• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.2
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• pp.156-161
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• 2007

This paper describes the characteristics of polycrystalline ${\beta}$ or 3C (cubic)-SiC (silicon carbide) thin films heteroepitaxailly grown on Si wafers with thermal oxide. In this work, the poly 3C-SiC film was deposited by APCVD (atmospheric pressure chemical vapor deposition) method using HMDS (hexamethyildisilane: $Si_{2}(CH_{3}_{6})$ single precursor. The deposition was performed under various conditions to determine the optimized growth conditions. The crystallinity of the 3C-SiC thin film was analyzed by XPS (X-ray photoelectron spectroscopy), XRD (X-ray diffraction) and FT-IR (fourier transform-infrared spectometers), respectively. The surface morphology was also observed by AFM (atomic force microscopy) and voids or dislocations between SiC and $SiO_{2}$ were measured by SEM (scanning electron microscope). Finally, depth profiling was invesigated by GDS (glow discharge spectrometer) for component ratios analysis of Si and C according to the grown 3C-SiC film thickness. From these results, the grown poly 3C-SiC thin film is very good crystalline quality, surface like mirror and low defect. Therfore, the poly 3C-SiC thin film is suitable for extreme environment, Bio and RF MEMS applications in conjunction with Si micromaching.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.11a
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• pp.41-45
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• 2006

Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber we 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

• Journal of the Korean institute of surface engineering
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• v.30 no.6
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• pp.406-411
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• 1997

Transparent conductive thin films have found many applications in active and passive electronic and opto-electronic devices such as flat panel display electrode, solar cell electrode and window heat mirror, etc. Low resistivity and high transmittance of these films can beotained by controlling deposition parameters which are oxygen partial pressure, substrate temperature and dopant concentration. In this study, non-stoichiometric and Sb-doped thin electrical properties of undoped films have been degraded with increase of substrate temperature and optical properties have been improved in Sb-doped films. The resistivity of $2.5\times10^{-3}\Omega\textrm{cm}$,/TEX>, average transmittance of 80% and sheet resistance of 130$\Omega$/$\square$ at thickess of 2000 $\AA$ could be obrained at optmal condimal conditions which were at $400^{\circ}C$ of substrate temperature, 58% of oxygen partial pressure and 5% of Sb doping concentration.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.1-6
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• 2008

In recent years, developments in the semiconductor and electronic industries have brought a rapid increase in the use of large size silicon wafer. For further improvement of the ultra precision surface and flatness of Si wafer necessary to high density ULSI, it is known that polishing is very important. However, most of these investigation was experiment less than 300mm diameter. Polishing is one of the important methods in manufacturing of Si wafers and in thinning of completed device wafers. This study reports the machining variables that has major influence on the characteristic of wafer polishing. It was adapted to polishing pressure, machining speed, and the slurry mix ratio, the optimum condition is selected by ultra precision wafer polishing using load cell and infrared temperature sensor. The optimum machining condition is selected a result data that use a pressure and table speed data. By using optimum condition, it achieves a ultra precision mirror like surface.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.8
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• pp.45-50
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• 2004

The characteristics and reliability of implanted VCSELs are greatly influenced by the thickness of the semi-insulating layer made by ion implantation for the current confinement. We propose a simple and purely electrical method of estimating the optimum implant depth, and find that the implant front should be located 2-DBR periods above the 1 - λ cavity in order to obtain simultaneously the low threshold current and high reliability.

• The Bulletin of The Korean Astronomical Society
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• v.45 no.1
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• pp.68.2-68.2
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• 2020

UVO-Multiband Polarizing Imager System (UVOMPIS) is an ultraviolet to visible light multi-wavelength polarization/imaging system for Compact Advanced Satellite. We developed Linear Astigmatism Free-Three Mirror System (LAF-TMS) D200F2 as an optical system of UVOMPIS which has an entrance pupil diameter of 200 mm, a focal ratio of 2, a field of view of 2° × 4°. LAF-TMS is a confocal off-axis reflecting telescope system that removes linear astigmatism, and its all mirrors (M1, M2, M3) are optimized with the freeform surface to reduce high-order aberrations. Through the sensitivity analysis and Monte-Carlo simulation as the tolerance analysis, we can confirm the feasibility of the system, relatively sensitive parameters (tilt, decenter, despace, surface RMS error), and considerations for optomechanical design. From the sensitivity analysis, we can discover the relatively sensitive optical alignment parameters to a single perturbation. Further more, in the monte-carlo simulation, we investigate the minimum tolerance budget satisfying the required optical performance and whether the tolerance range is satisfied within manufacturing error.

