• 대한공업교육학회지
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• v.30 no.2
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• pp.115-122
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• 2005

For an analysis of dynamic behavior in carbon nanotube(CNT) which is widely used as micro and nano-sensors, an electrostatic force of CNT was investigated. For larger gaps in between sensor and electrode the van der Waals force can be ignored. The boundary condition in the CNT was assumed to clamped-clamped case at both ends. In this paper electrostatic force is expressed as linear equation along deflection using Taylor series. The first and second terms(${\zeta}_0$ and ${\zeta}_1$) of the linear equation are analyzed. Based on the simulation results nondimensional number ${\Phi}_0$ and ${\Phi}_1$ which came from ${\zeta}_0$ and ${\zeta}_1$ were decreased according to the increment of the gap. Reduction ratio of the second term ${\zeta}_1$ is increased up to 99% along to the increment of the gap. The higher order terms can be ignored and therefore, electrostatic force can be expressed using the first two terms of the linear equation. This results play an important role in analyzing the nonlinear dynamic behavior of the CNT as well as the pull-in voltage of simply supported switches.

• Transactions on Electrical and Electronic Materials
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• v.8 no.4
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• pp.161-165
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• 2007

In this work, Ni thin films with different thickness from $1,523{\AA}\;to\;9,827{\AA}$ were deposited for the application of micro thermal flow sensors by a magnetron sputtering and oxidized through annealing at $450^{\circ}C$ with increasing annealing time. The initial variation of resistivity decreased radically with increasing films thickness, then gradually stabilizes as the thickness increases. The resistivity of Ni thin films with $3,075{\AA}$ increased suddenly with increasing annealing time at $450{\circ}C$, then gradually stabilizes as the thickness increases after the annealing time 9 h. In case of $3,075{\AA}\;and\;9,827{\AA}$ films, the average of TCR values, measured for the operating temperature range of $0^{\circ}C\;to\;180^{\circ}C$, were $2,413.1ppm/^{\circ}C\;and\;4,438.5ppm/^{\circ}C$, respectively. Because of their high resistivity and very linear TCR, Ni oxide thin films are superior to pure Ni and Pt thin films for flow and temperature sensor applications.

• Journal of the Korean Magnetics Society
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• v.22 no.2
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• pp.45-48
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• 2012

Feed-back type 3-axis flux-gate magnetometer using Co-based amorphous ribbon (Metglass$^{(R)}$2714A) was constructed in this work. Measuring range of magnetic field and frequency were ${\pm}100\;{\mu}T$ and dc~10 Hz respectively. For the interface to computer, microcontroller and 24 bit ADC (Analog to Digital Converter) were employed and resolution of digital output was 0.1 nT. Magnetometer noise of analog output was 5 pT/$\sqrt{Hz}$ at 1 Hz. Digital output of the magnetometer showed linearity of $1{\times}10^{-4}$ and the offset drift was smaller than 0.2 nT during 1 h.

• Journal of rehabilitation welfare engineering & assistive technology
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• v.10 no.3
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• pp.229-236
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• 2016

Magnetic sensors and actuators have been widely used in industry and medical fields. Integrated systems based on sensors and actuators are defined as mechatronics that is the general combination of mechanics and electronics. Recently, magnetic wireless sensors and actuators have been developed and used at a systematic level. In particular, their mechanisms depend on magnetic, such as magnetic material and physical phenomena. However, their research boundary has not been clear. Researchers talk of magnetic micro-robots, magnetic actuators and sensors. Therefore, a new and correct definition is required. In this study, we introduce the advanced and extended concept of mechatronics, which is a magneto-mechantronics for biomedical and rehabilitation. Among various applications, we focused on wireless pump and sensing system for blood vessel rehabilitation and local motion capture, respectively.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.28 no.11
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• pp.872-879
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• 2017

This work presents a cable fault monitoring system based on the differential frequency domain reflectometry using a compact impedance analyser which is composed of a direct digital synthesizer, an op amp and a gain/phase detector with a micro controller. The proposed system can replace expensive vector network analysers for frequency domain reflectometry and therefore be deployed in sensor networks for long term multi-point cable monitoring. Effectiveness of the system is experimentally confirmed by diagnosing the status of the power cable.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.7
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• pp.979-986
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• 2013

Recently, in the electric, electronic, robotic, and medical industries, a great attention has been paid to the development of MEMS-based smart devices with a compact size and highly intelligency. The MEMS technology is very effective in designing into a compact size and lightweight by combining into one the complex electrical, mechanical, chemical, and biological features which are required by smart devices, and at the same time, in bulk batch manufacturing. Therefore, this study, to prepare for upcoming new MEMS-based technological paradigm, analyzes MEMS processes and then considers its Applications.

