• Journal of the Korean Vacuum Society
• /
• v.20 no.2
• /
• pp.106-113
• /
• 2011

We describe a single shot off-axis digital holography based on a Mach-Zehnder interferometic scheme for measuring temperature distribution of a microheater. The proposed scheme has the capability of reconstructing object phase image which is dependent of the temperature distribution in real time. Experimental results shows that there is a moderate linear relationship between the measured phase and temperature in the range of $20^{\circ}C$ to $60^{\circ}C$. We expect that the proposed system can provide a very reliable and fast solution in various surface temperature distribution measurement applications.

• Journal of the Microelectronics and Packaging Society
• /
• v.10 no.2
• /
• pp.1-5
• /
• 2003

In this project, the efficiency of localized heating for micro systems packaging is developed by using a forced potential scheme microheater. Less than 0.2 Mpa contact pressure was used for bonding with a 200 mA current input for $50{\mu}m$ width, $2{\mu}m$ height and $8mm{\times}8mm$, $5mm{\times}5mm$, $3mm{\times}3mm$ sized phosphorus-doped poly-silicon microheater. The temperature can be raised at the bonding region to $800^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3 minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional microheaters. For performing the gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for conducting a gross leak check. The pass ratio of bonded dies was 67%, for conventional localized heating, and 85% for our newly developed FP scheme. The bonding strength was more than 25Mpa for FP scheme packaging, which shows that FP scheme can be a good candidate for micro-scale hermetic packaging.

• Journal of the Korean Society of Visualization
• /
• v.14 no.1
• /
• pp.57-61
• /
• 2016

We report a finding of fast(exceeding 2,000 K/s) heating of polydimethylsiloxane(PDMS), one of the most commonly-used microchannel materials, under cyclic loadings at high(~MHz) frequencies. A microheater was created based on the finding. The heating mechanism utilized vibration damping of sound waves, which were generated and precisely manipulated using a conventional surface acoustic wave(SAW) microfluidic system, in PDMS. The penetration depths were measured to range from $210{\mu}m$ to $1290{\mu}m$, enough to cover most microchannel heights in microfluidic systems. The energy conversion efficiency was SAW frequency-dependent and measured to be the highest at around 30 MHz. Independent actuation of each interdigital transducer(IDT) enabled independent manipulation of SAWs, permitting spatiotemporal control of temperature on the microchip. All the advantages of this microheater facilitated a two-step continuous flow polymerase chain reaction(CFPCR) to achieve the billion-fold amplification of a 134 bp DNA amplicon in less than 3 min. In addition, a technique was developed for establishing dynamic free-form temperature gradients(TGs) in PDMS as well as in gases in contact with the PDMS.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.29 no.1 s.232
• /
• pp.67-73
• /
• 2005

The paper presents a single-heater microfluid injector, whose ejected droplet volume is adjusted by digital current path control for a single microheater. The previous droplet volume adjustable methods have used the digital current control for multiple heaters or the analog current control for a single heater, while the present method uses the digital current control for a single microheater. Two different microinjectors, having a rectangular heater and a circular hearter, are designed and fabricated in the chip area of $7.64\;mm{\times}5.26\;mm$. The fabricated microinjectors have been tested and characterized for the number, size, shape and lifetime of the generated bubbles as well as for the volume and velocity of the ejected droplets. The input power for the rectangular heater and the circular heater has been varied in the ranges of $8.7{\sim}24.9{\mu}W\;and\;8.1{\sim}43.8{\mu}W$, respectively. The projected area of the generated bubble has been changed in the ranges of $440{\sim}l,3600{\mu}m^2\;and\;800{\sim}3,300{\mu}m^2$ for the rectangular heater and the circular heater, respectively. The microinjector with the rectangular heater ejects three discrete levels of the droplet in the volume range of $9.4{\sim}20.7pl$ with the velocity range of $0.8{\sim}1.7m/s$, while the microinjector with the circular heater achieves five discrete levels of the droplet in the volume range of $7.4{\sim}27.4pl$ with the velocity range of $0.5{\sim}2.8m/s$.

