• Journal of the Korean Society for Precision Engineering
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• v.32 no.1
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• pp.69-74
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• 2015

Cadmium telluride (CdTe) is being developed for thin film of the X-Ray detector recently. But a rough surface of the CdTe should be improved for resolution and signal speed. This paper shows the study on the improvement of surface roughness and removal rate by applying Chemical Mechanical Polishing. The conventional potassium hydroxide (KOH) based colloidal silica slurry could not realize a mirror surface without physical defects, resulting in low material removal rate and many scratches on surface. In order to enhance chemical reaction such as form oxidized layer on the surface of cadmium telluride, we used hydrogen peroxide ($H_2O_2$) as an oxidizer. Consequently, in case of 3 wt% concentration of hydrogen peroxide, the highest MRR (938 nm/min) and the lowest surface roughness ($R_{p-v}=10.69nm$, $R_a=0.8nm$) could be obtained. EDS was also used to confirm the generated oxide of cadmium telluride surface.

• Journal of the Korean Society of Safety
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• v.10 no.3
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• pp.30-41
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• 1995

This paper proposed a simple method for measuring surface roughness of ground surface. Utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens, a detecting unit with polygon mirror and CCD array sensor, and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultaniously monitor the state of the grind wheel. The experimental results, showed that the Increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min, the table speed is 0.2n1/min -0.9m/min, the dressing speed is 0.2mm/rev～0.4mm/rev, the stylus method and the in-process method can be obtained the same results. Thus, under limited working conditions, using the proposed system, the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

• The Journal of Korean Academy of Prosthodontics
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• v.37 no.4
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• pp.474-493
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• 1999

According to repeated measurements and correction procedures, the accuracy of the phase-shifting profilometry was developed. At first, after 20 final models for maxillary complete denture were duplicated , the mucosa sur-faces of models were measured with the phase-shifting proflometry and each mirror view of these was calibrated. Maxillary casts were divided into 4 groups of 5 casts per each, and wax dentures with 2 sheets of baseplate wax and artificial teeth were made and then cured according to the curing method of each group. Group I ; quick curing with QC-20 acrylic resin Group II ; 9 hour curing with QC-20 acrylic resin Group III ; SR-Ivocap system Group IV ; metal base and quick curing with QC-20 acrylic resin. After curing, polishing, and storing at $37^{\circ}C$ in saline for 30 days, the forms of the impression surface of the dentures were measured with the phase-shifting profilometry. Then, the impression surface form of each denture was placed in the optimal position of com-parison with the mirror view of the same final cast. The amount and direction of distortion of each denture was analyzed and the effects of polishing and storage in each denture were compared, The obtained results were as follows : 1. In Group I, the denture was observed as the appearance distorted in the opposite direction of the mucosa and the postero-lateral part of palatal portion of the denture was observed as the appearance separated from the mucosa. Also, the buccal flanges of the denture were observed as the appearance distorted in the direction of the mucosa. 2. In Group II, the postero-lateral part of palatal portion of the denture was observed as the appearance separated slightly from the mucosa. The bilateral buccal flanges of denture were observed as the appearance distorted severely in the direction of the mucosa. 3. In Group III the bilateral part of the residual ridge crest portions and the buccal flanges of the denture were observed as the appearance distorted in the direction of the mucosa, and specially, the buccal flanges of the maxillary tuberosities were distorted severely. 4. In Group IV, the acrylic resin base of the buccal portion of the denture was observed as the appearance distorted in the opposite direction of the mucosa. 5. The phase-shifting profilometry, done with repeated measurements and correction procedures, was effective in comparing the amount and direction of distortion at every position after the laboratory work and the delivery of maxillary complete denture.

• Journal of the Korean Ceramic Society
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• v.26 no.5
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• pp.645-654
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• 1989

Specimens of WC-Co were indented to measure the resulting crack size and unindented samples were fractured in 3-point flexure to obtain the strength and to measure characteristic features on the fracture surface. Fracture toughness was determined using fractography and compared to those determined using identation techniques. We show that principles of fracture mechanics can be applied WC-Co composites and can be used to analyze the fracture process. The fracture surfaces were examined by scanning electron microscopy and optical microscopy. Characteristic feature observed in glasses, single crystals and polycrystalline materials known as mirror, mist, hackle, and crack branching were identified for these composites. We discuss the importance of fracture surface analysis in determining the failure-initiating sources and the failure behaviorof WC-Co composites.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.2
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• pp.138-143
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• 2000

