• Journal of Sensor Science and Technology
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• v.16 no.2
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• pp.85-90
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• 2007

This paper presents the growth conditions and characteristics of polycrystalline 3C-SiC (silicon carbide) thin films for M/NEMS applications related to harsh environments. The growth of the 3C-SiC thin film on the oxided Si wafers was carried out by APCVD using HMDS (hexamethyildisilane: $Si_{2}(CH_{3})_{6})$ precursor. Each samples were analyzed by XRD (X-ray diffraction), FT-IR (fourier transformation infrared spectroscopy), RHEED (reflection high energy electron diffraction), GDS (glow discharge spectrometer), XPS (X-ray photoelectron spectroscopy), SEM (scanning electron microscope) and TEM (tunneling electro microscope). Moreover, the electrical properties of the grown 3C-SiC thin film were evaluated by Hall effect. From these results, the grown 3C-SiC thin film is very good crystalline quality, surface like mirror and low defect. Therefore, the 3C-SiC thin film is suitable for extreme environment, Bio and RF M/NEMS applications in conjunction with Si fabrication technology.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.1
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• pp.40-45
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• 2004

Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1295-1298
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• 2004

Selective Laser Sintering(SLS) method is one of Rapid Prototyping(RP) technologies. It is used to fabricate desirable part to sinter powder and stack the fabricated layer. To develop this SLS machine, it needs effective scanning path and the development of scanning device. This paper shows how to make fast scanning path with respect to scan spacing, laser beam size and scanning direction from 2-dimensional sliced file generated in commercial CAD/CAM software. Also, we develop the scanning device and its control algorithm to precisely follow the generated scanning path. Scanning path affects precision and total machining time of the final fabricated part. Sintering occurs using infrared laser which has high thermal energy. As a result, shrinkage and curling of the fabricated part occurs according to thermal distribution. Therefore, fast scanning path generation is needed to eliminate the factors of quality deterioration. It highly affects machining efficiency and prevents shrinkage and curling by relatively lessening the thermal distribution of the surface of sintering layer. To generate this fast scanning path, adaptive path generation is needed with respect to the shape of each layer, and not simply x, y scanning, but the scanning of arbitrary direction must be enabled. This paper addresses path generation method to focus on fast scanning, and development of scanning system and control algorithm to precisely follow generated path.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.56-62
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• 2003

The precision fabrication of glass is increasingly demanded for the latest industrial applications of spherical lenses, micro-optical components, and so on. In many cases, the surface roughness of glass is required to be minute for improving the optical characteristics. In this paper, machining characteristics of SF-5 glass and quarts glass are studied by using the ELID grinding process to get mirror surface and productivity compared with a general lapping process. A rotary type grinder with air spindle was used for the experiments. Mitutoyo surface tester and AFM were also used to measure the grinded surface of glass. As the results of experiments, they showed that the surface roughness (Ra) of SF-5 glass was under 7.8 nm and that of quartz glass was under 3.0 m using the # 8000 grinder. So, the possibility of highly efficient and accurate surface for optical components can be achieved by the ELID grinding process.

• The Bulletin of The Korean Astronomical Society
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• v.41 no.2
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• pp.65.1-65.1
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• 2016

일반적으로 천체 망원경에 사용되는 반사경은 유리 소재로 제작된다. 그러나 알루미늄을 반사경 소재로 사용하면 광기계구조물과 반사경의 열팽창계수가 유사하여 치수 안정성이 높다는 장점이 있다. 뿐만 아니라 다이아몬드 선삭 기계 (Diamond Turning Machine, DTM)를 이용할 수 있기 때문에 반사경의 가공 시간 및 제작 비용을 절감할 수 있다. 본 연구에서는 알루미늄 합금 (Al6061-T6)을 소재로 구경 150 mm, 초점거리 600 mm인 포물면 반사경을 제작하였다. 우선 DTM을 이용해 알루미늄을 가공하였는데, 이 때 표면 조도와 관련된 고주파 오차 (High Frequency Error, HFE)가 발생한다. 따라서 표면 조도를 향상시키기 위한 추가적인 공정으로써 가공된 표면을 도금한 후 열처리를 하고, 폴리싱과 이중 코팅을 거쳐서 최종 반사경을 얻었다. 각 단계별 공정을 마친 후에는 접촉식 및 광학식 형상 측정 방법으로 표면 측정을 실시하여 이를 분석하였다. 본 발표에서는 각 공정 단계에서의 반사경 표면 분석 결과를 설명할 것이며, 제작된 알루미늄 반사경과 기존의 유리 소재의 반사경을 성능 면에서 비교할 것이다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.297.2-297.2
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• 2014

