• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.14-19
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• 2007

Angle sensors based on the principle of autocollimation, which are usually called autocollimators, can accurately measure small tilt angles of a light-reflecting flat surface. This paper describes a prototype micro-angle sensor that is based on the laser autocollimation technique. The new angle sensor is compact and consists of a laser diode as the light source and a quadrant photodiode as a position-sensing device. Because of its concise design, the microangle sensor facilitates dynamic measurements of the angular error motions of a precision stage without influencing the original dynamic properties of the stage. This is because the sensor only requires a small extra target mirror to be mounted on the stage. The sensitivity of the angle detection is independent of the focal length of the objective lens; therefore, an objective lens with a relatively short focal length is employed to reduce the size of the device. The micro-angle sensor uses a single lens for the both the laser collimation and focusing, which distinguishes it from the conventional laser autocollimation method that has separate collimate and objective lenses. The new micro-angle sensor has dimensions of $15.1\times22.0\times14.0mm$ and its resolution is better than 0.1 arc-second The optical design and performance of this micro-angle sensor were verified by experimental results.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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• pp.30-34
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• 2002

Single crystal 3C-SiC(cubic silicon carbide) thin-films were deposited on Si(100) wafers up to a thickness of 4.3 ${\mu}m$ by APCVD method using HMDS(hexamethyldisilane) at $1350^{\circ}C$. The HMDS flow rate was 0.5 sccm and the carrier gas flow rate was 2.5 slm. The HMDS flow rate was important to get a mirror-like crystal surface. The growth rate of the 3C-SiC films was 4.3 ${\mu}m$/hr. The 3C-SiC epitaxial films grown on Si(100) were characterized by XRD, AFM, RHEED, XPS and raman scattering, respectively. The 3C-SiC distinct phonons of TO(transverse optical) near 796 $cm^{-1}$ and LO(longitudinal optical) near $974{\pm}1cm^{-1}$ were recorded by raman scattering measurement. The heteroepitaxially grown films were identified as the single crystal 3C-SiC phase by XRD spectra($2{\theta}=41.5^{\circ}$).

• Journal of Electrical Engineering and Technology
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• 제2권2호
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• pp.274-279
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• 2007

This study focuses on the enhancement of maskless photolithography as well as the peptide synthesis application with single crystalline silicon micromirrors. A single crystalline silicon micromirror array has been designed and fabricated in order to improve its application to the peptide synthesis. A micromirror rotates about ${\pm}\;9^{\circ}$ at the pull-in voltage, which can range from 90.7 V to 115.1 V. A $210\;{\mu}m-by-210\;{\mu}m$ micromirror device with $270\;{\mu}m$ mirror pitch meets the requirements of an adequately precise separation for peptide synthesis. Synthetic 16 by 16 peptide array corresponds to the same number of micromirrors. The large size of peptide pattern and the separation facilitate biochip experiments using fluorescence assay. The peptide pattern has been synthesized on the GPTS-PEG200 surface with BSA-blocking and thereupon the background was acetylated to reject non-specific bindings. Hence, an averaged slope at the pattern edge has been distinguishably improved in comparison to patterning results from an aluminum micromirror.

• 대한기계학회논문집B
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• 제40권11호
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• pp.717-726
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• 2016

본 연구는 밀폐계 내부에 고온의 원형 실린더가 존재할 때, 밀폐계의 종횡비 변화에 따른 밀폐계 내부의 3차원 자연대류 현상에 대해 수치해석을 수행하였다. 밀폐계 내부의 원형 실린더는 유한체적법(FVM)에 기초한 가상 경계법(IBM)을 사용하여 구현하였다. 본 연구에서 고려한 Rayleigh 수의 범위는 $10^5{\leq}Ra{\leq}10^6$이며, Prandtl 수는 0.7이다. 밀폐계의 폭을 변화하여 밀폐계의 종횡비를 증가시켰으며, 밀폐계의 종횡비는 $1{\leq}W/L{\leq}4$ 범위에서 1 간격으로 고려하였다. 본 연구에서 고려한 모든 Rayleigh 수와 밀폐계의 종횡비 범위에서 열유동장은 x=0 단면을 기준으로 좌우 대칭을 이루며 정상상태에 도달하였다. 또한 밀폐계의 종횡비가 증가할수록 원형 실린더의 표면 평균 Nusselt수는 증가하는 반면, 밀폐계 벽면의 표면 평균 Nusselt수는 감소하였다.

