• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.781-784
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• 2005

Twenty four types of thermopile for micro spectrometer infrared sensors were fabricated on low-stress $Si_3N_4$ membranes with $1.2{\mu}m-thickness$ using MEMS technology. Poly-Si thin film with thickness of 3500 ${\AA}$ as the first thermocouple material, was deposited by LPCVD method. And aluminum thin film with thickness of 6000 ${\AA}$ as the second thermocouple material, was deposited by sputtering method. Thermopile were designed and fabricated for optimum conditions by five parameters of thermocouple numbers (16 ${\sim}$ 48), thermocouple line widths (10 ${\mu}m$ ${\sim}$ 25 ${\mu}m$), thermocouple lengths (100 ${\mu}m$ ${\sim}$ 500 ${\mu}m$), membrane areas ($1^2\;mm^2$ ${\sim}$ $2.5^2\;mm^2$) and junction areas (150 ${\mu}m^2$ ${\sim}$ 750 ${\mu}m^2$), respectively. Electromotive forces of fabricated thermopile were measured 1.1 mV ${\sim}$ 7.4 mV at $400^{\circ}C$. It was thought that measurement results could be used for thermopile infrared sensors optimum structure for micro spectrometers.

• 센서학회지
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• 제9권3호
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• pp.171-176
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• 2000

반응성 스퍼터링과 고주파 마그네트론 스퍼터링으로 각각 증착된 MgO 박막과 그 위에 증착된 백금박막의 열처리 온도 및 시간에 따른 물리적, 전기적 특성을 4침 탐침기, 주사전자현미경 및 X선 회절법을 이용하여 분석하였다. $1000^{\circ}C$, 2시간의 열처리 조건하에서 MgO 박막은 백금박막과 화학적 반응없이 백금박막의 열산화막에 대한 부착특성을 개선시켰으며, 그 위에 증착된 백금박막의 면저항 및 비저항은 각각 $0.1288\;{\Omega}/{\square}$, $12.88\;{\mu}{\Omega}{\cdot}cm$이었다. Lift-off 방법을 이용하여 $SiO_2$/Si기판상에 백금 저항체를 만들었으며, 백금 와이어, 백금 페이스트 그리고 SOG를 이용하여 마이크로 열 센서용 박막형 Pt-RTD를 제작하였다. $25{\sim}400^{\circ}C$의 온도범위에서 $1.0{\mu}m$의 두께를 갖는 제작된 Pt-RTD의 저항온도계수는 벌크 백금에 가까운 $3927ppm/^{\circ}C$로 측정되었다. 측정온도범위내에서 저항값은 선형적인 변화를 보였다.

• 센서학회지
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• 제16권2호
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• pp.159-164
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• 2007

Thin films of platinum were deposited on a $Al_{2}O_{3}/ONO(SiO_{2}-Si_{3}N_{4}-SiO_{2})/Si$-substrate with an 2-inch Pt(99.99 %) target at room temperature for 20, 30 and 60 min by DC magnetron sputtering, respectively X-ray diffract meter (XRD) was used to analyze the crystallanity of the thin films and field emission scanning electron microscopy (FE-SEM) was employed for the investigation on crystal growth. The densification and the grain growth of the sputtered films have a considerable effect on sputtering time and annealing temperatures. The resistance of the Pt thin films was decreased with increasing deposition time and sintering temperature. Pt micro heater thin film deposited for 60 min by DC magnetron sputtering on an $Al_{2}O_{3}$/ONO-Si substrate and annealed at $600^{\circ}C$ for 1 h in air is found to be a most suitable micro heater with a generation capacity of $350^{\circ}C$ temperature and 645 mW power at 5.0 V input voltage. Adherence of Pt thin film and $Al_{2}O_{3}$ substrate was also found excellent. This characteristic is in good agreement with the uniform densification and good crystallanity of the Pt film. Efforts are on progress to find the parameters further reduce the power consumption and the results will be presented as soon as possible.

