• Journal of Astronomy and Space Sciences
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• 제29권1호
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• pp.79-84
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• 2012

After a visit by Peter Waddell from the University of Strathclyde, Glasgow, UK in 1991, Robert H. Koch launched a program at the University of Pennsylvania to build lightweight pneumatic membrane mirrors, initially for balloon flight observations where weight is at a premium. Mirror cells were fabricated from sizes 0.18 m to 1.77 m, and experiments conducted to characterize the mirror figure and stability. Most of the work stopped after Prof. Koch's retirement in 1996 until 2006 when the authors expressed an interest in building an array of medium-aperture portable telescopes. The program restarted in earnest at Gravic, Inc. in Malvern, PA in 2008 with Koch using his extensive observational astronomy experience to guide the fabrication of a fully operational 1.07 m membrane mirror telescope with an optical tube assembly weighing under 45 Kg. Residual wavefront aberrations remediation resulted in Koch and the authors investigating membrane tensioning techniques with different cell designs, active secondary wavefront correction, photometric algorithms for aberrated images, and the use of additional lightweight mirror substrates from the Alt-Az Initiative Group, such as foamed glass. The best result for the lightweight mirrors was a point spread function spot size of several arc seconds. A lightweight 1.6 m cast aluminum cell alt-az telescope was subsequently designed by Koch and the authors for prime focus use.

• 천문학논총
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• 제30권1호
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• pp.17-29
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• 2015

The IGRINS is a near infrared high resolution spectrograph jointly developed by the Korea Astronomy and Space Science Institute and the University of Texas at Austin. We present design and fabrication of the optomechanical mount for the five mirrors, i.e., an input fold mirror, a slit mirror, a dichroic, and two camera fold mirrors. Based on the structure analysis and the thermal analysis of finite element methods, the optomechanical mount scheme satisfies the mechanical and the thermal design requirements given by the optical tolerance analysis. The performance of the fabricated mirror mounts has been verified through three IGRINS commissioning runs.

• 한국정밀공학회지
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• 제29권3호
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• pp.247-252
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• 2012

This study has been focused on application of ELID mirror-surface grinding technology for manufacturing single crystal optic sapphire. Single crystal sapphire is a superior material with optic properties of high performance as light transmission, thermal conductivity, hardness and so on. Mirror-surface machining technology is necessary to use sapphire as optic parts. The ELID grinding system has been set up for machining of the sapphire material. According to the ELID experimental results, it shows that the surface of sapphire can be eliminated by metal bonded wheel with micron abrasives and the surface roughness of 60nmRa can be gotten using grinding wheel of 2,000 mesh in 4.5um, depth of cut. In this study, the chemical experiments after ELID grinding also has been conducted to check chemical reaction between workpiece and grinding wheel on ELID grinding process. It shows that the chemical reaction has not happened as the results of the chemical experiments.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.150-151
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• 2007

We present an one-axis parallel-plate type of bulk micromachined torsional micromirror array with single crystalline silicon (SCS) fabricated on the glass substrate. Structurally, bottom electrodes (amophous silicon) in this mirror are DRIEed along the aluminum mirror patterns on SCS, which are self-aligned with mirror plates. Tracing the history of the micromirror study, we found that few papers have been published on research for uniform driving voltages based upon the tilting direction. If there is a slight misalignment during anodic bonding between top (mirror plate) and bottom electrodes, the non-uniformity of driving voltage will be led depending on two different tilting direction. This paper discusses how much the pull-in voltages can be different due to misalignment between two electrodes. Moreover, We achieve uniform pull-in voltage regardless of misalignments in photolithography and anodic-bonding between two individual layers.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.148-149
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• 2007

We present the design and fabrication prcoess of a two-axis tilting micromirror device driven by the electrostatic vertical comb actuator. A high aspect-ratio comb actuator is fabricated by multiple DRIE process in order to achieve large scan angle. The proposed fabrication process enables a mirror to be fabricated on the wafer-scale. By bonding a double-side polished (DSP) wafer and a silicon-on-insulator (SOI) wafer together, all actuators on the wafer are completely hidden under the reflectors. Nickel lines are embedded on a Pyrex wafer for the electrical access to numerous electrodes of mirrors. An anodic bonding step is implemented to contact electrical lines with ail electrodes on the wafer at a time. The mechanical angle of a fabricated mirror has been measured to be 1.9 degree and 1.6 degree, respectively, in the two orthogonal axes under driving voltages of 100 V. Also, a $8{\times}8$ array of micromirrors with high fill-factor of 70 % is fabricated by the same fabrication process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.541-542
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.323-324
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.973-974
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• 2008

• 한국정밀공학회지
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• 제25권7호
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• pp.13-18
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• 2008

• 한국광학회:학술대회논문집
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• 한국광학회 2008년도 하계학술발표회 논문집
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• pp.327-328
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• 2008