• ETRI Journal
• /
• v.27 no.5
• /
• pp.585-594
• /
• 2005

A small electronic nose (E-Nose) system has been developed using an 8-channel vapor detection array and personal digital assistant (PDA). The sensor array chip, integrated on a single microheater-embedded polyimide substrate, was made of carbon black-polymer composites with different kinds of polymers and plasticizers. We have successfully classified various volatile organic compounds such as methanol, ethanol, i-propanol, benzene, toluene, n-hexane, n-heptane, and c-hexane with the aid of the sensor array chip, and have evaluated the resolution factors among them, quantitatively. To achieve a PDA-based E-Nose system, we have also elaborated small sensor-interrogating circuits, simple vapor delivery components, and data acquisition and processing programs. As preliminary results show, the miniaturized E-Nose system has demonstrated the identification of essential oils extracted from mint, lavender, and eucalyptus plants.

• Proceedings of the KSME Conference
• /
• 2007.05b
• /
• pp.1870-1875
• /
• 2007

The microchannel heat sink is promising heat dissipation method for high heat flux source. Contrary to conventional circular channel, MEMS based microchannel had rectangular or trapezoidal cross-sectional shape. In our study, we conducted three dimensional conjugate heat transfer calculation for rectangular shape microchannel. First, we simulated that channel was completely drained with known heating power. As a result we obtained calibration line, which indicates heat loss was function of temperature. Second, we simulated single phase heat transfer with various mass flux, 100-400 $kg/m^2s$. In conclusion, the single phase test verified that the present heat loss evaluation method is applicable to micro scale heat transfer devices. Heat fluxes from each side wall shows difference due to non-uniform heating. However those ratios were correlated with supplied total heat. Finally, we proposed effective area correction factor to evaluate appropriate heat flux.

• Journal of computational fluids engineering
• /
• v.16 no.2
• /
• pp.88-93
• /
• 2011

A numerical study of subcooled onset of nucleate boiling (ONB) in a micro-channel under pulsed heating using volume of fluids (VOF) model was conducted. The VOF simulation adopting the existing experimental condition is compared to the experimental data. The time to ONB was determined when the void fraction at the microheater surface first appeared. The theoretical superheat for homogeneous nucleation relatively predicts the transient ONB results of convective flow of water well based on local temperature distribution. It was found that once heat load increases at the heater, transient flow boiling starts to occur faster.

• Proceedings of the KSME Conference
• /
• 2004.11a
• /
• pp.1225-1230
• /
• 2004

The effects of substrate material on the local heating performance of microheaters are studied by both numerical analysis and experiment. Transient conduction analysis shows that the substrate material with low thermal conductivity is critical to the local heating and fast response. A measurement technique for surface temperature field in microscale is newly proposed, which uses temperature sensitive fluorescent dye coated on the surface. The measured surface temperature fields on microheater arrays fabricated on different substrates are presented.

• Proceedings of the KOSOMBE Conference
• /
• v.1997 no.05
• /
• pp.338-341
• /
• 1997

The current consumption and the heat produced in the printhead of thermal printer are mainly governed by total printing dots and printing time for each line. Simple algorithm is proposed to optimize the performance of a thermal printhead, which use variable division according to bit-mapped data of its 1 line. And, for protecting the thermal printhead from exceeding heat, I control the heat energy of each microheater(dots) on the thermal printhead through changes in the applied pulse width.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2008.10a
• /
• pp.1233-1236
• /
• 2008

This study presents the fabrication process and display characteristics of a flexible organic polymer display device that consists of a thin substrate of Polyether Sulfone, a multilayer serpentine-type microheater array that is fabricated on the substrate, and a UV-sensitive polydiacetylene (PDA)-polyvinyl alcohol (PVA) composite film. A retention time of one second is achieved with cell sizes of $500{\mu}m$ and $700{\mu}m$ with cell-to-cell distances of $100{\mu}m$ and $200{\mu}m$, respectively.