• Title/Summary/Keyword: Micro-sphere

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Mechanical and Adhesional Manipulation Technique for Micro-assembly under SEM

  • Saito, S.;Takahashi, K.;Onzawa, T.
    • International Journal of Korean Welding Society
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    • v.2 no.2
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    • pp.19-25
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    • 2002
  • In recent years, techniques for micro-assembly with high repeatability under a scanning electron microscope (SEM) are required to construct highly functional micro-devices. Adhesion phenomenon is more significant for smaller objects, because adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. It is also known that adhesional force between micro-objects exposed to Electron Beam irradiation of SEM increases with the elapsed time. Therefore, mechanical manipulation techniques using a needle-shaped tool by adhesional force are often adopted in basic researches where micro-objects are studied. These techniques, however, have not yet achieved the desired repeatability because many of these could not have been supported theoretically. Some techniques even need the process of trial-and-error. Thus, in this paper, mechanical and adhesional micro-manipulation are analyzed theoretically by introducing new physical factors, such as adhesional force and rolling-resistance, into the kinematic system consisting of a sphere, a needle-shaped tool, and a substrate. Through this analysis, they are revealed that how the micro-sphere behavior depends on the given conditions, and that it is possible to cause the fracture of the desired contact Interfaces selectively by controlling the force direction in which the tool-tip loads to the sphere. Based on the acquired knowledge, a mode diagram, which indicates the micro-sphere behavior for the given conditions, is designed. By referring to this mode diagram, the practical technique of the pick and place manipulation of a micro-sphere under an SEM by the selective interface fracture is proposed.

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MECHANICAL AND ADHESIONAL MANIPULATION TECHNIQUE FOR MICRO-ASSEMBLY UNDER SEM

  • Saito, Shigeki;Takahashi, Kunio;Onzawa, Tadao
    • Proceedings of the KWS Conference
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    • 2002.10a
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    • pp.720-725
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    • 2002
  • In recent years, techniques for micro-assembly with high repeatability under a scanning electron microscope (SEM) are required to construct highly functional micro-devices. Adhesion phenomenon is more significant for smaller objects, becanse adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. It is also known that adhesional force between micro-objects exposed to Electron Beam irradiation of SEM increases with the elapsed time. Therefore, mechanical manipulation techniques using a needle-shaped tool by adhesional force are often adopted in basic researches where micro-objects are studied. These techniques, however, have not yet achieved the desired repeatability because many of these could not have been supported theoretically. Some techniques even need the process of trial-and-error. Thus, in this paper, mechanical and adhesional micro-manipulation are analyzed theoretically by introducing new physical factors, such as adhesional force and rolling-resistance, into the kinematic system consisting of a sphere, a needle-shaped tool, and a substrate. Through this analysis, they are revealed that how the micro-sphere behavior depends on the given conditions, and that it is possible to cause the fracture of the desired contact interfaces selectively by controlling the force direction in which the tool-tip loads to the sphere. Based on the acquired knowledge, a mode diagram, which indicates the micro-sphere behavior for the given conditions, is designed. By refening to this mode diagram, the practical technique of the pick and place manipulation of a micro-sphere under an SEM by the selective interface fracture is proposed.

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Development of Micro-hemisphere Flexible PDMS Film for Enhancing Light Extraction in Organic Light-emitting Devices (유기발광소자의 광추출 향상을 위한 미세 반구형 유연 필름 연구)

  • Baek, Dong-Hyun;Bae, Eun-Jeong;Maeng, Hyeongkyu;Shin, Ji Soo;Park, Young Wook
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.1-5
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    • 2022
  • We presented a micro hemi-sphere structure flexible film to improve the external quantum efficiency (EQE) in OLEDs. The micro hemi-sphere flexible film was fabricated with breath figure (BF) method and replica process. At 45 mg/mL of concentration, the size of the hemi-spheres was approximately 6.2 ㎛ were obtained which are the most circular shape. So, it was possible to yield the best performance with an improvement of 33 % in the EQE and the widest viewing angle ranging from 0° to 70°. As a result, the hemi-sphere film's size and distribution seem to play important roles in enhancing the EQE in OLEDs. Furthermore, the flexible hemi-sphere film based on polymeric materials could offer an effective, large-scale, mass-produced product and a simple process and approach to achieve high efficiency in flexible OLEDs.

Precision Displacement Measurement of Three-DOF Micro Motions Using Position Sensitive Detector and Spherical Reflector (PSD와 구면반사를 이용한 3자유도 미소 변위의 정밀측정)

  • 이재욱;조남규
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.7
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    • pp.99-104
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    • 2003
  • A precision displacement measurement system of 3-DOF micro motions is proposed in this paper. The measurement system is composed of two diode lasers, two quadratic PSDs, two beam splitters and a sphere whose surface is highly reflective. In this measurement system, the sphere reflector is mounted on the platform of positioning devices whose 3-DOF translational motions are to be measured, and the sensitive areas of two PSDs are oriented toward the center point of the sphere reflector. Each laser beam emitted from two diode laser sources is reflected at the surface of sphere and arrives at two PSDs. Each PSD serves as a 2-dimensional sensor, providing the information on the 3-dimensional position of the sphere. In this paper, we model the relationship between the outputs of two PSDs and 3-DOF translational motions of the sphere mounted on the object. Based on a deduced measurement model, we perform measurement simulation and evaluate the performance of the proposed measurement system: linearity, sensitivity, and measurement error. The simulation results show that the proposed measurement system can be valid means of precision displacement measurement of 3-dimensional micro motions.