• 한국수자원학회:학술대회논문집
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• 한국수자원학회 2008년도 학술발표회 논문집
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• pp.294-298
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• 2008

Snow cover is a potential water resource for later spring and summer seasons as well as a thermal mirror with high reflectivity causing decreases of surface air temperature during cold winter seasons. In this study, current and future changes in Northern Hemisphere snow extent and their potential linkages with atmospheric circulation are examined. The NOAA AVHRR visible snow extent (1967-2006) data as well as observational (NCEP-DOE 1979-2006) and modeled (GFDL 2.1 2081-2100) pressure and surface air temperature data are used. Analyses of observational data demonstrate that the snow extent in meteorological spring (March to April) and summer (June to August) has significantly decreased since the late 1980s. The offset of snow seasons (the timing of snow melt in spring) have also significantly advanced particularly in Europe, East Asia, and northwestern North America. Analyses of pressure fields reveal that the spatial patterns of the earlier snow melt are associated with changes in atmospheric circulation such as the Arctic Oscillation (AO). In the positive winter AO years, multiple positive pressure departure cores in the upper troposphere (200hPa) are observed over the mid-latitude regions from March to mid-April, while a negative pressure departure core (70hPa) prevails over the Arctic Ocean. The reversed anomaly patterns related to later snow melt occur in negative winter AO years. The comparison between current and future thermal spring onsets suggest that snow melt patterns will intensify with larger greenhouse gas emissions, indicating earlier hydrological spring onset.

• 마이크로전자및패키징학회지
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• 제27권3호
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• pp.89-93
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• 2020

반도체 패키지의 경박단소화로 인해 발생하는 복잡한 휨 거동은 내부 응력을 발생시켜 박리나 균열과 같은 다양한 기계적인 결함을 야기한다. 이에 따른 수율 감소를 막기 위해 휨 거동을 정확하게 예측하려는 노력은 다양한 측면에서 그 접근이 이루어지고 있다. 이 중 패키지를 구성하는 주 재료인 실리콘 웨이퍼는 일반적으로 균질한 물질로 취급되어 열에 의한 휨 거동은 전혀 없는 것으로 묘사된다. 그러나 실리콘을 얇게 가공하기 위해서 진행되는 그라인딩과 폴리싱에 의해 상온에서 휨이 발생한다는 사실이 보고되어 있고, 이는 표면에 형성되는 damage layer가 두께 방향으로 불균질함을 발생시키는 것으로부터 기인한다. 이에 본 논문에서는 반도체 패키징 공정 중 최고온 공정 과정인 solder reflow 온도에서 단면 연마된 웨이퍼가 나타내는 휨 거동을 측정하고, 이러한 휨 량이 나타나는 원인을 연마된 면과 그렇지 않은 면의 열팽창계수를 측정함으로써 밝혀내었다. 측정에는 미세 변형률과 형상이 모두 측정 가능한 3차원 디지털 이미지 상관법(Digital Image Correlation; DIC)을 이용하였다.

• 대한전자공학회논문지SD
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• 제41권7호
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• pp.31-36
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• 2004

Vortical-Cavity Surface-Emitting Laser(VCSEL)는 in-plane 형태의 레이저와는 달리 여러 층의 distributed Bragg reflector(DBR) mirror를 반사 면으로 사용하기 때문에 광출력이나 미분양자효율(differential quantum efficiency)을 계산하는 데에 많은 어려움이 따른다. 이러한 이유로 광출력, 광출력 비 및 미분양자효율 등의 성능 지수를 계산하는 방법으로 유효 공진기 모델과 전달행렬 방법(transfer matrix method) 등이 사용되고 있다. 유효 공진기 모델은 반사율 및 문턱이득을 계산하는 데에는 적합하지만 광출력, 광출력 비 및 외부양자효율을 계산하는 데에는 오차를 보인다. 그 이유는 유효 공진기 모델이 금속 전극 개구부 바로 아래 GaAs 층에서의 빛의 흡수는 고려하지 못하기 때문이다. 이 논문에서는 유효 공진기 모델로부터 구한 성능 지수 값들을 전달행렬 방법으로부터 구한 값들과 비교ㆍ검토하여, 유효 공진기 모델의 타당성에 대하여 살펴보고 전달행렬 방법의 유용성을 재확인하였다.

