• 한국정밀공학회지
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• 제25권2호
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• pp.15-22
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• 2008

• 대한기계학회논문집B
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• 제30권12호
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• pp.1196-1202
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• 2006

A MEMS methanol reformer was fabricated and its performance was evaluated in the present study. Catalytic steam reforming of methanol was selected because the process had been widely applied in macro scale reformers. Conventional Cu/ZnO catalyst that was prepared by co-precipitation method to give the highest coating quality was used. The reactor structure was made by bonding three layers of glass wafers. The internal structure of the wafer was fabricated by the wet-etching process that resulted in a high aspect ratio. The internal surface of the reactor was coated by catalyst and individual wafers were fusion-bonded to form the reactor structure. The internal volume of the microfabricated reactor was $0.3cm^3$ and the reactor produced exhaust gas with hydrogen concentration at 73%. The production rate of hydrogen was 4.16 ml/hr that could generate power of 350 mW in a typical PEM fuel cell.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2171-2176
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• 2007

The 3-omega (3-${\omega}$) method is utilized to measure the thermal conductivity of nanofluids. A metal line heater on a silicon nitride membrane bridge structure is microfabricated by a bulk silicon etching method. Localized measurement of the thermal conductivity within the nanofluids droplet is possible by the fabricated 3-${\omega}$ sensor. Time varying AC temperature amplitudes and thermal conductivities are measured to check the stability of the nanofluids containing multi-wall carbon nanotubes (MWCNTs). Stabilities of MWCNT nanofluids prepared with different chemical treatments are compared. Acid treated MWCNT showed best dispersion stability in water while MWCNTs dispersed in water with surfactants such as Gum Arabic and Sodium dodecyl benzene sulfate showed clear sign of gravity dependence.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1842-1846
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• 2008

This work reports development of novel liquid-level sensors based on the $3{\omega}$ method. The sensors determine the liquid level by measuring the thermal response as in the conventional hot-wire technique. However the sensors employ an AC heating method to enhance the sensitivity, noise resistance and time response. Also, the microfabricated thin-film structure of the sensor provides mass-producibility as well as improved sensor performance owing to the increase in the surface-volume ratio of the sensor. Two different types of the sensor are developed: one for point detection of the fluid phase and the other for monitoring continuous variation of liquid level. Notable is that the performance of the sensor is not considerably affected by the liquid flow.

• KIEE International Transactions on Electrophysics and Applications
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• 제3C권5호
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• pp.182-188
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• 2003

We have demonstrated a fluidic technique for self-assembly of microfabricated parts onto substrate using patterned shapes of magnetic force self-assembled monolayers (SAMs). The metal particles and the array were fabricated using the micromachining technique. The metal particles were in a multilayer structure (Au, Ti, and Ni). Sidewalls of patterned Ni dots on the array were covered by thick negative photoresist (SU-8), and the array was magnetized. The array and the particles were mixed in buffer solution, and were arranged by magnetic force interaction. Binding direction of the metal particle onto Ni dots was controlled by multilayer structure and direction of magnetization. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost even with the Au surface on top. The particles were successfully arranged on the array.

• 대한기계학회논문집B
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• 제31권10호
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

• 대한기계학회논문집B
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• 제33권8호
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• pp.573-579
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• 2009

A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

• Korean Chemical Engineering Research
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• 제50권5호
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• pp.929-932
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• 2012

화면표시장치 제조에 널리 이용되고 있는 미세구조 제조향 노광공정을 대신할 기반기술을 개발하고자 한다. 저가의 Polycarbonate 기판에 미세구조를 제조하기 위하여, Spin Coating으로 Polystyrene 박막을 형성하고 박막 위에 Polydimethylsiloxane 주형으로 소프트석판술을 적용하였다. 제조된 구조에 나노입자들을 배열하기 위해 계면작용을 이용하고자 하므로, 구조의 표면을 화학반응에 의해 소수성으로 개질하였다. 소수성으로의 개질은 Polystyrene 표면을 과망간칼륨으로 처리하고 Aminopropyltriethoxysilane을 반응시켜서 수행되었다. 개질된 특성은 X선광전자분광기로 분석되었다. 개질된 표면에서 친수성나노입자들이 분산되어 있는 수용액을 마이크로리터 단위의 방울로 떨어뜨리고, 수용액을 증발시킨다. 증발과정에서 계면상호작용과 미세구조의 물리적 유도로 특정 영역에 나노입자들이 배열되었다. 그리고, 이 배열의 전기적 응용을 확인하였다.

• 대한기계학회논문집B
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• 제37권5호
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• pp.495-501
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• 2013

곤충을 비롯한 많은 생물은 매질의 진동을 감지할 수 있는 다양한 감각기관을 이용하여 외부 교란을 감지하고 서로 통신하며 생명 유지활동을 하고 있다. 가장 가까이 접하는 진동유동의 대표적인 예로는 인체의 호흡을 들 수 있다. 본 연구에서는 마이크로제조 공정을 통해 메소스케일 저항식 감지소자, 특히 외팔보 형상의 유연 감지소자를 이용한 유량측정법을 제안하고, 무선통신을 이용한 유동측정 시스템화 및 휴대화의 가능성을 고찰하였다. 탄성계수가 낮은 기질재료를 사용함으로써 온 습도에 영향을 받지 않는 건강 진단용 호흡센서로서의 가능성 및 확장성을 확인하였다. 또한 유동감지 센서의 측정 데이터를 분석한 결과, 정밀성과 신뢰성은 마이크로 컨트롤러의 분해능, 노이즈 제거기술에도 의존하는 것으로 나타났다. 이 시스템에서 패킷 간의 최소 전송소요 시간은 약 16 ms로 나타났다.

• 대한기계학회논문집B
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• 제31권3호
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• pp.209-216
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• 2007

Bacterial chemotaxis is essential to the study of structure and function of bacteria. Although many studies have accumulated the knowledge about chemotaxis in the past, the motion of a single bacterium has not been studied much yet. In this study, we have developed a device microfabricated by soft lithography and consisting of microfluidic channels. The microfluidic assay generates a concentration gradient of chemoattractant linearly in the main channel by only diffusion of the chemicals. Bacteria are injected into the main channel in a single row by hydrodynamic focusing technique. We measured the velocity of bacteria in response to a given concentration gradient of chemoattractant using the microfludic assay, optical systems with CCD camera and simple PTV (Particle Tracking Velocimetry) algorithm. The advantage of this assay and experiment is to measure the velocity of a single bacterium and to quantify the degree of chemotaxis by statistically analyzing the velocity at the same time. Specifically, we measured and analyzed the motility of Escherichia coli strain RP437 in response to various concentration gradients of L-aspartate statistically and quantitatively by using this microfluidic assay. We obtained the probability density of the velocity while RP437 cells are swimming and tumbling in the presence of the linear concentration gradient of L-aspartate, and quantified the degree of chemotaxis by analyzing the probability density.