Fabrication of Micro Electrodes for Electrochemical Machining (전해 가공을 위한 미세 전극 제작)

  • Kim B. H.;Park B. J.;Chu C. N.
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2005.05a
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    • pp.407-412
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    • 2005
  • For micro electrochemical machining (ECM), tool electrodes with various sizes and shapes are necessary. In this paper, tool electrodes were fabricated by micro electrical discharge machining (EDM). Electrode material is tungsten carbide which has high rigidity and good conductivity for micro electrochemical machining. Disk-type and sphere-type electrodes were fabricated to prevent taper shape of side walls or to produce spherical features. Various 3D micro structures were fabricated by electrochemical milling with developed electrodes.

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AC Breakdown Property of Nano-$TiO_2$ and Micro-Silica filler Mixture of Epoxy Based Composites

  • Heo, J.;Jung, E.H.;Lim, K.J.;Kang, S.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.150-150
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    • 2009
  • In this paper, various kinds of epoxy based nanocomposites were made and AC breakdown properties of nano-$TiO_2$ and micro-silica filler mixture of epoxy based composites were studied by sphere to sphere electrode. Moreover, nano- and micro-filler combinations were adopted as an approach toward practical application of nanocomposite insulating materials. AC breakdown test was performed at room temperature $(25^{\circ}C)$, $80^{\circ}C$ and $100^{\circ}C$. The result shows breakdown strength about non-filled, nano-scale $TiO_2$, micro-scale silica and nano-$TiO_2$, micro-silica filled epoxy composites.

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Electrical Properties for Micro-and-Nano- Mixture Composites using Electric Field Dispersion (전기장분산법을 이용한 나노와 마이크로 혼합된 콤포지트의 전기적 특성)

  • Cho, Dae-Lyoung;Kim, Jong-Ho;Park, Jae-Jun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.03b
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    • pp.32-32
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    • 2010
  • A epoxy/multilayered silicate nanocomposite was prepared by a new AC electric application method and micro silica particle was poured into the nanocomposite in order to prepare epoxy/micro-and-nano- mixed composites (EMNC). Electric insulation breakdown strength was measured in a sphere-sphere electrode system designed for the prevention of edge breakdown and the data were estimated by Weibull plot. As the exfoliated silicate nano-plates were homogeniously dispersed in the micro silica particles, the insulation property was higherd.

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Half spherical electrode machining in micro EDM (미세 방전 가공을 이용한 반구형 전극 제작)

  • 김기현;주종남
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2001.04a
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    • pp.1080-1084
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    • 2001
  • In manufacturing a micro die with half spherical cavity by MEDM, it is necessary to prepare an electrode with the same shape. This paper suggests a simple method to manufacture a half spherical electrode based on tool wear. The tool wears more rapidly at the edge of a cylindrical electrode. In order to make a half spherical micro electrode, cylindrical electrode was fed into the workpiece by the distance of its radius. The d/R(depth/Radius) value varied with respect to capacitance and electrode diameter. The smaller the size of electrode was, the closer the electrode tip geometry approached to a half sphere.

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The AC Insulation Breakdown Properties of Epoxy/Multi-Alumina Composites for Adding Surface Modified Nano Alumina (표면처리된 나노알루미나가 첨가된 에폭시/멀티-알루미나 콤포지트의 교류절연파괴 특성)

  • Park, Jae-Jun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.65 no.9
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    • pp.1511-1517
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    • 2016
  • The aim of this study is to improve of properties for electrical AC insulation breakdown strength using epoxy/micro-nano alumina composites with adding glycerol diglycidyl ether (GDE:1,3,5g). This paper deals with the effects of GDE addition for epoxy/micro alumina contents (40,50,60wt%)+surface modified nano alumina(1_phr) composites. 14 kinds specimen were prepared with containing epoxy resins, epoxy micro composites and epoxy nano-micro alumina mixture composites. Average particle size of nano and micro alumina used were 30nm and $1{\sim}2{\mu}m$, respectively. The micro alumina used were alpha phase with Heterogeneous and nano alumina were gamma phase particles of spherical shape. The electrical AC insulation breakdown strength was evaluated by sphere to sphere electrode system and raising velocity 1kV/s. The AC breakdown strength decreased insulation properties of multi-composites according to increasing micro alumina and GDE addition contents.

Electrical and Mechanical Properties for Micro-and-Nano Mixture Composites using Electric Field Dispersion Technique (전기장 분산기술을 이용한 에폭시 마이크로-나노 입자가 혼합된 콤포지트의 전기적 그리고 기계적특성)

  • Cho, Dae-Lyoung;Han, Jin-Hee;Kim, Jung-Joong;Kim, Jung-Hoon;Yoo, Byoung-Bok;Park, Jae-Jun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.98-98
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    • 2010
  • A epoxy/multilayered silicate nanocomposite was prepared by a new AC electric application method and micro silica particle was poured into the nanocomposite in order to prepare epoxy/micro-and-nano- mixed composites (EMNC). Electric insulation breakdown strength was measured in a sphere-sphere electrode system designed for the prevention of edge breakdown and the data were estimated by Weibull plot. As the exfoliated silicate nano-plates were homogeniously dispersed in the micro silica particles, the insulation property was higher.

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