• The Journal of the Korea institute of electronic communication sciences
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• v.13 no.4
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• pp.751-756
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• 2018

In smart factories and industrial IoT, all facilities in a factory are monitored over the Internet, thereby facility can reduce the downtime and increase the availiability by preventive maintenance before it breaks down. The abnormal conditions of the major facilities in the plant are caused by abnormal temperature rise, vibration, and variations in noise. Consequently, it is critical to develop a very small smart device that is easily installed in a small space to enable real-time monitoring of the vibration status of the facility. In this study, smart devices were developed for smart factory fault prediction and robustness management using ultra small micro-controllers with WiFi capabilities and MEMS acceleration sensors.

• Smart Structures and Systems
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• v.20 no.6
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• pp.657-668
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• 2017

In this research, an active vibration suppression of a smart beam having piezoelectric sensor and actuators is investigated by designing separate controllers comprising a linear quadratic regulator and a neural network. Firstly, design of a smart beam which consists of a cantilever aluminum beam with surface bonded piezoelectric patches and a designed mechanism having a micro servomotor with a mass attached arm for obtaining variations in the frequency response function are presented. Secondly, the frequency response functions of the smart beam are investigated experimentally by using different piezoelectric patch combinations and the analytical models of the smart beam around its first resonance frequency region for various servomotor arm angle configurations are obtained. Then, a linear quadratic regulator controller is designed and used to simulate the suppression of free and forced vibrations which are performed both in time and frequency domain. In parallel to simulations, experiments are conducted to observe the closed loop behavior of the smart beam and the results are compared as well. Finally, active vibration suppression of the smart beam is investigated by using a linear controller with a neural network based adaptive element which is designed for the purpose of overcoming the undesired consequences due to variations in the real system.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.5
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• pp.354-360
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• 1999

PCN-PZT piezoelectric acceleration sensors of annular shear mode voltage type were fabricated and their characteristics have been investigated. Field tests are also carried out. To avoid noise problems from the environmental conditions, acceleration sensors employed solid state micro-electronics for pre-amplifier. The calibration procedures based on the principle of the comparison method were adopted for investigating the characteristics of fabricated acceleration sensors. The voltage sensitivity and resonant frequency of fabricated acceleration sensors were 83mv/g, 23kHz, respectively. The lower and upper frequency limit were 4Hz and 9kHz, respectively. The variation of the voltage sensitivity showed 10% at $-406{\circ}C\; and\; 9%\; at\; 121^{\circ}C$ compared to that of reference temperature at $40^{\circ}C$.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.1898-1899
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• 2005

반도체 집적회로 공정에서 사용되는 폴리이미드 포토레지스트(P12723, Dupont)를 감습막으로 사용하는 마이크로 습도센서 소자를 제작하였다. 마이크로 습도센서는 실리콘 웨이퍼 기판 위에 $SiO_2$ 박막을 건식열산화 공정으로 제작하고, Al 박막을 포토리소그라피 공정으로 패터닝 한 IDT (Interdigital Transducer)를 전극 위에 폴리이미드 포토레지스트를 공정변수를 다양하게 조절하면서 감습막으로 제작하였다. 폴리이미드 감습막은 스핀코팅법으로 제작하였으며, 회전수를 조절하여 두께를 변화시켰다. 완성된 마이크로 습도센서 소자의 상대습도 변화$(10{\sim}90% RH)$에 따른 정전용량 값 변화를 항온항습조 내에서 다양한 온도에서 HP4192A Impedance Analyzer를 사용하여 조사함으로써, 폴리이미드 포토레지스트를 사용하는 마이크로 정전용량형 습도센서의 제작 가능성을 검토하였다. 폴리이미드 정전용량형 마이크로 습도센서는 다양한 인가 전원 주파수에서 기준 센서로 사용된 상용 Vaisala Hygrometer와 유사한 감습특성 및 응답특성을 보였다.