• 센서학회지
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• 제20권5호
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• pp.357-362
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• 2011

This paper demonstrates a novel electrodynamic technique to remove particles from the wall of microchannels. Dielectrohporesis(DEP) is generated by applying alternating electric potentials to the interdigitated electrodes integrated at the bottom of the micro-channel. The proposed technique is applied to a general microfluidic channel as a feasibility test. To examine the wall loss reduction efficiency, 10 ${\mu}m$ diameter Polystyrene latexes(PSL) were supplied to the inlet of the device. Then, the concentration of collected particles through devices was measured. In the experiment for 10 ${\mu}m$ diameter PSL particles, the concentration of the injected particles was $174.25{\times}10^4$ particles/ml. However, the concentration of collected particles at the outlet was $52.25{\times}10^4$ particles/ml. Only 30 % of particles had arrived at the outlet and 70 % of particles had adhered to the wall of the microfluidic channel. By applying alternating electric potentials from 0 to 20 $V_{pp}$ at 3 MHz, the concentration of injected particles was 135.00${\times}10^4$ particles/ml, the concentration of collected particles was increased as $105.25{\times}10^4$ particles/ml at 20 $V_{pp}$ at the outlet. When the electric potential was 20 $V_{pp}$, the particle loss was decreased by 39 % (initial loss: 70 %, loss at 20 Vpp: 31 %) with 10 ${\mu}m$ particle. The particle loss was decreased along to the incensement of electric potentials and the enlargement of the diameter of particles. According to these measured results, it was confirmed that the proposal of using DEP technique could be a good candidate for particle loss reduction in micro-particle processing chip application. Moreover, it is expected that the proposed technique could enhance performance of microfluidic and biochip devices.

• 대한의용생체공학회:의공학회지
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• 제31권3호
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• pp.187-193
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• 2010

In this study we have designed and fabricated an inexpensive micro electronic system that we call Alvitek. It can indirectly but accurately predict and display the partial pressures of alveolar oxygen and carbon dioxide for the patients in the ICU of a hospital. Alvitek consists of both hardware part and software part. Performance of the system is tested by animal experiment with pigs for various $F_{t}e_{2}$ and RR(Respiratory Rate) values under the mechanical ventilation. The predicted alveolar gas partial pressures are cprpared with the approximate alveolar oxygen partial pressures easily calculated by the physician’s bedside formula. As a result, we have concluded that the relative error of A-$aDe_2$ calculated by the bedside formula grows seriously for lower $F_{t}e_{2}$ values. The present prediction method of Alvitek is henceforth believed very meaningful to the physicians. The system hardware and software are described in the text.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.2290-2295
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• 2005

In this paper, it is developed simulator system of 3 D.O.F parallel robot for educate of expertness. This simulator system is composed of three parts ? 3 D.O.F parallel robot, controller (hardware) and software. First, basic structure of the robot is 3 active rotary actuator that small geared step motor with fixed base. An input-link is connected to this actuator, and this input-link can connect two ball joints. Thus, two couplers can be connected to the input-link as a pair. An end-plate, which is jointed by a ball joint, can be connected to the opposite side of the coupler. A sub-link is produced and installed to the internal spring, and then this sub-link is connected to the upper and bottom side of the coupler in order to prevent a certain bending or deformation of the two couplers. The robot has the maximum diameter of 230 mm, 10 kg of weight (include the table), and maximum height of 300 mm. Hardware for control of the robot is composed of computer, micro controller, pulse generator, and motor driver. The PC used in the controller sends commands to the controller, and transform signals input by the user to the coordinate value of the robot by substituting it into equations of kinematics and inverse kinematics. A controller transfer the coordinate value calculated in the PC to a pulse generator by transforming it into signals. A pulse generator analyzes commands, which include the information received from the micro controller. A motor driver transfer the pulse received from the pulse generator to a step motor, and protects against the over-load of the motor Finally, software is a learning purposed control program, which presents the principle of a robot operation and actual implementation. The benefit of this program is that easy for a novice to use. Developed robot simulator system can be practically applied to understand the principle of parallel mechanism, motors, sensor, and various other parts.

• IEIE Transactions on Smart Processing and Computing
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• 제6권1호
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• pp.10-17
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• 2017

We propose classification algorithms for human and dog movement. The proposed algorithms use micro-Doppler signals obtained from humans and dogs moving in four different directions. A two-stage classifier based on a support vector machine (SVM) is proposed, which uses a radial-based function (RBF) kernel and $16^{th}$-order linear predictive code (LPC) coefficients as feature vectors. With the proposed algorithms, we obtain the best classification results when a first-level SVM classifies the type of movement, and then, a second-level SVM classifies the moving object. We obtain the correct classification probability 95.54% of the time, on average. Next, to deal with the difficult classification problem of human and dog running, we propose a two-layer convolutional neural network (CNN). The proposed CNN is composed of six ($6{\times}6$) convolution filters at the first and second layers, with ($5{\times}5$) max pooling for the first layer and ($2{\times}2$) max pooling for the second layer. The proposed CNN-based classifier adopts an auto regressive spectrogram as the feature image obtained from the $16^{th}$-order LPC vectors for a specific time duration. The proposed CNN exhibits 100% classification accuracy and outperforms the SVM-based classifier. These results show that the proposed classifiers can be used for human and dog classification systems and also for classification problems using data obtained from an ultra-wideband (UWB) sensor.