• Korean Journal of Optics and Photonics
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• v.19 no.4
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• pp.327-333
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• 2008

In general, a lens with large NA makes image quality better. There are many kinds of cheap concave mirrors with large aperture and NA. This paper presents a method that uses a large aperture projection imaging system to enhance the image used for 3D shape measurement. This method makes it possible to enhance reflection uniformity on the object surface and increases SNR (Signal to Noise Ratio). Using a large aperture lens, it is possible to obtain a brighter image, reducing the shading nature in the image boundary, and enhancing the reflection uniformity even on woven surfaces. Because of the exorbitant cost of a large aperture projection lens larger than 150 mm in diameter, a refractive lens was exchanged with a concave mirror resulting in the same optical effect. In experiment, changing NA $0.15{\sim}0.8$, image contrast was enhanced from 46 to 1.33. Incidentally, the effect of the concave mirror was tested successfully through the experiment.

• Korean Journal of Optics and Photonics
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• v.19 no.4
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• pp.287-293
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• 2008

The collimator which makes a collimated beam, is an essential instrument for assembly and evaluation of telescopes. Recently, the Cassegrain type collimator has been widely used for its compact size as the focal length of high resolution cameras becomes longer. However, this kind of collimator has a disadvantage in that the secondary mirror is a heat source which can degrade the evaluation accuracy for an IR camera system. In this paper, we present the fabrication and measurement process for an off-axis parabolic mirror with the physical diameter pf 1 m, effective diameter 930 mm, and the focal length 6 m. After four months of works we obtained the final surface wave-front error of 30.4 nm rms ($\lambda$/138, ${\lambda}=4.2\;{\mu}m$), which is capable of evaluation of an IR camera as well as a visible camera.

• The Journal of the Convergence on Culture Technology
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• v.8 no.5
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• pp.483-488
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• 2022

In this paper, when a gain grating and a refractive index grating exist simultaneously in a DFB laser diode having a wavelength of 1.55 ㎛, an anti-reflection coating is applied to the right mirror surface so that ρ_r=0. In case of δL<0, the characteristics of the oscillation frequency and oscillation gain have been analyzed. Whenever the phase of the grating on the left side of the mirror continuously decreases by π/2, the δL value of each oscillation mode decreases by about 0.6 to the left of the graph lines of each oscillation mode. The case of the oscillation mode having the lowest threshold gain is the case of κL=10, and in this case, the mode selectivity is relatively low compared to the case of other values of κL. From κL=0.1 to κL=6, the mode selectivity and the frequency stability are excellent. As the mode selectivity is excellent, the frequency stability is excellent. Compared to the case with two cleaved mirrors, the DFB laser diode with anti-reflection coating increases the threshold gain of the oscillation mode by about 2 times, but the mode selectivity becomes about 2 times better.

• 보존과학연구
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• s.25
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• pp.5-29
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• 2004

This research carried out ancient technique and composition of the relics recovered from the octagonal nine-storied pagoda of Woljeongsa temple using the scientific methods and obtained the following results. Firstly, The silver sarira inner case is consists of Ag, its materials comes out near 98wt%and comparing with the relics of Hwangnamdaechong, the contents of Ag and Ni are almost same with it. Secondly, The bronze sarira outer case, its contents of Cu is almost same with pure copper of which average is 99.7wt%. So, it should be named the copper sarira outer caserather than the bronze sarira outer case that has been called. Thirdly, The bronze mirror, though the contents of tin and lead are less than other contents which have been studied, they tend to have white color so they need to be made a close study. Especially, Because cultural property of nondestructive surface analytic method is not analyzed by the analysis of cross section and the moisten analysis, it may be occurred analytical errors by other factors.