• 비파괴검사학회지
• /
• 제13권4호
• /
• pp.32-41
• /
• 1994

탄성파에 의한 미소 동적 변위를 측정하기 위하여 안정화 회로가 부착된 Michelson 간섭계를 개발하였다. 안정화 회로는 외부 진동신호에 따른 광로차의 교란을 보상하기 위하여 압전구동기가 부착된 기준거울을 사용하였다. 안정화 회로를 사용함으로써, 간섭계는 외부 진동신호의 영향을 줄일 수 있었고, 항상 직각조건(quadrature condition)을 만족하여 광검출기의 출력신호가 최대의 감도와 선형성을 유지할 수 있었다. 검출가능한 최소 변위는 10MHz 대역에서 0.3nm 이었다. 개발된 간섭계를 사용하여 유리관 파괴 및 강철구 충격에 의한 진앙점에서의 변위를 검출하여 이론적으로 계산된 값과 비교하였다.

• 한국기계가공학회지
• /
• 제4권3호
• /
• pp.32-38
• /
• 2005

Electrical discharge machining is the method of using thermal energy by electrical discharge. Generally, if the material of workpiece has conductivity even though very hard materials and complicated shape which are difficult to cut such as quenching steel, cemented carbide, diamond and conductive ceramics, the EDM process is favorable one of possible machining processes. But, the process is necessarily required of finish cut and heat treatment because of slow cutting speed, no mirror surface, brittleness and crack due to the residual stress for manufactured goods. In this experimental thesis, the super EDM drilling was developed for high precision semiconductor die steel and for minimization of leadframe width. It was possible to development of EDM drilling machine for high precision semiconductor die with the electrode guide and its modelling and stress analysis. The development of electrode with the copper pipe type was conducted to drill the hole from the diameter of 0.1mm to 3.0mm with the error of from 0.02mm to 0.12mm. From the SEM and EDX analysis, the entrance of the EDM drill was found the resolidification of not only the component of tungsten but also the component of copper.

• 한국정밀공학회지
• /
• 제22권10호
• /
• pp.195-201
• /
• 2005

A laterally driven electromagnetic microactuator (LaDEM) is presented, and a micro-optical switch is designed and fabricated as a possible application. LaDEM provides parallel actuation of the microactuator to the silicon substrate surface (in-plane mode) by the Lorentz force. Poly-silicon-on-insulator (Poly-SOI) wafers and a reactive ion etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipment of a vertical micro mirror. A fabricated arch-shaped leaf spring has a thickness of $1.8{\mu}m$, width of $16{\mu}m$, and length of $800{\mu}m$. The resistance of the fabricated structure fer the optical switch was approximately 5$\Omega$. The deflection of the leaf springs increases linearly up to about 400 mA and then it demonstrates a buckling behavior around the current value. Owing to this nonlinear phenomenon, a large displacement of $60{\mu}m$ could be measured at 566 mA. The displacement-load relation and some dynamic characteristics are analyzed using the finite element simulations.

• Journal of Biosystems Engineering
• /
• 제32권2호
• /
• pp.130-135
• /
• 2007

An on-line real time grading and sorting system for dried oak mushrooms was developed for on-site application. Quality grades of the mushrooms were determined according to an industrial specification. Three dimensional visual quality features were used for the grading. A progressive color computer vision system with white LED illumination was implemented to develop an algorithm to extract external quality patterns of the dried oak mushrooms. Cap (top) and gil (stem) surface images were acquired sequentially and side image was obtained using mirror. Algorithms for extracting size, roundness, pattern and color of the cap, thickness, color of the gil and amount of rolled edge of the dried mushroom were developed. Utilizing those quality factors normal and abnormal ones were classified and normal mushrooms were further classified into 30 different grades. The sorting device was developed using microprocessor controlled electro-pneumatic system with stainless buckets. Grading accuracy was around 97% and processing time was 0.4 s in average.

• 천문학회보
• /
• 제36권2호
• /
• pp.87.1-87.1
• /
• 2011

Since early 90's, the solar X-ray telescopes such as Yohkoh SXT and Hinode XRT have observed coronal magnetic structures on the Sun's surface in the range of about $40'{\times}40'$ field-of-view (FOV) covering the full solar disk. Thus it has been stressed by the scientists that the optical structure of solar telescopes should be designed with care for improving the uniformity over a wide FOV. There would be, however, no unique solution in designing the optical system of a telescope for overcoming perfectly the problem of off-axis response variation. As a consequence, the correction of optical imperfectness of telescopes has become an important calibration step that should be performed beforehand when the observed images are to be used for photometric purposes. In particular, a special care should be taken when performing the temperature analysis with thin and thick filters for flaring activities observed at the periphery of the full FOV. From the analyses of both pre-launch calibration and in-flight observation data, the optical characteristics for describing the performance of solar X-ray telescopes, especially in view of their energy dependence, will be introduced and discussed in our presentation.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
• /
• pp.452-455
• /
• 2002

