• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.440-445
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• 2012

Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) is a novel displacement sensor which has wide measurable range with high resolution. The sensor, however, is very sensitive to relative rotational alignment between stator and mover of the sensor as well as its displacement. In addition to, there can be some disturbances in the relative rotational alignment, so some noises occur in the sensor's output signal by the disturbances. This negative effect of the high sensitivity may become larger as increasing sensitivity. Therefore, this negative effect of the high sensitivity has to be compensated and reduced to achieve nanometer resolution of the sensor. In this study, a new type capacitive linear encoder with a mechanical guide is presented to reduce the relative rotational alignment problem. The presented method is not only to reduce the alignment problem, but also to assemble the sensor to the stage conveniently. The method is based on a new type CLECDiS that has mechanical guide autonomously. In the presented sensor, when the device is fabricated by micro-machining, the guide-rail is also fabricated on the surface of the sensor. By the direct fabrication of the guide-rail with high precision micro-machining, errors of the guide-rail can be reduced significantly. In addition, a manual yaw alignment is not required to obtain large magnitude of the output signal after the assembly of the sensor and the stage. The sensor movement is going to follow the guide-rail automatically. The prototype sensor was fabricated using the presented method, and we verify the feasibility experimentally.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.12
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• pp.2975-2981
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• 2014

Micro-magnetic detection system is used to detect small particles in an automatic transmission valve body, which signal noise and time-delay may occurs in process of signal transmitting and filtering. In this paper, we present the design and implement of a micro-magnetic detection system based on wireless sensor networks in conveyer belt. Micro-magnetic detection system consists of five modules which are magnetic sensor detector, signal processing unit, wireless sensor networks, system control unit and system monitoring unit. Our experimental results show that the proposed wireless micro-magnetic detection system improves both accuracy and time delay compared to the wired system; therefore, it may apply for wireless micro-magnetic detection system by analysis of packet reception rate.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.19.2-19.2
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• 2005

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.727-730
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• 2003

Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.499-500
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• 2006

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.05a
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• pp.51-55
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• 1999

Recently, manufacturing work has been transformed to advanced technology intensive form from mass production with a little items required in the past. It was demanded that superior workpiece surface integrity. However, the study of ductile mode machining was proceeded actively.In this paper, it is developed Ultra-Micro Indentation Device using the PZT actuator. Experimentally, by using theUltra-Micro Indentation device, the micro fracture behavior of the silicon wafer was invesgated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation apparatus.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.115-118
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• 2005

A workpiece with a large surface area is likely to be uneven due to form error and waviness. These geometric disturbances can cause inaccurate micro shapes to be formed when micro features are micro-grooved into the surface and cause the resulting workpiece to fail to function as desired. Thus, real-time measurement and compensation is required to guarantee the form accuracy of micro features while machining a workpiece with a large surface area. In this study, a method is suggested for real-time measurement of geometric error for the micro grooving of a large flat surface using a laser displacement sensor. The measurements are demonstrated for the workpieces with large surface areas and the experimental results show that the waviness and form error are well detected.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.12
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• pp.1217-1222
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• 2012

A wall flow sensor has been used for feedback flow control and wall shear stress measurement. In this study, we developed a new wall flow sensor by combining the PIV algorithm and the micro image sensor used in an optical mouse. The feasibility of the wall flow sensor was investigated by using simulated fluid flow experiments. Compared with the quadrature signal from imaging devices, the accuracy of the wall flow velocity measurement was improved and the dynamic range increased. In addition, the depth information of particles was also measured by using the defocusing imaging technique.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.1
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• pp.363-366
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• 2005

A micro flow sensor on silicon substrate allows the fabrication of small components where many different functions can be integrated so that the functionality of the sensors can be increased. Further more, due to the small size of the elements the sensors can be quite fast. A thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. In normal, a mass flow sensor is composed of a central heater and a pair of temperature sensing elements around the heater. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensors and a central heater was proposed and numerically simulated by the Finite difference formulation to confirm the feasibility of the flow sensor structure.

• 한국기계연구소 소보
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• s.18
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• pp.67-74
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• 1988

The force sensor is essentially required in controlling robot manipulator in such applications as precise assembly of mechanical parts, deburring and polishing and various kinds of 6-axis force sensors are developed for these application. This paper presents the algorithm of horizontal assembly of circular cross-sectional workpiece using 3-axis force sensor and procedure to develop the sensor. The sensor is calibrated and tested using AID converter and 16 bit micro computer. The result is $\pm$0.03% FS of zero stability, 0.1%FS of linearity and $\pm$0.05% FS of resolution. The sensor will be used in the research of robot application such as assembly and deburring interfaced with micro computer based robot controller which is under development at the robotics lab.