• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2441-2444
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• 2003

This paper describes fabrication of a micro cell counter integrated with an oxygen micropump and Sephadex G-25 beads counting experiment. The device utilized a phototransistor, microwindow, and light source of microscope for beads detection. Microheater and microchannel were used for pumping and guiding of beads to the microwindow. Counting capability of the device was tested with a peristaltic pump and the measured signals (${\sim}10\;mV$) with oscilloscope showed peak shape when beads passed the microwindow. Pumping of beads by the oxygen micropump was carried out by heating paraffin, which enveloped manganese dioxide (catalyst), to trigger the decomposition of hydrogen peroxide into water and oxygen. It lasted for 5 min with $7\;{\mu}l$ of wt. 30 % hydrogen peroxide. Beads counting by oxygen micropump showed peaks ($2{\sim}20\;mV$) with $30\;{\mu}l$ of beads sample and the number of peaks by magnitude was acquired.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.195-202
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• 2004

This paper presents the fabrication and evaluation of mechanical behavior for a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, the middle plate, the upper plate and the tube that connects inlet and outlet of the pump. The lower plate includes the channel and the chamber, and the plain middle plate are made of glass and actuated by the piezoelectric translator. Channels and a chamber on the lower plate are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The upper plate does the roll of a pump cover and has inlet/outlet/electric holes. Three plates are laminated by the aligner and bonded by the anodic bonding process. Flow simulation is performed using error-reduced finite volume method (FVM). As results of the flow simulation and experiments, the single chamber pump has severe flow problems, such as a backflow and large fluctuation of a flow rate. It is proved that the double-chamber micropump proposed in this paper can reduce the drawback of the single-chamber one.

• International Journal of Aeronautical and Space Sciences
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• v.12 no.1
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.4
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• pp.39-47
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• 2005

In this paper, a novel high power micropump using active check valves in place of conventional passive check valves employed at the inlet and outlet ports is presented. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. A prototype micropump having an effective size of $17mm{\times}8mm{\times}11mm$ is fabricated. Frequency-dependent flow rate characteristics, bi-directional flow characteristics and load characteristics are experimentally investigated using a timing control method for valve closing motion. From the obtained experimental results, it is ascertained that optimal values of the phase shift compared to the voltage to drive pump chamber are $15^{\circ}$ for inlet check valve and $195^{\circ}$ for outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with an effective size of $10mm{\times}10mm{\times}10mm$ is fabricated and the basic characteristics are experimentally investigated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.9
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• pp.720-727
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• 2008

Microfluidic single chip integrating thermopneumatic micropump and micro check valve are developed. The micropump and micorvalve are made of biocompatible materials, glass and PDMS, so as to be applicable to the biochip. By using the passive-type check valve, backward flow and fluid leakage are blocked and flow control is stable and precise. The chip is composed of three PDMS layers and a glass substrate. In the chip, flow channel and pump chamber were made on the PDMS layers by the replica molding technique and pump heater was made on the glass substrate by Cr/Au deposition. Diameter of the pump chamber is 7 mm and the width and depth of the channel are 200 and $180{\mu}m$, respectively. The PDMS layers chip and the heater deposited glass chip are combined by a jig and a clamp for pumping operation, and they are separable so that PDMS chip is used as a disposable but the heater chip is able to be used repeatedly. Pumping performance was simulated by CFD software and investigated experimentally. The performance was the best when the duty ratio of the applied voltage to the heater was 33%.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.34 no.6
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• pp.35-41
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• 2006

In this paper, we focus on improving the performance of the piezoelectric diaphragms of valveless micropumps. A circular lightweight piezoelectric composite actuator (LIPCA) with a high level of displacement and output force has been developed for piezoelectrically actuated micropumps. We used numerical and experimental methods to analyze the characteristics of the actuator to select optimal design. With the developed circular LIPCA, we fabricated a valveless micropump by photo-lithography and PDMS molding techniques. The displacement of the diaphragm, the flow rate and the back pressure of the micropump were evaluated and discussed. With a semi-empirical method, the flow rate with respect to driving frequency was predicted and compared with experimental one. The test results confirm that the circular LIPCA is a promising candidate for micropump application and can be used as a substitute for a conventional piezoelectric actuator diaphragm.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.5
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• pp.315-320
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• 2000

This paper presents the fabrication and test of a micropump with an electromagnetic actuator and a pair of aluminum flap valves. The actuator consists of a solenoid coil, a permanent magnet and an actuator diaphragm. The actuator diaphragm is fabricated by the spin coating of silicone rubber. The valve are passive ones and are fabricated by micromachining. The deflection of the fabricated actuator diaphragm is measured with a laser vibrometer. The deflection of the actuator diaphragm is proportional to the input current. The measured deflection of the fabricated diaphragm is $400 \mum$,/TEX> when the input is 118 mApp, and the cut-off frequency is 50 Hz. The maximum flow rate of the fabricated micropump with the electromagnetic actuator is about 5$0 \muell/min$ at 5 Hz when the input current and the duty ratio of the square was are 118 mApp and 50%, respectively.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1960-1962
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• 1996

A thermopneumatic micropump with two micronozzles has been fabricated and tested. The actuator consists of a p+ diaphragm and a pyrex glass on which a microheater is deposited. Two micronozzles are fabricated on either side of a single silicon wafer and behave as a dynamic passive valves. The actuator and the micronozzle are assembled to make a micropump. The center deflection of the actuator diaphragm to step voltage input has been measured. The dynamic test hag been performed by measuring the center deflection of the diaphragm under various input voltages and duty ratios. Also dynamic pumping test is performed. The measured built-up pressure between inlet and outlet of the micropump is 80 Pa for the actuation at 20V, 10 Hz.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1957-1959
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• 1996

In this paper, a piezoelectric micropump is fabricated and tested. The micropump consists of an actuator and two micronozzles have been made of silicon. It contains a piezoelectric polymer which allows opening and closing of the valves electrically. The actuator and the two micronozzles are fabricated by the anisotropic etch using EPW. Then, the fabricated actuator and the valves are anodically bonded with the pyrex glass which consists of the inlet and the outlet channels. The measured deflection of the piezoelectric polymer is $54\;{\mu}m$ at 1.6 kHz. The maximum pumping flow rate and the backward pressure of the micropump are $22\;{\mu}{{\ell}/min$, 8.7 Pa at 10 Hz, respectively.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.