Single crystal 3C-SiC(cubic silicon carbide) thin-films were deposited on Si(100) substrate up to a thickness of $4.3{\mu}m$ by APCVD method using HMDS(hexamethyildisilane) at $1350^{\circ}C$. The HMDS flow rate was 0.5 sccm and the carrier gas flow rate was 2.5 slm. The HMDS flow rate was important to get a mirror-like crystal surface. The growth rate of the 3C-SiC films was $4.3{\mu}m/hr$. The 3C-SiC epitaxical films grown on Si(100) were characterized by XRD, AFM, RHEED, XPS and raman scattering, respectively. The 3C-SiC distinct phonons of TO(transverse optical) near $796cm^{-1}$ and LO(longitudinal optical) near $974{\pm}1cm^{-1}$ were recorded by raman scattering measurement. The heteroepitaxially grown films were identified as the single crystal 3C-SiC phase by XRD spectra$(2{\theta}=41.5^{\circ})$.

• Journal of the Optical Society of Korea
• /
• 제9권1호
• /
• pp.26-31
• /
• 2005

We describe the design and the implementation of video-rate reflection confocal scanning microscopy (CSM) using an acousto-optical deflector (AOD) for the fast horizontal scan and a galvanometer mirror (GM) for the slow vertical scan. Design parameters of the optical system are determined for optimal resolution and contrast. The OSLO simulations show that the performances of CSM are not changed with deflection angle and the wavefront errors of the system are less than 0.012λ. To evaluate the performances of designed CSM, we do a series of tests, measuring lateral and axial resolution, real time image acquisition. Due to a higher axial resolution compared with conventional microscopy, CSM can detect the surface of sub-micrometer features. We detect 138㎚ line shape pattern with a video-rate (30 frm/sec). And 10㎚ axial resolution is archived. The lateral resolution of the topographic images will be further enhanced by differential confocal microscopy (DCM) method and computational algorithms.

• Bulletin of the Korean Chemical Society
• /
• 제28권4호
• /
• pp.533-537
• /
• 2007

This paper describes the heteroepitaxial growth of single-crystalline 3C-SiC (cubic silicon carbide) thin films on Si (100) wafers by atmospheric pressure chemical vapor deposition (APCVD) at 1350 oC for micro/nanoelectromechanical system (M/NEMS) applications, in which hexamethyldisilane (HMDS, Si2(CH3)6) was used as a safe organosilane single-source precursor. The HMDS flow rate was 0.5 sccm and the H2 carrier gas flow rate was 2.5 slm. The HMDS flow rate was important in obtaing a mirror-like crystalline surface. The growth rate of the 3C-SiC film in this work was 4.3 μm/h. A 3C-SiC epitaxial film grown on the Si (100) substrate was characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), reflection high energy electron diffraction (RHEED), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and Raman scattering, respectively. These results show that the main chemical components of the grown film were single-crystalline 3C-SiC layers. The 3C-SiC film had a very good crystal quality without twins, defects or dislocations, and a very low residual stress.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제54권8호
• /
• pp.378-383
• /
• 2005

We report the development of miniature fluorescence detection systems that employ miniature prism, mirrors and low coat CCD camera to detect the fluorescence emitted from 40 fluorescently-labeled protein patterns without scanner. This kind of miniature fluorescence detection system can be used in point of care. We introduce two systems, one uses prism+mirror block and the other uses prism and two mirrors. A large NA microscope eyepiece and low cost CCD camera are used. We fabricated protein chip containing multi-pattern BSA labeled with Cy5, using MEMS technology and modified the surface chemically to clean and to immobilize proteins. The measurements show that the combination of prism and mirrors can homogenize elliptical excitation light over the sample with higher optical efficiency, and increase the separation between excitation and fluorescence light at the CCD to give higher signal intensity and higher signal to noise ratio. The measurements also show that protein concentrations ranging from 10 ng/ml to 1000 ng/ml can be assayed with very small error. We believe that the proposed fluorescence detection system can be refined to build a commercially valuable hand-held or miniature detection device.

• Bulletin of the Korean Chemical Society
• /
• 제28권11호
• /
• pp.2079-2082
• /
• 2007

Photonic crystals containing rugate structure result in a mirror with high reflectivity in a specific narrow spectral region and are prepared by applying a computer-generated pseudo-sinusoidal current waveform. Well defined 1-dimentional photonic polymer replicas showing a reflectivity at 534 nm have been successfully obtained by the removal of rugate porous silicon (PSi) template from the polystyrene composite film. XRD measurement indicates that the oxidized rugate PSi has been completely removed from the composite films. Polymer replicas exhibit a sharp resonance in the reflectivity spectrum. Optical characteristics of photonic polymer replicas indicate that the surface of polymer film has a negative structure of rugate PSi. These replicas are stable in aqueous solutions for several days without any degradation. The methods have been provided for the construction of photonic structures with polymers.