Strong exciton-photon coupling in microcavities have generated an intense research effort since quasiparticles called exciton polaritons are produced and shows interesting phenomena. Most of studies have been done with GaAs based microcavities at cryogenic temperature. Recently, GaN material which has large exciton binding energy and oscillator strength has much attention because strong coupling between photon and exciton could be realized at room temperature. However, fabrication of high quality microcavity using GaN is challengeable due to the large mismatch between the lattice and the thermal expansion coefficient in GaN based distributed Bragg mirror. Here, we observed strong coupling regime of exciton-photon in GaN micro-rods which were grown by metalorganic vapour phase epitaxy (MOCVD) on Si substrate. Owing to the hexagonal cross-section of micro-rod, whispering gallery modes of photon are naturally formed and could be coupled with exciton in GaN. Using angle-resolved micro-photoluminescence measurement, exciton polariton dispersion curves were directly observed from GaN micro-rod. We expect room temperature exciton polariton condensation could be realized in high quality GaN micro-rod.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.586-586
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• 2012

The vuv spectrometer for ITER main plasma measurement is designed as a five-channel spectral system. To develop and verify the design, a two-channel prototype system was fabricated with No. 3 (14.4-31.8 nm) and No. 4 (29.0-60.0 nm) among the five channels. For test of the prototype system, a hollow cathode lamp is used as a light source. The system is composed of a collimating mirror to collect the light from source to slit, and two holographic diffraction gratings with toroidal geometry to diffract and also to collimate the light from the common slit to detectors. The overall system performance was verified by comparing the measured spectral resolutions with the calculated spectral resolutions. And we also have developed liquid jet target system. This study is about a neutron generator, which is designed to overcome many of the limitations of traditional beam-target neutron generators by utilizing a liquid target. One of the most critical aspects of the beam-target neutron generator is the target integrity under the beam exposure. A liquid target can be a good solution to overcome damage to the target such as target erosion and depletion of hydrogen isotopes in the active layer, especially for the ones operating at high neutron fluxes and maintained relatively thin with no need for water cooling. In this study, liquid target containing hydrogen has been developed and tested.

• Journal of the Optical Society of Korea
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• v.19 no.6
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• pp.629-637
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• 2015

Compact system cameras (CSCs) are commonly used nowadays and feature enhanced video functions and thin yet light interchangeable lenses. They differ from digital single-lens reflex (DSLR) cameras in their lack of mirror boxes. CSCs, however, have autofocus (AF) speeds lower than those of conventional DSLRs, requiring weight reduction of their AF groups. To ensure the marketability of large telephoto zoom lenses with fixed f/2.8 regardless of field angle variation, in particular, light weight AF groups are essential. In this paper, we introduce a paraxial optical design method and present a new, large, telephoto zoom lens with f/2.8 regardless of the field angle variation, plus a lightweight AF group consisting of only one lens. Using the basic paraxial optical design and optimization methods, we fabricated a new and lighter zoom lens system, including a single-lens, lightweight AF group with almost the same performance.

• The Bulletin of The Korean Astronomical Society
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• v.38 no.1
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• pp.72.2-72.2
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• 2013

An off-axis telescope has several advantages in optical performance comparing with a conventional on-axis telescope. However, in general, an off-axis telescope has a narrow field of view due to the linear astigmatism caused by the asymmetric structure. It was shown in the previous work that the linear astigmatism can be eliminated by properly configuring parameters in a confocal off-axis reflector system. Furthermore, the third order aberrations of a confocal off-axis telescope can be minimized by optimizing the shape of the mirrors. Despite many advantages, the confocal off-axis telescopes have been evaded because of difficulties of off-axis mirror fabrication, alignment process and unaccustomed off-axis baffle design. The baffle for the off-axis telescope should be designed considering that the effects of stray lights are different because of the asymmetry of off-axis system. In this poster, the design, manufacturing, and test for the baffle and housing of an off-axis telescope are presented.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2266-2268
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• 2000

본 논문에서는 스캐닝 미러의 일종으로, 광저장 장치의 픽업헤드용으로 미세회전을 하면서 레이저 빔을 편향시키는 용도로 사용되는 미러를 제작하고 구동실험을 하였다. 제작된 미러의 크기는 $2400{\times}2400{\times}64{\mu}m^3$이고, 빔 스프링은 $500{\times}9.6{\times}64{\mu}m^3$이다. 니켈 전해 도금으로 29${\mu}m$ 높이의 구동 전극을 제작하였고(세가지 모델: 공기통로가 없는 전극, 공기통로와 간격이 각각 200${\mu}m$인 전극, 공기통로와 간격이 각각 100${\mu}m$인 전극), 미러판과 전극을 조립하여(미러판과 전극 사이의 간격은 각각 29${\mu}m$, 26${\mu}m$, 26${\mu}m$) 구동실험을 하였다. 공진 주파수의 계산간은 576Hz, 측정값은 3개의 미러에서 모두 568Hz이었다. 전극과 미러판의 간격이 최대 접근거리 18${\mu}m$가 되도록 미세 회전을 시켰을 때, 공기통로가 없는 전극에서는 공진 주파수가 524Hz, 공기통로가 200${\mu}m$인 전극에서는 544Hz로 각각 감쇠되었고, 공기통로가 100${\mu}m$인 전극에서는 그대로 568Hz이었다.