• Bulletin of the Korean Chemical Society
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• 제26권1호
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• pp.115-118
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• 2005

The miniaturized NIR (Near-infrared) spectrometer has been utilized for the determination of water content (1-19% range) in ethanol that is the most popular organic solvent in pharmaceutical industries. It has many potential capabilities that can replace the conventional analyzers especially for the on-line measurement since it is compact, versatile and cost-effective. By using two dimensional (2D) correlation spectroscopy, it was preliminarily investigated to find any unforeseen spectral distortion among the spectra collected from the miniaturized spectrometer. The 2D study revealed that the spectral variation clearly followed the variation of water concentration without any spectral distortion or abnormality. PLS (Partial Least Squares) was employed to build the calibration model and the resulting prediction performance was acceptable and stable over several days. Even though the miniaturized NIR system was evaluated to fairly simple chemical matrix, the overall study demonstrates the sufficient feasibility for diverse practical and industrial applications.

• Bulletin of the Korean Chemical Society
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• 제26권2호
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• pp.303-308
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• 2005

A miniaturized time-of-flight mass spectrometer with an electron impact ionization source and sheet membrane introduction has been developed. The advantages and features of this mass spectrometer include high sensitivity, simple structure, low cost, compact volume with field portability, and ease of operation. A mass resolution of 400 at m/z 78 has been obtained with a 25 cm flight path length. Under optimized conditions, the detection limits for the volatile organic compounds (VOCs) studied were 0.2-10 ppm by volume with linear dynamic ranges greater than three orders of magnitude. The response times for various VOCs using a silicone membrane of 127 $\mu$m thickness were in the range 4.5-20 s, which provides a sample analysis time of less than 1 minute. These results indicate that the membrane introduction/time-of-flight mass spectrometer will be useful for a wide range of field applications, particularly for environmental monitoring.

• Current Optics and Photonics
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• 제7권3호
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• pp.283-296
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• 2023

An intraoral spectral domain optical coherence tomography (SD-OCT) system has been developed, using a custom-built hand-held scanner and spectrometer. The hand-held OCT probe, based on a microelectromechanical systems scanner and a self-built miniaturized drive circuit, had a field of view sufficient for dental diagnosis. The spectrometer using a fabricated f-theta lens provided the image depth required for dental diagnosis. The axial and transverse resolutions of the OCT system in air were 7.5 ㎛ and 12 ㎛ respectively. The hand-held probe could scan an area of 10 × 10 mm², and the spectrometer could image along a depth of 2.5 mm. To verify the utility of the developed OCT system, OCT images of tooth hard and soft tissues were acquired, and a user-interface program for diagnosis was developed. Early caries and microcracks that were difficult to diagnose with existing methods could be found, and the state of restoration could be observed. Measuring the depth of the gingival sulcus, distinguishing subgingival calculus, and detecting an implant under the gingiva suggested the possibility of the SD-OCT system as a diagnostic for dental soft tissues. Through the presented OCT images, the capability of the developed SD-OCT system for dental diagnosis was demonstrated.

• Journal of the Optical Society of Korea
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• 제20권6호
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• pp.669-677
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• 2016

A miniaturized FTIR spectrometer based on lamellar grating interferometry is being developed for passive remote-sensing. Consisting of a pair of micro-mirror arrays, the lamellar grating can be fabricated using MEMS technology. This paper describes a method to compute the optical field in the interferometer to optimize the design parameters of the lamellar grating FTIR spectrometer. The lower limit of the micro-mirror width in the grating is related to the formation of a Talbot image in the near field and is estimated to be about $100{\mu}m$ for the spectrometer to be used for the wavelength range of $7-14{\mu}m$. In calculating the far field at the detection window, the conventional Fraunhofer equation is inadequate for detection distance of our application, misleading the upper limit of the micro-mirror width to avoid interference from higher order diffractions. Instead, the far field is described by the unperturbed plane-wave combined with the boundary diffraction wave. As a result, the interference from the higher order diffractions turns out to be negligible as the micro-mirror width increases. Therefore, the upper limit of the micro-mirror width does not need to be set. Under this scheme, the interferometer patterns and their FT spectra are successfully generated.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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• pp.1-5
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• 2000

As the semiconductor devices are miniaturized, the number of the unit cleaning processes increases. In order to processes by conventional RCA cleaning process, the consumption of volume of liquid chemical and DI water became huge. Therefore, the problem of environmental issues are evolved by the increased consumption of chemicals. To resolve this matter, an advanced cleaning process by Electrolyzed Water was studied in this work. The electrolyzed water was made by an electrolysis equipment which was composed of three chambers of anode, cathode, and middle chambers. In the case of electrolyzed water with electrolytes in the middle chamber, oxidatively acidic water of anode and reductively alkaline water of cathode were obtained. The oxidation/reduction potentials and pH of anode water and cathode water were measured to be +l000mV and 4.8, and -530mV and 6.3, respectively. The Si-wafers contaminated with metallic impurities were cleaning with the electrolyzed water. To analysis the amounts of metallic impurities on Si-water surfaces, ICP-MS(Inductively Coupled Plasma-Mass spectrometer) was introduced. From results of ICP-MS measurements, it was concluded that the ability of electrolyzed water was equivalent to that of the conventional RCA cleaning.

• Nuclear Engineering and Technology
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• 제54권7호
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• pp.2564-2571
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• 2022

SiPMs are generally coupled into whole columns in gamma energy spectrum measurement, but the relationship between the distribution of whole SiPM columns and the energy resolution of the measured energy spectra is rarely reported. In this work, ∅ 3 × 3 inch NaI scintillator is placed on an 8 × 8 SiPM array, and the energy resolution of the ¹³⁷Cs peak at 662 keV corresponding to the γ-ray is selected as a reference. Each SiPM is switched to explore the influence of the number of SiPM arrays, distribution position, and reflective layer on the energy resolution of SiPMs. Results show that without coupling, the energy resolution is greatly improved when the number of SiPMs ranges from 4 to 32. However, after 32 slices (the area covered by SiPMs relative to the scintillator reaches 25.9%), the improvement in energy resolution and total pulse count is not obvious. In addition, the position of SiPMs relative to the scintillator does not exert much impact on the energy resolution. Results also indicate that by adding a reflective film (ESR), the energy resolution of the tested group increases by 10.38% on average. This work can provide a reference for the design and application of miniaturized SiPM gamma spectrometers.