• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.38 no.10
• /
• pp.1117-1123
• /
• 2014

This study sintered $Si_3N_4$ with different amounts of $SiO_2$ nano-colloid. The surface of a mirror-polished specimen was coated with $SiO_2$ nano-colloid, and cracks were healed when the specimen was treated at a temperature of 1273 K for 1 h in air. Wear specimen experiments were conducted after heat treatments for 10 min at 1073, 1273, and 1573 K. The heat-treated surface that was coated with the $SiO_2$ nano-colloid was slightly rougher than the noncoated surface. The oxidation state of the surface according to the heat treatment temperature showed no correlation with the surface roughness. Moreover, the friction coefficient, wear loss, and bending strength were not related to the surface roughness. $Si_3N_4$ exhibited an abrasive wear behavior when SKD11 was used as an opponent material. The friction coefficient was proportional to the wear loss, and the bending strength was inversely proportional to the friction coefficient and wear loss. The friction coefficient and wear loss increased with increasing amounts of the $SiO_2$ nanocolloid. In addition, the friction coefficient was slightly increased by increasing the heat treatment temperature.

• Journal of Sensor Science and Technology
• /
• v.16 no.2
• /
• pp.85-90
• /
• 2007

This paper presents the growth conditions and characteristics of polycrystalline 3C-SiC (silicon carbide) thin films for M/NEMS applications related to harsh environments. The growth of the 3C-SiC thin film on the oxided Si wafers was carried out by APCVD using HMDS (hexamethyildisilane: $Si_{2}(CH_{3})_{6})$ precursor. Each samples were analyzed by XRD (X-ray diffraction), FT-IR (fourier transformation infrared spectroscopy), RHEED (reflection high energy electron diffraction), GDS (glow discharge spectrometer), XPS (X-ray photoelectron spectroscopy), SEM (scanning electron microscope) and TEM (tunneling electro microscope). Moreover, the electrical properties of the grown 3C-SiC thin film were evaluated by Hall effect. From these results, the grown 3C-SiC thin film is very good crystalline quality, surface like mirror and low defect. Therefore, the 3C-SiC thin film is suitable for extreme environment, Bio and RF M/NEMS applications in conjunction with Si fabrication technology.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.1
• /
• pp.109-115
• /
• 2004

Polishing process has been applied to get extremely fine surfaces, e.g., mirror surfaces such as optical mirrors, lens, molds and etc. Nowadays not only fine surface quality but also submicron order of dimensional accuracy is required for many applications. To meet the requirements polishing process should be provided with an active control of polishing pressure especially for automation of polishing process. In this paper a study on development of an active polishing pressure control system has been presented. A new type of tool assembly has been developed to facilitate the control. The tool is attached to an axis of a polishing machine with a coil spring and control of the polishing pressure is done by the position control of the axis, which needs no additional actuator. The polishing pressure is successfully measured by the measurement of the spring deformation. Control specifications were quantitatively considered by weighting functions and a controller was designed by using loop-shaping technique based on the no synthesis. Some experiments have been executed on a polishing machine with a PC-NC controller. It is shown that the results were coincident well with the theoretical analyses and satisfied the design specifications.

• 보존과학연구
• /
• s.31
• /
• pp.17-30
• /
• 2010

There were excavated many relics about 200 pieces including gilt-bronze cap, gilt-bronze shoes, bronze mirror and armor, etc. in Ahndong tumulus, Gildu-ri, Goheung. The National Research Institute of Cultural Heritage was undertaking excavation of major damaged relics that were corroded by several environment and were destroyed by a lump of earth. Shoes are consolidated with soils in order to stop destroy during excavation. And these are relocated in order to treat for conservation. Before treatment, X-ray radiography and CT(Computed Tomography) are used in order to examine the original surface and the shape of shoes. As a result, we confirm the condition of shoes. If soils are removed, gilt-bronze shoes are crumbling into little pieces because gilt-bronze shoes are damaged by corrosion and deformation. So, shoes are consolidating with inner soils and are removing outer soils. Throughout conservation treatment, shoes recovered original form and inner soils are consolidated in order to keep the shape of shoes.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.1295-1298
• /
• 2004

Selective Laser Sintering(SLS) method is one of Rapid Prototyping(RP) technologies. It is used to fabricate desirable part to sinter powder and stack the fabricated layer. To develop this SLS machine, it needs effective scanning path and the development of scanning device. This paper shows how to make fast scanning path with respect to scan spacing, laser beam size and scanning direction from 2-dimensional sliced file generated in commercial CAD/CAM software. Also, we develop the scanning device and its control algorithm to precisely follow the generated scanning path. Scanning path affects precision and total machining time of the final fabricated part. Sintering occurs using infrared laser which has high thermal energy. As a result, shrinkage and curling of the fabricated part occurs according to thermal distribution. Therefore, fast scanning path generation is needed to eliminate the factors of quality deterioration. It highly affects machining efficiency and prevents shrinkage and curling by relatively lessening the thermal distribution of the surface of sintering layer. To generate this fast scanning path, adaptive path generation is needed with respect to the shape of each layer, and not simply x, y scanning, but the scanning of arbitrary direction must be enabled. This paper addresses path generation method to focus on fast scanning, and development of scanning system and control algorithm to precisely follow generated path.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.07b
• /
• pp.735-738
• /
• 2002

