• 한국정밀공학회지
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• 제27권10호
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• pp.84-92
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• 2010

In this study a numerical analysis has been conducted for the flow characteristics and pumping performance of a piezoelectric-based micropump with electromagnetic resistance exerted on electrically conducting fluid. Here, electromagnetic resistance is alternately applied at the inlet and outlet with alternately applied magnetic fields in association with the reciprocal membrane motion of the piezoelectric-based micropump. A model of Prescribed Deformation is used for the description of the membrane motion. The internal flow characteristics and pumping performance are investigated with the variation of magnetic flux density, tube size, displacement of membrane and the frequency of the membrane. It turns out that the current micropump has a wide range of pumping flow rate compared with diffuser-nozzle based micropumps.

• 한국유체기계학회 논문집
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• 제11권3호
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• pp.14-21
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• 2008

A numerical simulation on the flow field of a valveless bidirectional piezoelectric micropump has been performed. In this type of micropump, the oscillation of the piezoelectric diaphragm generates the blowing and suction flow through the oblique channel from the pumping chamber. The angle between the oblique and main channel causes the variation of flow distribution through upstream and downstream channels in suction and blowing modes. In the suction flow mode, the working fluid flows from both the upstream and downstream of the main channel to the pumping chamber through the oblique channel. However, in the blowing flow mode, the fluid pushed out of the pumping chamber flows more toward the downstream of the main channel due to the inertia of the fluid. In the present study, the effects of geometries such as the angle of oblique channel and the shape of main channel on the flow rate of the up/downstream were investigated. The flow rate obtained from the pump and the energy required to the pump were also analyzed for various displacements and frequencies of the oscillation of the diaphragm.

• 대한기계학회논문집B
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• 제34권6호
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• pp.579-586
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• 2010

MEMS 기술의 향상과 함께 $\mu$-TAS(Micro Total Analysis System)가 개발 되어 의료 및 생물학 분야가 급속하게 성장했다. $\mu$-TAS의 한 분야로 Chip 위에서 소량의 sample과 반응물을 가지고 혼합공정과 분석공정이 이루어지는 LOC(Lab on a chip)에 관한 연구는 활발하게 연구되어진다. LOC는 마이크로 펌프 와 마이크로 믹서와 같은 microfluidic 장치들로 구성된다. Microfluidic 시스템의 유동이 층류 유동이므로 유체상태의 반응물들을 효율적으로 혼합하고 공급하는 것이 어렵다. 본 논문은 이송 및 혼합이 동시에 이루어지는 MHD micropump의 설계와 제작에 관해 제시하였다. 최종 개선사양은 상용 CFD 프로그램의 해석결과를 통하여 결정하였다.

• Biotechnology and Bioprocess Engineering:BBE
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• 제9권2호
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• pp.86-92
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• 2004

In this paper miniaturized disposable micro/nanofluidic components applicable to bio chip, chemical analyzer and biomedical monitoring system, such as blood analysis, micro dosing system and cell experiment, etc are reported. This system includes various microfluidic components including a micropump, micromixer, DNA purification chip and single-cell assay chip. For low voltage and low power operation, a surface tension-driven micropump is presented, as well as a micromixer, which was implemented using MEMS technology, for efficient liquid mixing is also introduced. As bio-reactors, DNA purification and single-cell assay devices, for the extraction of pure DNA from liquid mixture or blood and for cellular engineering or high-throughput screening, respectively, are presented.

• 한국정밀공학회지
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• 제24권12호
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• pp.128-135
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• 2007

Micro-channels for a wave micropump have been fabricated using the Stereolithography and UV Photolithography. The micro-channel with a channel height of $500\;{\mu}m$ was fabricated with stereolithography. UV photolithography was used for producing micro-channels with a channel length less than $100\;{\mu}m$. The fabrication process data including spinning rpm, pre-bake and post-bake time, and develop time for single layer and multiple layer 3D micro-structures using SU-8 photo resist are experimentally found. A film mask printed with a 40,000 dpi laser printer was used for UV lithography and micro-structures in the order of tens of micrometers in dimension were successfully fabricated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.1017-1019
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• 1998

In this paper, the fabrication of a micropump with two giant magnetostrictive films of Sm-Fe and Tb-Fe is presented. The pump consist of one silicon wafer and one cover glass. The micropump consists of an actuator diaphragm, a paired nozzle and diffuser, and two through holes. The Structure of the micropump is fabricated by the chemical vapor deposition, the etching and the sputtering of the magnetostrictive films. The deflection of the actuator measured diaphragm is measured by using the laser vibrometer and the flow rate of the micro pump is observed by using a video microscope.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1851-1856
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• 2008

A numerical program based on computational fluid dynamics has been developed to simulate characteristics of an EHD induction micropump. The ambiguity of boundary conditions was removed by adopting an equation formulated for electric potential as the dependent variable. The calculations show that the dependency of frequency agrees well with the experiments and the previous analysis. The instability, caused by backflows, is getting stronger as the channel depth increases, which is consistent with experiments. The present study reveals that it is due to the limit in the penetration depth which the electric field can affect. Despite the disadvantage of large channel depth, there is a certain optimal depth for the maximum flow rate.

• Journal of Magnetics
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• 제12권2호
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• pp.84-88
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• 2007

A micropump with spiral-type magnetic micromachine was fabricated. When a rotating magnetic field was applied, the machine rotated and pumped a surrounding liquid. We experimentally examined the basic properties of this pump. We found that the pressure and the flow rate could be controlled by the rotating frequency, and this pump could work under wide range kinematic viscosity. In addition, we proposed a disposable pump system using the machine. When a plate installed a fluid channel and the machine was set on a stage for generating a rotating magnetic field, the machine worked as the pump.

• 한국항공우주학회지
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• 제37권8호
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• pp.744-750
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• 2009

본 논문에서는 압전 작동기로 구동되는 무밸브 마이크로 펌프의 펌프 성능을 계산하였다. 선행연구에서 개발된 마이크로 펌프는 4층의 경량 압전 복합재료 작동기, PDMS로 된 챔버와 2개의 디퓨져로 이루어져 있다. 유한요소 해석은 압전 영역, 구조 영역 및 유체 영역을 완전 연성하여 수행되었다. 구조 및 압전 영역의 해석은 ANSYS를 사용하였으며, 유체영역의 해석은 ANSYS CFX를 사용하여 수행하였다. 작동 주파수가 10 Hz와 40 Hz인 경우에 대한 해석을 수행하여 작동 주파수가 유동 특성에 미치는 영향을 고찰하였다. 또한 300 Hz까지의 유동 해석을 통하여 작동 주파수에 따른 유량을 계산하였다.

• 설비공학논문집
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• 제17권7호
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• pp.642-648
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• 2005

This study has been conducted to investigate the thermopneumatic and flow characteristics of diffuser/nozzle based thermopneumatic micropumps. In this study, a transient three-dimensional numerical analysis using FSI (Fluid-Structure Interaction) model has been employed to analyze the effects of the interaction between the membrane and two fluids (air and water) in the thermopneumtic micropump. The transient temperature and pressure in the cavity, the transient displacements of the membrane and the net flow rate of the micropump have been closely calculated for the frequency of 1 Hz. It has been found that the difference of the flow rates at the inlet and outlet is larger in the cooling period than in the heating period and that the duty ratio is very important in association with pump performance because the temperature in the cavity ascends drastically in the heating period and descends slowly in the cooling period. This study can be regarded as fundamental understandings for the design and analysis of thermopneumatic micropumps.