• 전기전자학회논문지
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• 제18권1호
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• pp.119-127
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• 2014

본 논문에서는 MEMS(Micro Electro Mechanical System) 가속도센서를 위한 CMOS readout 회로를 설계하였다. 설계된 CMOS readout 회로는 MEMS 가속도 센서, 커패시턴스-전압 변환기(CVC), 그리고 2차 스위치드 커패시터 ${\Sigma}{\Delta}$ 변조기로 구성된다. 이들 회로에는 저주파 잡음과 오프셋을 감소시키기 위한 correlated-double-sampling(CDS)와 chopper-stabilization(CHS) 기법이 적용되었다. 설계 결과 CVC는 150mV/g의 민감도와 0.15%의 비선형성을 갖는다. 설계된 ${\Sigma}{\Delta}$ 변조기는 입력전압 진폭이 100mV가 증가할 때, 출력의 듀티 싸이클은 10%씩 증가하며, 0.45%의 비선형성을 갖는다. 전체 회로의 민감도는 150mV/g이며, 전력소모는 5.6mW이다. 제안된 회로는 CMOS 0.35um 공정을 이용하여 설계하였고, 공급 전압은 3.3V이며, 동작 주파수는 2MHz이다. 설계된 칩의 크기는 PAD를 포함하여 $0.96mm{\times}0.85mm$이다.

• Korean Chemical Engineering Research
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• 제47권3호
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• pp.321-326
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• 2009

간단한 기체농도 측정장치를 제안하여, 혼합기체를 분리하는 흡착공정에서 성능을 실험적으로 조사하였다. 측정센서는 수정진동자의 전극에 고체의 흡착제를 도포하여 유효성분을 선택적으로 분리하게 하여 농도를 측정하였다. 센서용 흡착제는 마이크로 입자의 카본 크라이오젤(Micro-Particle Carbon(MCC))을 사용하였고, 공기와 i-부탄의 혼합기체를 대상으로 대나무 활성탄을 채운 칼럼에서 분리하는 공정을 사용하였다. 칼럼의 입구와 출구에 측정시스템을 각각 장치하고 i-부탄의 농도를 측정하였다. 입구와 출구의 실제농도를 GC로 측정한 결과와 측정한 수정진동자의 공진주파수를 비교하여 제안한 측정시스템이 유용하게 농도를 측정할 수 있음을 보였다. 실험을 통하여 제안하는 시스템이 비교적 간단한 장치로, 실시간 인라인 측정이 가능함을 입증하여 실제공정에 유용하게 활용할 수 있음을 보였다.

• Journal of Biosystems Engineering
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• 제32권6호
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• pp.440-447
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• 2007

In this study, a biosensor was developed using an enzyme-linked immunosorbent assay (ELISA) to rapidly measure the fungicide iprovalicarb residues in agricultural products. The biosensor was designed to include micro-pumps and solenoid valves for fluid transport, a spectrophotometer cuvet as a reaction chamber, a photodiode with a light-emitting diode for optical density measurement, and a control microcomputer to implement assay. The rate of change in optical density of the cuvet was read as final signal output. Micro-pumps were evaluated to investigate their delivery capability, the highest values of the error and the coefficient of variation were 4.3% and 4.6% respectively. As the incubation period was reduced from 15 minutes to 11 minutes to shorten the total processing time, the sensor sensitivity was decreased as the antibody dilution ratio was reduced to a half. The maximum usable period of the coated cuvet was found to be two days with 1% error limit. To predict the concentration of the iprovalicarb residue in agricultural products, a linear calibration model was obtained with r-square values of 0.992 for potato and 0.985 for onion. In validation test for the samples of potatoes and onions against the high performance liquid chromatography, very high correlation values were obtained as 0.996 and 0.993 respectively. Using the cuvet immobilized with antigen, it took 21-minutes for the biosensor to complete the measuring process of the iprovalicarb residues.