Single crystal 3C-SiC(cubic silicon carbide) thin-films were deposited on Si(100) substrate up to a thickness of $4.3{\mu}m$ by APCVD method using HMDS(hexamethyildisilane) at $1350^{\circ}C$. The HMDS flow rate was 0.5 sccm and the carrier gas flow rate was 2.5 slm. The HMDS flow rate was important to get a mirror-like crystal surface. The growth rate of the 3C-SiC films was $4.3{\mu}m/hr$. The 3C-SiC epitaxical films grown on Si(100) were characterized by XRD, AFM, RHEED, XPS and raman scattering, respectively. The 3C-SiC distinct phonons of TO(transverse optical) near $796cm^{-1}$ and LO(longitudinal optical) near $974{\pm}1cm^{-1}$ were recorded by raman scattering measurement. The heteroepitaxially grown films were identified as the single crystal 3C-SiC phase by XRD spectra$(2{\theta}=41.5^{\circ})$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.15 no.11
• /
• pp.953-957
• /
• 2002

Single crystal 3C-SiC (cubic silicon carbide) thin-films were deposited on Si(100) wafer up to the thickness of 4.3 ${\mu}{\textrm}{m}$ by APCVD (atmospheric pressure chemical vapor deposition) method using HMDS (hexamethyildisilane; ｛CH$_{3}$｝$_{6}$ Si$_{2}$) at 135$0^{\circ}C$. The HMDS flow rate was 0.5 sccm and the carrier gas flow rate was 2.5 slm. The HMDS flow rate was important to get a mirror-like crystal surface. The growth rate of the 3C-SiC film was 4.3 ${\mu}{\textrm}{m}$/hr. The 3C-SiC epitaxial film grown on Si(100) wafer was characterized by XRD (X-ray diffraction), AFM (atomic force microscopy), RHEED (reflection high energy electron diffraction), XPS (X-ray photoelecron spectroscopy), and Raman scattering, respectively. Two distinct phonon modes of TO (transverse optical) near 796 $cm^{-1}$ / and LO (longitudinal optical) near 974$\pm$1 $cm^{-1}$ / of 3C-SiC were observed by Raman scattering measurement. The heteroepitaxially grown film was identified as the single crystal 3C-SiC phase by XRD spectra (2$\theta$=41.5。).).

• Journal of IKEEE
• /
• v.23 no.4
• /
• pp.1387-1392
• /
• 2019

Aspherical mirrors have lighter weight and better performance than spherical mirrors, but it is difficult to process their shape and measure the processing precision. Especially, large aperture aspherical mirrors mounted on satellites need high processing precision and long processing time. The computerized numerically controlled machine of gantry type has been used in polishing process, but it has difficulties in processing the complex shapes due to the lack of degrees of freedom. In order to overcome this problem we developed a polishing system using an articulated industrial robot. The system consists of tool path generating program, real-time robot monitoring, and control program. We show the performance of the developed system through the computer simulation and actual robot operation.

• Smart Structures and Systems
• /
• v.22 no.2
• /
• pp.223-230
• /
• 2018

This study examines a non-contact laser scanning-based ultrasound system, called an angular scan pulse-echo ultrasonic propagation imager (A-PE-UPI), that uses coincided laser beams for ultrasonic sensing and generation. A laser Doppler vibrometer is used for sensing, while a diode pumped solid state (DPSS) Q-switched laser is used for generation of thermoelastic waves. A high-speed raster scanning of up to 10-kHz is achieved using a galvano-motorized mirror scanner that allows for coincided sensing and for the generation beam to perform two-dimensional scanning without causing any harm to the surface under inspection. This process allows for the visualization of longitudinal wave propagation through-the-thickness. A pulse-echo ultrasonic wave propagation imaging algorithm (PE-UWPI) is used for on-the-fly damage visualization of the structure. The presented system is very effective for high-speed, localized, non-contact, and non-destructive inspection of aerospace structures. The system is tested on an aluminum honeycomb sandwich with disbonds and a carbon fiber-reinforced plastic (CFRP) honeycomb sandwich with a layer overlap. Inspection is performed at a 10-kHz scanning speed that takes 16 seconds to scan a $100{\times}100mm^2$ area with a scan interval of 0.25 mm. Finally, a comparison is presented between angular-scanning and a linear-scanning-based pulse-echo UPI system. The results show that the proposed system can successfully visualize defects in the inspected specimens.

• Journal of the Korean Society for Precision Engineering
• /
• v.27 no.3
• /
• pp.50-57
• /
• 2010

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.