The establishment of a practical ultra-precision grinding technique using Diamond and CBN wheels is one of the major key technolo-gies to improve production techniques for machine-to-difficult materials without finishing process such as lapping and polishing. But the special efficient dressing technique for ultra-fine grit type grinding wheels to stabilize the grinding ability was not developed. Recently electrolytic in-process dressing technique is proposed to ultra-fine grit type metal bonded diamond wheels to protrude abra-sives continuously from the tool surface. This technology can be widely used to surface grinding and cylindrical grinding but cannot be used efficiently to internal grinding because of the electrode attachment trouble. This paper describes the effect of interval type electrolytic dressing as proposed newly to cast iron bonded diamond wheel for efficient internal grinding with mirror type high quality ground surface.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.5
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• pp.616-621
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• 2010

New type of the base material of the light-emitting diode requires copper wafer in view of heat and electrical conductance. Therefore, polishing process of the substrate level is needed to get a nanometer level of surface roughness as compared with pattern structure of nano-size in the semiconductor industry. In this paper, a series of lapping and polishing technique is shown for the rough and deflected copper substrate of thickness 3mm. Lapping by sand papers tried air cooling method. And two steps of polishing used the diamond abrasives and the $Al_2O_3$ slurry of size 100mm considering the residual scratch. White-light interferometer proved successfully a mirror-like surface roughness of Ra 6nm on the area of $0.56mm{\times}0.42mm$.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.1
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• pp.1-6
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• 2012

The polishing of silicon wafers has an important role in semiconductor manufacturing. Generally, getting a flat surface such as a mirror is the purpose of the process. The wafer surface roughness is affected by many variables such as the characteristics of the carrier head unit, operation, speed, the pad and slurry temperature. Optimum process conditions for experimental temperature, pH value, down-force, slurry ratio are investigated, time is used as a fixed factor. This study carried out a series of experiments at varying platen, chuck rpm and oscillation cpm taking particular note of the difference between the rpm and the affect it has on the surface roughness. In this experiment determine the optimum conditions for polishing silicone wafers.

• Proceedings of the KSME Conference
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• 2002.08a
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• pp.779-782
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• 2002

We examine the problem in which porous/viscoelastic compliant thin plates are subject to pressure fluctuations under transitional or turbulent boundary layer. Measurements are presented of the frequency spectra of the near-field pressure and radiated sound by compliant surface. A porous plate consisting of 5mm thick, open-cell foam with fabric covering and a viscoelastic painted plate of 1mm thick over an acoustic board of 4m thick were placed over a rigid surface in an anechoic wind tunnel. Streamwise velocity and wall pressure measurements were shown to highly attenuate the convective wall pressure energy when the convective wavenumber ($k_{ch}$) was 3.0 or more. The sound source localization on the compliant walls is applied to the measurement of radiated sound by using an acoustic mirror system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.646-650
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• 1996

In this paper, A hydrostatic bearing spindle for high precision machining and a motor built-in spindle for high speed machining are developed toobtain the high precision machining accuracy of the prototype lathe. The sliding bearing with fluoric resin (turcite) pad is adopted for improving the damping charateristics of guide ways. The funning accuracy of moving elements isestimated to confirm the validity of application on the prototype; the high precision CNC lathe. The surface roughness of Cupper and Aluminum machined by the hydrostatic spindle are 0.07 .mu. m and 0.10 .mu. mRmax. The surface roughness of Aluminium machined by the built-in spindle are 0.10 .mu. mRmax. From this results, it is venified that the prototype lathe is effective to high precision maching.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1992.10a
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• pp.115-120
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• 1992

Mirror-surface machining is very important machining technology to manufacture optical parts. especially brittle materials. In case of optical plastics, it is produced through both grinding and polishing till now. New machining method which is more efficient and contributed to the protection of the environmental pollution is, therefore, studied. In this , experimental results and an analysis of surface roughness in ultrasonic vibration cutting of optical plastic (CR-39) which is used for optical lens is presented. In results, a comparison of the micro-structure of machined surfaces produced by cutting with ultrasonic vibration and conventional turning is presented by analyzing S.E.M. photograph. Also, wavelength spectrum analysis is performed to investigate the surface-characteristics machined by ultrasonic vibration cutting.