• Transactions on Electrical and Electronic Materials
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• 제14권2호
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• pp.63-66
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• 2013

This paper describes the highly productive process technologies of microprobe arrays, which were used for a probe card to test a Dynamic Random Access Memory (DRAM) chip with fine pitch pads. Cantilever-type microprobe arrays were fabricated using conventional micro-electro-mechanical system (MEMS) process technologies. Bonding material, gold-tin (Au-Sn) paste, was used to bond the Ni-Co alloy microprobes to the ceramic space transformer. The electrical and mechanical characteristics of a probe card with fabricated microprobes were measured by a conventional probe card tester. A probe card assembled with the fabricated microprobes showed good x-y alignment and planarity errors within ${\pm}5{\mu}m$ and ${\pm}10{\mu}m$, respectively. In addition, the average leakage current and contact resistance were approximately 1.04 nA and 0.054 ohm, respectively. The proposed highly productive microprobes can be applied to a MEMS probe card, to test a DRAM chip with fine pitch pads.

• 대한전자공학회논문지
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• 제25권11호
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• pp.1335-1341
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• 1988

A pH-ISEFET microprobe for in vivo measurements has been fabricated by combining ISFET (SL-IIS) chip and capillary thin film reference electrode. A two-step TCE oxidation for the gate oxide layer and multilayer encapsulation using silicone rubber and epoxy were specially used for the improvement of the stability and temperature dependence of the ISFET's. The measured sensitivit, response time and temperature dependence of the pH-ISFET microprobes are 50 mV/pH, less than one second, and - 0.01 pH/$^{\circ}$ , respectively. By operating continuously more than 40 days, a long term stability of 0.016 pH/day is obtained. The result of pH monitoring of femoral arterial blood in a rabbit is fairly good agreement with the value of blood gas analysis.

• 대한전자공학회논문지
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• 제19권6호
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• pp.33-40
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• 1982

초음파 CT는 tissue characterization을 위해 현재 유용한 기법으로 기시되고 있다. 그러나 이에 의해 재구성된 음속분포 및 감쇠·정교 분제는 초음파 빔의 반사, 굴절, 위상 상쇄 효과 등의 화상 열하요각으로 인해 그 단력상의 정량성 평가에 문제점이 존재한다. 이에, 본 논문은 먼저 초음파 CT 화상의 정량적 평가를 위해 개발한 한천(Agar) gel 팬텀을 이용하여 감표 정수 분포 화상 열하 요인을 검토했다. 그 결과, 팬텀 중앙부에서의 재구성 감쇠정교는, 주위매휴(식단수)영 음속차가 25m1s일 때, 실제치보다 약 0.6dB/cm 정도 작게 나타났다. 다음, 이의 보정법으로 수신용 마이크로프로브 어레이법에 대한 계산기 시뮬레이션 및 실험을 통해 그 유효성을 검토하고, 양호한 결과가 얻어짐을 밟혔다. Although ultrasonic CT is one of the useful techniques for tissue characterization, the reconstructed images, such as the velocity distribution and attenuation constant distribution, are degraded by reflection and refraction of ultrasonic beam. This paper studied the degradation effects on attenuation images using agar gel phantoms which were developed to evaluate ultrasonic CT. We found that the reconstructed attenuation constants at the center of the phantoms were less than the actual values by 0.6 dB/cm when phantom velocity differs by 25 m/s from surrounding saline. We also studied a correction method for refraction and phase cancellation effects, where the correction was made using the maximum value in the received subdata, as obtained by sub-arraying microprobes located at each sampling point. Using this method, we could obtain an improvement in the reconstructed image by the correction on the attenuation effect.

• Journal of Magnetics
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• 제16권2호
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• pp.169-172
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• 2011

This study reports an alternative method for measuring the magnetoresistance of unpatterned magnetic tunnel junctions similar to the current-in-plane tunneling (CIPT) method. Instead of using microprobes, a series of point contacts with different spacings are coated on the top surface of the junctions and R-H loops at various spacings are then measured by the usual four-point probe method. The values of magnetoresistance and resistance-area products can be obtained by fitting the measured data to the CIPT theoretical model. The test results of two types of junctions were highly similar to those obtained from standard CIPT tools. The proposed method may help to accelerate the process for evaluating the quality of magnetic tunnel junctions when commercial CIPT tools are not accessible.