherization is introduced keeping the holosymmetric properties. We have obtained near diffraction-limited performance for the wavelength of 0.248 pm within N.A. of 0.33 and image field diameter of 7.6 mm.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.19-26
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• 2008

• Nuclear Engineering and Technology
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• v.56 no.1
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• pp.70-77
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• 2024

A low energy ion irradiation system based on the deuterium arc ion source with a high perveance of 1 µP for a single extraction aperture has been successfully developed for the investigation of ion irradiation on plasma-facing components including the first mirror of plasma optical diagnostics system. Under the optimum operating condition for mirror testing, the ion source has a beam energy of 200 eV and a current density of 3.7 mA/cm². The ion source comprises a magnetic cusp-type plasma source, an extraction system, a target system with a Faraday cup, and a power supply control system to ensure stable long time operation. Operation parameters of plasma source such as pressure, filament current, and arc power with D₂ discharge gas were optimized for beam extraction by measuring plasma parameters with a Langmuir probe. The diode electrode extraction system was designed by IGUN simulation to optimize for 1 µP perveance. It was successfully demonstrated that the ion beam current of ~4 mA can be extracted through the 10 mm aperture from the developed ion source. The target system with the Faraday cup is also developed to measure the beam current. With the assistance of the power control system, ion beams are extracted while maintaining a consistent arc power for more than 10 min of continuous operation.

• Korean Journal of Optics and Photonics
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• v.14 no.4
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• pp.443-448
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• 2003

A study on optimum design of the lightweight mirror of a satellite camera is presented. An optical surface deformation of the lightweight mirror, which is a principal component of the camera system, is an important factor affecting the optical performance of the whole camera system. In this study, optimum design of the lightweight mirror is presented. Total weight of the mirror to reduce the optical surface deformation and the launching cost is used as an objective function. Peak-to-valley value and natural frequency of the mirror are given as constraints to the optimization problem. The sensitivities of the objective function and constraint are calculated by a finite difference method. The optimization procedure is carried out by the commercial optimizer, DOT. As a verification of the optimum design of the mirror, two design examples are treated. In the real application example, the lightweight mirror with 600mm effective diameter is treated. The optimized results with various design variables, which are obtained by considering thickness limitations, are analyzed.

• Transactions of the Society of Information Storage Systems
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• v.1 no.2
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• pp.182-187
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• 2005

A large area micro mirror is an optical element that functions as changing an optical path by reflection in integrated optical system. We fabricated the large area silicon mirror by anisotropic etching using MEMS for implementation of integrated optical pickup. In this work, we report the optimum conditions to better fabricate and design, greatly improve mirror surface quality. To obtain mirror surface of $45^{\circ},\;9.74^{\circ}$ off-axis silicon wafer from (100) plane was used in etching condition of $80^{\circ}C$ with 40wt.% KOH solution. After wet etching, polishing process by MR fluid was applied to mirror surface for reduction of roughness. In the next step, after polymer coating on the polished Si wafer, the Si mirror was fabricated by UV curing using a trapezoid bar-type way structure. Finally, we obtained peak to valley roughness about 50 nm in large area of $mm^2$ and it is applicable to optical pickup using blu-ray wavelength as well as infrared wavelength.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.5 s.236
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• pp.726-733
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• 2005

A spherical surface referenced Shack-Hartmann method is studied for inspecting machining accuracy of large concave mirror This method is so strong to the vibration environment for using as an on-machine inspection system during polishing process of large optics comparing with the interferometry. The measuring uncertainty of the system is shown as less than p-v 150 m. On-machine measured surface profile data with this method is used for feed back control of the polishing time or depth to improve the surface profile accuracy of large concave mirror. Also, the spherical surface referenced Shack-Hartmann method is useful for measuring aspheric such as parabolic or hyperbolic surface profile, comparing that the interferomehy needs a special null lens, which is to be a reference and difficult to fabricate.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.442-445
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• 1995

This paper presents the position tracking control of a laser scanning mirror system in which piezoelectic actuator is incorporated. Using the shear mode of the piezoelectric actuator,angular oscillation of a laser scanning mirror is derived. Torsion bar is rhen designed and attached to the piezoelctric actuator in order to magnify the amplitude generated by the actuator. Finite element modeling and analysis are essntial for designing the piezoelectic actuator. The torsional resonance mode of the piezoelectric actuator is found from the model analysis of the actuator and the mechanical shear is matched with the driving frequency. Transfer function between the electrical excitation and the mechanical shear deformation at resonance frequency is found form the response of the actuator calculated by the finite element analysis and the governing equation of the system is derived from d'Alembert's principle. Tracking control performance for desired trajectory which is, in fact, sinusoidal curve is presented in order to demonstrate the validity of the proposed system.

• Journal of the Optical Society of Korea
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• v.10 no.1
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• pp.23-27
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• 2006

We are studying the application of an adaptive optics system to upgrade the beam quality of a laser. The adaptive optics (AO) system consists of a bimorph deformable mirror, a Shack-Hartmann sensor and a control system. In most AO applications, the beam aperture is considered to be circular. However, in some cases such as laser beams from unstable resonators, the beam apertures are annulus or a holed-rectangle. In this paper, we investigate how well a bimorph deformable mirror of ${\Phi}120\;mm$ clear aperture can compensate phase distortions for three different beam configurations; 1) ${\Phi}120\;mm$ circular aperture, 2) ${\Phi}100\;mm$ annulus aperture with a ${\Phi}20\;mm$ hole and 3) $70\;mm{\times}70\;mm$ square aperture with a hole of $30\;mm{\times}30\;mm$. This study concludes that the bimorph mirror, which might be considered as a modal controller, can compensate tilt, defocus, coma and astigmatism, and spherical aberration for all three beams.

• Journal of Information Technology Applications and Management
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• v.26 no.3
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• pp.81-98
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• 2019

Despite the growing enthusiasm for the persuasive system like an interactive mirror system little is known about what motivates the customers to try the system and makes customers return repeatedly to the system. The key to understanding persuasive system adoption is the identification of the preconditions needed for the system adoption. Using grounded theory building methodology, we identified the preconditions needed for the system adoption. First, past research regarding users' motivational factors to use the persuasive system is reviewed. Then, research methodology and data analysis are presented. Finally, the study findings and conclusions are presented.

• Journal of KIISE:Computing Practices and Letters
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• v.16 no.11
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• pp.1131-1135
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• 2010

This paper presents a method to capture the posture of the human lower-limbs on the 3D space by using a single camera and a planar mirror. The system estimates the pose of the camera facing the mirror by using four coplanar IR markers attached on the planar mirror. After that, the training space is set up based on the relationship between the mirror and the camera. When a patient steps on the weight board, the system obtains relative position between patients' feet. The markers are attached on the sides of both legs, so that some markers are invisible from the camera due to the self-occlusion. The reflections of the markers on the mirror can partially resolve the above problem with a single camera system. The 3D positions of the markers are estimated by using the geometric information of the camera on the training space. Finally the system estimates and visualizes the posture and motion of the both legs based on the 3D marker positions.