• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.520-528
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• 2001

This paper investigates a resonant microaccelerometer that measures acceleration using a built-in micromechanical resonator, whose resonant frequency is changed by the acceleration-induced axial force. A set of design equations for the resonant microaccelerometer has been developed, including analytic formulae for resonant frequency, sensitivity, nonlinearity and maximum stress. On this basis, the sizes of the accelerometer are designed for the sensitivity of 10$^3$Hz/g in the detection range of 5g, while satisfying the conditions for the maximum nonlinearity of 5%, the minimum shock endurance of 100g and the size constraints placed by microfabrication process. A set of the resonant accelerometers has been fabricated by the combined use of bulk-micromachining and surface-micromachining techniques. From a static test of the cantilever beam resonant accelerometer, a frequency shift of 860Hz has been measured for the proof-mass deflection of 4.3${\pm}$0.5$\mu\textrm{m}$; thereby resulting in the detection sensitivity of 1.10${\times}$10$^3$Hz/g. Uncertainty analysis of the resonant frequency output has been performed to identify important issues involved in the design, fabrication and testing of the resonant accelerometer.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.3 s.258
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• pp.248-255
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• 2007

Thermal bubble formation is a fundamental process in nucleate boiling heat transfer and many microelectromechanical thermal systems. One of the established facts is that heterogeneous nucleation is originated from vapors trapped inside cavities. Based on this, we performed an experimental study on the formation of thermal bubbles from microcavity fabricated by microfabrication technology on a copper plate. The cavity was filled with aluminum particles to enhance thermal bubble formation. We observed the thermal bubble behaviors, such as bubble incipience, diameter, frequency and coalescence during nucleate boiling. The experimental data showed that the superheat required to trigger the bubble formation was significantly reduced when the cavity was filled with microparticles. We found that the initial increase of superheat led to the increase of both the departure diameter and frequency while the further increase of superheat caused multiple bubbles to coalesce resulting in the decrease of departure frequency.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.10
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• pp.1017-1022
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• 2013

Currently, various optical fiber tips are used to deliver laser beam for endoscopic surgery. In this paper, we demonstrated multidirectional (forward and side) firing optical fiber tip using a femtosecond micromachining and $CO_2$ laser polishing technology. We controlled the edge width of optical fiber tip, by modulating the condition of $CO_2$ laser, to regulate the amount of side and forward emission. The distal end of the optical fiber with core/clad diameter of $400/440{\mu}m$ was microstructured with cone shape by using a femtosecond laser. And then the microstructured optical fiber tip was polished by $CO_2$ laser beam result in smoothing and specular reflection at the surface of the cone structure. Finally, we operated the LightTools simulation and good agreement was generally found between the proposed model and experimental simulation.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.6
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• pp.959-964
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• 2001

An experimental investigation on the near-field electromagnetic loss of thin copper layers has been presented using microfabricated microwave transceivers for applications to multi-chip microsystems. Copper layers in the thickness range of 0.2$\mu$m∼200$\mu$m have been electroplated on the Pyrex glass substrates. Microwave transceivers have been fabricated using the 3.5mm$\times$3.5mm nickel microloop antennas, electroformed on the silicon substrates. Electromagnetic radiation loss of the copper layers placed between the microloop transceivers has been measured as 10dB∼40dB for the wave frequency range of 100MHz∼1GHz. The 0.2$\mu$m-thick copper layer provides a shield loss of 20dB at the frequencies higher than 300MHz, whereas showing a predominant decreases of shield loss to 10dB at lower frequencies. No substantial increase of the shield effectiveness has been found for the copper shield layers thicker that 2 $\mu$m.

• Tribology and Lubricants
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• v.22 no.4
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• pp.182-189
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• 2006

In this paper, the adhesion characteristics between a fused silica without or with an anti-sticking layer and a thermoplastic polymer film used in thermal NIL were investigated experimentally in order to identify the release performance of the anti-sticking layer. The anti-sticking layers were derived from fluoroalkylsilanes, (1H, 1 H, 2H, 2H-perfluorooctyl)trichlorosilane ($F_{13}-OTS$) and (3, 3, 3-trifluoropropyl)trichlorosilane (FPTS), and coated on the silica surface in vapor phase. The commercial polymers, mr-I 7020 and 8020 (micro resist technology, GmbH), for thermal NIL were spin-coated on Si substrate with a rectangular island which was fabricated by conventional microfabrication process to achieve small contact area and easy alignment of flat contact sur- faces. Experimental conditions were similar to the process conditions of thermal NIL. When the polymer film on the island was separated from the silica surface after imprint process, the adhesion force between the silica surface and the polymer film was measured and the surfaces of the silica and the polymer film after the separation were observed. As a result, the anti-sticking layers remarkably reduced the adhesion force and the surface damage of polymer film and the chain length of silane affects the adhesion characteristics. The anti-sticking layers derived from FPTS and $F_{13}-OTS$ reduced the adhesion force per unit area to 38% and 16% of the silica sur-faces without an anti-sticking layer, respectively. The anti-sticking layer derived from $F_{13}-OTS$ was more effective to reduce the adhesion, while both of the anti-sticking layers prevented the surface damages of the polymer film. Finally, it is also found that the adhesion characteristics of mr-I 7020 and mr-I 8020 polymer films were similar with each other.