• 한국광학회지
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• 제15권6호
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• pp.583-590
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• 2004

비전을 이용한 광학식 검사공정이나 그 밖의 광학 현미경을 이용한 측정에 있어서 초점조절은 곧바로 측정 정밀도에 영향을 주는 중요한 요소이다. 본 논문에서는 핀홀 대신 광섬유를 사용하는 공초점 현미경 구조와 하나의 광섬유가 광원과 검출기의 역할을 동시에 수행하는 상반구성(reciprocal scheme)을 적용함으로써 간결하게 시스템을 구성하면서 광축 정렬을 용이하게 하였으며, 압전소자(PZT)를 이용한 광섬유 광원의 광축 방향 변조를 통해 방향 정보가 실린 초점오차 신호를 획득함으로써 빠른 초점조절을 구현하였다. 대물렌즈 변조방식과 달리 광원 변조방식은 현미경 시스템에 미치는 물리적 영향을 줄일 수 있으며, 기존의 장치에 탑재가 비교적 용이하다는 장점을 갖는다. 본 논문에서는 변조 진폭과 시편의 반사도 및 기울기 변화에 따른 초점오차 신호의 변화를 측정하였으며, 거울 시편에 대한 초점조절을 통해 본 시스템의 성능을 평가해 보았다. 또한 종방향 특성곡선의 반치폭 비교실험을 통해 광원 변조는 광축 방향 분해능에 영향을 주지 않음을 확인하였다.

• Journal of the Optical Society of Korea
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• 제20권1호
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• pp.78-87
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• 2016

Red blood cells (RBCs) are customarily adhered to a bio-functionalised substrate to make them stationary in interferometric phase-imaging modalities. This can make them susceptible to receive alterations in innate morphology due to their own weight. Optical tweezers (OTs) often driven by Gaussian profile of a laser beam is an alternative modality to overcome contact-induced perturbation but at the same time a steeply focused laser beam might cause photo-damage. In order to address both the photo-damage and substrate adherence induced perturbations, we were motivated to stabilize the RBC in OTs by utilizing a laser beam of ‘arbitrary intensity profile’ generated by a source having cavity imperfections per se. Thus the immobilized RBC was investigated for phase-imaging with sinusoidal interferograms generated by a compact and robust Michelson interferometer which was designed from a cubic beam splitter having one surface coated with reflective material and another adjacent coplanar surface aligned against a mirror. Reflected interferograms from bilayers membrane of a trapped RBC were recorded and analyzed. Our phase-imaging set-up is limited to work in reflection configuration only because of the availability of an upright microscope. Due to RBC’s membrane being poorly reflective for visible wavelengths, quantitative information in the signal is weak and therefore, the quality of experimental results is limited in comparison to results obtained in transmission mode by various holographic techniques reported elsewhere.

• 한국표면공학회지
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• 제47권5호
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• pp.263-268
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• 2014

Nanocrystalline diamond(NCD) coated SiC balls were applied in a ball-on-disk tribometer. After seeding in an ultrasonic bath containing nanometer diamond powders, $2.2{\mu}m$ thick NCD films were deposited on sintered 3 mm diameter SiC balls at $600^{\circ}C$ in a 2.45 GHz microwave plasma CVD system. Bare $ZrO_2$ and SiC balls were prepared for comparison as test balls. Tribology tests were performed in air with pairs of three different balls and mirror polished steel(SKH51) disk. The wear tracks on balls and disks were examined by optical microscope and alpha step profiler. Under the load of 3 N, the friction coefficients of steel against $ZrO_2$, SiC and NCD-coated balls were between 0.4 and 0.8. After a few thousands sliding laps, the friction coefficient of NCD-coated balls dropped from 0.45 to below 0.1 and maintained thereafter. Under a higher load of 10 N or 20 N with a long sliding distance of 2 km, $ZrO_2$ and SiC balls exhibited the similar friction coefficients as above. The friction coefficient of NCD-coated balls was less than 0.1 from the beginning and increased to above 0.1 steadily or with some fluctuations as sliding distance increased. NCD coating layers were found worn out after long duration and/or high load sliding test, which resulted in the friction coefficient higher than 0.1.