• 한국정밀공학회지
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• 제28권3호
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• pp.315-322
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• 2011

High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today's manufacturing technology In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, $675mm{\times}450mm$ mold with tens of V-and pyramid-shaped micropatterns.

• Bulletin of the Korean Chemical Society
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• 제34권3호
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• pp.815-819
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• 2013

Micropatterns of streptavidin and human epidermal carcinoma A431 cells were successfully imaged, as received and without any labeling, using cluster $Au_3{^+}$ ion beam-based time-of-flight secondary ion mass spectrometry (TOF-SIMS) together with a principal component analysis (PCA). Three different analysis ion beams ($Ga^+$, $Au^+$ and $Au_3{^+}$) were compared to obtain label-free TOF-SIMS chemical images of micropatterns of streptavidin, which were subsequently used for generating cell patterns. The image of the total positive ions obtained by the $Au_3{^+}$ primary ion beam corresponded to the actual image of micropatterns of streptavidin, whereas the total positive-ion images by $Ga^+$ or $Au^+$ primary ion beams did not. A PCA of the TOF-SIMS spectra was initially performed to identify characteristic secondary ions of streptavidin. Chemical images of each characteristic ion were reconstructed from the raw data and used in the second PCA run, which resulted in a contrasted - and corrected - image of the micropatterns of streptavidin by the $Ga^+$ and $Au^+$ ion beams. The findings herein suggest that using cluster-ion analysis beams and multivariate data analysis for TOF-SIMS chemical imaging would be an effectual method for producing label-free chemical images of micropatterns of biomolecules, including proteins and cells.

• Carbon letters
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• 제24권
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• pp.55-61
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• 2017

Carbon micropatterns (CMs) were fabricated from a negative-type SU-8 photoresist by proton ion beam lithography and pyrolysis. Well-defined negative-type SU-8 micropatterns were formed by proton ion beam lithography at the optimized fluence of $1{\times}10^{15}ions\;cm^{-2}$ and then pyrolyzed to form CMs. The crosslinked network structures formed by proton irradiation were converted to pseudo-graphitic structures by pyrolysis. The fabricated CMs showed a good electrical conductivity of $1.58{\times}10^2S\;cm^{-1}$ and a very low surface roughness.

• 대한기계학회논문집A
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• 제39권1호
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• pp.71-77
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• 2015

초음파 임프린팅은 초음파 진동에너지를 이용하여 열가소성 고분자 표면에 미세패턴을 복제할 수 있는 공정으로 짧은 성형시간에 적은 에너지로 미세패턴 복제가 가능한 장점이 있다. 최근에는 마스크 필름을 사용한 선택적 임프린팅 기술과 다중 패턴성형이 가능한 반복적 임프린팅 기술이 개발되었다. 본 연구에서는 선택적 초음파 임프린팅에 반복적 임프린팅을 접목시켜 다양한 형태의 다중 복합 미세패턴의 복제기술을 개발하였다. 이를 위해 미세 프리즘 패턴을 포함한 금형과 다양한 형태의 마스크 필름을 사용하여 선택적 연속성형 및 반복성형을 통해 다양한 형태의 미세패턴을 복제할 수 있는 임프린팅 기술을 개발하였다. 또한 복제된 미세패턴 영역에 대해 레이저 조사실험을 실시하여 다양한 형태의 광확산 특성을 갖는 필름을 개발할 수 있음을 확인하였다.

• 한국정밀공학회지
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• 제30권2호
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• pp.236-240
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• 2013

In this presentation, we propose a fabrication method of PDMS stencil to apply into a localized culture of NIH/3T3 cells. PDMS stencil was fabricated by nitrogen gas blowing and soft lithography from preparing SU-8 master mold by photolithography. PDMS stencil pattern was production of the circle size 20 to $500{\mu}m$. In the culture test of PDMS stencil, a stencil was placed on a glass disk. The NIH/3T3 cells were successfully cultured into micropatterns by using the PDMS stencil. The results showed that cells could be cultured into micropatterns with precisely controlled manner at any shapes and specific size for bioscience study and bioengineering applications.

• Rapid Communication in Photoscience
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• 제2권1호
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• pp.24-27
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• 2013

A polymeric photobase generator containing oxime-urethane groups is applied to a fluorescence micropatterning material. Polymer bearing oxime-urethane groups was prepared by copolymerization of methyl methacrylate with methacryloyloxyethyl benzophenoneoxime urethane (MBU). The reaction of amino groups in the irradiated copolymer film with dansyl chloride (Dns-Cl) was monitored by using UV absorption, IR absorption and fluorescence spectroscopy. The fluorescence spectrum of the Dns-Cl-treated irradiated copolymer film shows a strong fluorescence with a fluorescence maximum wavelength at 510 nm. A blue fluorescent micropattern with a line width of $2{\sim}3{\mu}m$ was obtained. Treatment of the irradiated copolymer film with Dns-Cl and rhodamine B mixture led to the formation of green, red, and orange-colored fluorescence micropatterns. Thus, various colored micropatterns on a single polymer film can be obtained by selective excitation of each dye molecules.

• 대한기계학회논문집A
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• 제38권1호
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• pp.51-57
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• 2014

초음파 임프린팅은 열가소성 고분자 기판에 미세패턴을 복제할 수 있는 공정으로 타 성형방법에 비해 에너지소모가 적고 성형시간이 단축되는 장점이 있다. 초음파 임프린팅 공정에서는 고분자 기판의 표면에 초음파 진동에너지를 인가하여 소재간의 마찰열과 미세하게 반복되는 변형에너지의 축적을 통해 고분자 표면을 국부적으로 가소화시켜 미세패턴이 전사된다. 본 연구에서는 초음파 임프린팅에서 금형 온도가 미세패턴의 전사성에 미치는 영향을 분석하였다. 이를 위해 금형온도를 변화시켜가며 임프린팅을 수행하여 미세패턴 성형 영역에서의 온도변화를 관찰하였고, 상기 온도변화를 고려하여 미세패턴의 충진과정을 전산모사를 통해 고찰하였다. 또한 금형온도 변화에 따른 패턴의 전사율 및 전사균일도를 측정하여 비교하였다. 상기 결과를 통해 금형온도를 높일수록 초음파 임프린팅시 미세패턴의 전사특성이 향상됨을 확인할 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.703-704
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• 2010

• 한국진공학회:학술대회논문집
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• 한국진공학회 2005년도 제28회 학술발표회 초록집
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• pp.37-37
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• 2005

• Bulletin of the Korean Chemical Society
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• 제34권12호
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• pp.3541-3542
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• 2013