• Applied Chemistry for Engineering
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• v.20 no.6
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• pp.571-580
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• 2009

Biochip sensing technologies offering in-situ, fast and real-time measurements in addition to portability can be powerfully utilized in a wide spectrum of research areas including environmental science, food science, medical diagnostics and drug development. In this article, we introduce current research trends and economic aspects of the development of various optical biochip technologies for the analysis of organophosphorus/carbamate pesticides in environmental samples, which is of global importance with serious consequences for both current and future generations. In particular, we will highlight recent efforts made in the creation of highly sensitive and selective optical biochip sensors in conjunction with nanobiotechnologies and microfabrication for the rapid detection of organophosphorus/carbamate pesticides.

• The Korean Journal of Physiology and Pharmacology
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• v.24 no.6
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• pp.441-452
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• 2020

In vivo animal models are limited in their ability to mimic the extremely complex systems of the human body, and there is increasing disquiet about the ethics of animal research. Many authorities in different geographical areas are considering implementing a ban on animal testing, including testing for cosmetics and pharmaceuticals. Therefore, there is a need for research into systems that can replicate the responses of laboratory animals and simulate environments similar to the human body in a laboratory. An in vitro two-dimensional cell culture model is widely used, because such a system is relatively inexpensive, easy to implement, and can gather considerable amounts of reference data. However, these models lack a real physiological extracellular environment. Recent advances in stem cell biology, tissue engineering, and microfabrication techniques have facilitated the development of various 3D cell culture models. These include multicellular spheroids, organoids, and organs-on-chips, each of which has its own advantages and limitations. Organoids are organ-specific cell clusters created by aggregating cells derived from pluripotent, adult, and cancer stem cells. Patient-derived organoids can be used as models of human disease in a culture dish. Biomimetic organ chips are models that replicate the physiological and mechanical functions of human organs. Many organoids and organ-on-a-chips have been developed for drug screening and testing, so competition for patents between countries is also intensifying. We analyzed the scientific and technological trends underlying these cutting-edge models, which are developed for use as non-animal models for testing safety and efficacy at the nonclinical stages of drug development.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.3
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• pp.237-242
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• 2013

This paper proposes a thermal peripheral blood flowmeter integrated with a force sensor that is capable of contact force compensation. We fabricate this blood flowmeter using a nickel RTD (resistance temperature detector) and piezoresistive force sensor by using microfabrication technology. In an experiment, we obtained a decreasing trend for the blood flow under an increasing contact force with a linear tendency of 31.7%/N. We then performed a compensation process based on this obtained trend. As a result, the maximum variance in the blood flow at 1-3N was 9.8%. Thus we achieved consistent blood flow measurement independent of the contact force. In this work, we verified that the thermal blood flowmeter integrated with a force sensor has the ability to accurately measure the blood flow independent of the contact force.

• Smart Structures and Systems
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• v.26 no.4
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• pp.495-506
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• 2020

Monitoring of complex processes faces several challenges mainly due to the lack of relevant sensory information or insufficient elaborated decision-making strategies. These challenges motivate researchers to adopt complex data processing and analysis in order to improve the process representation. This paper presents the development and implementation of quality monitoring framework based on a model-driven approach using embedded artificial intelligence strategies. In this work, the strategies are applied to the supervision of a microfabrication process aiming at showing the great performance of the framework in a very complex system in the manufacturing sector. The procedure involves two methods for modelling a representative quality variable, such as surface roughness. Firstly, the hybrid incremental modelling strategy is applied. Secondly, a generalized fuzzy clustering c-means method is developed. Finally, a comparative study of the behavior of the two models for predicting a quality indicator, represented by surface roughness of manufactured components, is presented for specific manufacturing process. The manufactured part used in this study is a critical structural aerospace component. In addition, the validation and testing are performed at laboratory and industrial levels, demonstrating proper real-time operation for non-linear processes with relatively fast dynamics. The results of this study are very promising in terms of computational efficiency and transfer of knowledge to manufacturing industry.

• Journal of Sensor Science and Technology
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• v.8 no.4
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• pp.320-326
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• 1999

A small cartridge, with a nozzle system for washing off the dirt from the surfaces of sensing gates, was fabricated. The proposed nozzle structure was designed for cartridge by using the simulation tool of fluid (CFD-ACE). Whole size of the fabricated cartridge by using micromachining techniques is about $2.6\;cm{\times}1.5\;cm$, the size of the washing nozzle is $0.2\;mm{\times}0.6\;mm$ and its dead volume is only about $20\;{\mu}l$. A micro-reference electrode was achieved by employing a differential system with ISFETs/QRE (quasi-reference electrode)/REFET (reference field-effect transistor). Metal electrodes was deposited at both ends of blowing channel were used to check the presence of bubble in the microchannel. The pH-ISFET was inserted into the fabricated cartridge and the washing effect of the nozzle system in cartridge was invested.