• 한국공작기계학회논문집
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• 제14권5호
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• pp.35-40
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• 2005

An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{\mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $\~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.

• International journal of advanced smart convergence
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• 제9권1호
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• pp.63-69
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• 2020

The rapid development in modern industrialization pollutant the water and atmospheric air across the globe that have a major impact on the human and livings health. In worldwide, every country government increasing the importance to improve the outdoor air pollution monitoring and control to provide quality of life and prevent the citizens and livings life from hazard disease. We proposed the environmental dust level detection method for outdoor facilities using sensor fusion technology to measure precise micro-dust level and monitor in realtime. In this proposed approach use the camera sensor and commercial dust level sensor data to predict the micro-dust level with data fusion method. The camera sensor based dust level detection uses the optical flow based machine learning method to detect the dust level and then fused with commercial dust level sensor data to predict the precise micro-dust level of the outdoor facilities and send the dust level informations to the outdoor air pollution monitoring system. The proposed method implemented on raspberry pi based open-source hardware with Internet-of-Things (IoT) framework and evaluated the performance of the system in realtime. The experimental results confirm that the proposed micro-dust level detection is precise and reliable in sensing the air dust and pollution, which helps to indicate the change in the air pollution more precisely than the commercial sensor based method in some extent.

• 한국기계가공학회지
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• 제12권3호
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• pp.28-35
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• 2013

Micro electrical discharge machining (EDM) as a non-contact machining process is very effective for micromachining with a thin electrode because of its low machining reaction force. The micro-electrode machining device has the advantage of maintaining high precision through the whole processes and uses a feeding wire in the thin electrode tool manufacturing process. This study describes the design and evaluation of a micro-electrode machining device using optical photo-interrupter. The electrode was fabricated by reverse electrical discharge machining. The performance of designed system was evaluated to measure tension force according to feed speed of wire. This system for micro electrode fabrication proves the feasibility in the micro-EDM process of the micro holes and parts for industrial applications.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.246-250
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• 2003

In this study, two new types of micro-grippers in which micro-fingers are actuated by piezoelectric multi-layer benders and stacks are introduced for the manipulation of micrometer-sized objects. First, we constructed a 3-chopstick-mechanism tungsten gripper, which is composed of three chopsticks: two are designed to grip micro-objects, and tile third is used to help grasp and release the objects through overcoming especially electrostatic force among some surface effects including electrostatic, van der Waals forces and surface tension. Second, a 2-chopstick-mechanism silicon micro-gripper that uses an integrated force sensor to control the gripping force was developed. The micro-gripper is composed of a piezoelectric multilayer bender for actuating the gripper fingers, silicon fingertips fabricated by use of silicon-based micromachining, and supplementary supports. The micro-gripper is referred to as a hybrid-type micro-gripper because it is composed of two main components; micro-fingertips fabricated using micromachining technology to integrate a very sensitive force sensor for measuring the gripping force, and piezoelectric gripper finger actuators that are capable of large gripping forces and moving strokes. The gripping force signal was found to have a sensitivity of 667 N/V. To the design of each of components of both of the grippers. a systematic design approach was applied, which made it possible to establish the functional requirements and design parameters of the micro-grippers. The micro-grippers were installed on a manual manipulator to assess its performance in tasks such as moving micro-objects from one position to a desired position. The experiment showed that the micro-grippers function effectively.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2254-2256
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• 2000

This paper presents an implantable telemetry LC resonance-type pressure sensor for the measurement of the ventricle pressure. This sensor consists of a capacitor and an inductor. This resonant circuit is magnetically coupled with an external antenna coil. The resonance frequency of the circuit decreases as the sensor capacitance is increased by the applied pressure. The inductance and the capacitance are 428nH and 0.98${\mu}F$, respectively. The resonance frequency is 245.7MHz when the differential pressure is zero. The sensitivity of the sensor is 9.477kHz/Pa.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2006년도 추계학술대회 논문집
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• pp.771-778
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• 2006

Before the Flap type GATE is introduced until, the Turnstile type GATE was plentifully used. The Turnstile type GATE is used plentifully from the Seoul metro, Busan Transportation Corporation and Korea Railroad Corporation. From the Turnstile type GATE, the micro switch breakdown is occurred by the contact of the micro switch which perceives a Turnstile rotation and the cam. The breakdown is cause of the passenger inconveniently. In order to prevent the breakdown which is caused by Micro switch contact, Microswitch support used the sensor in Turnstile rotation perception. The sensor which is used in test is Photo Sensor and Reed Sensor two type. The test result Reed Sensor was suitable in underground environment. When using the RF card, RF card processing came to be quick

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제12권10호
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• pp.4754-4773
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• 2018

In sensor medium access control (SMAC) protocol, sensor nodes can only access the channel in the scheduling and listening period. However, this fixed working method may generate data latency and high conflict. To solve those problems, scheduling duty in the original SMAC protocol is divided into multiple small scheduling duties (micro duty MD). By applying different micro-dispersed contention channel, sensor nodes can reduce the collision probability of the data and thereby save energy. Based on the given micro-duty, this paper presents an adaptive duty cycle (DC) and back-off algorithm, aiming at detecting the fixed duty cycle in SMAC protocol. According to the given buffer queue length, sensor nodes dynamically change the duty cycle. In the context of low duty cycle and low flow, fair binary exponential back-off (F-BEB) algorithm is applied to reduce data latency. In the context of high duty cycle and high flow, capture avoidance binary exponential back-off (CA-BEB) algorithm is used to further reduce the conflict probability for saving energy consumption. Based on the above two contexts, we propose an improved SMAC protocol, micro duty adaptive SMAC protocol (MDA-SMAC). Comparing the performance between MDA-SMAC protocol and SMAC protocol on the NS-2 simulation platform, the results show that, MDA-SMAC protocol performs better in terms of energy consumption, latency and effective throughput than SMAC protocol, especially in the condition of more crowded network traffic and more sensor nodes.

• 센서학회지
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• 제18권5호
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• pp.349-352
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• 2009

This paper describes the fabrication and characteristics of micro heaters built on AlN($0.1{\mu}m$)/3C-SiC($1{\mu}m$) suspended membranes by surface micromachining technology. In this work, 3C-SiC and AlN films are used for high temperature environments. Pt thin film was used as micro heaters and temperature sensor materials. The resistance of temperature sensor and the power consumption of micro heaters were measured and calculated. The heater is designed for operating temperature up to about $800^{\circ}C$ and can be operated at about $500^{\circ}C$ with a power of 312 mW. The thermal coefficient of the resistance(TCR) of fabricated Pt resistance of temperature detector(RTD)'s is 3174.64 ppm/$^{\circ}C$. A thermal distribution measured by IR thermovision is uniform on the membrane surface.

• 한국정밀공학회지
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• 제12권2호
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• pp.48-58
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool, optical device, measurement systen. In order ro keep a high precision displacement resolution, they use a position sensor and feedback the error. From the practical point of view, a high-resolution displacement sensor system are very expensive and difficult to guarantee such sensitive sensors work properly in the hard opera- tion environment of industry. In this study, a micro-positioning grinding table which does not require position sensor but uses piezoelectric voltage feedback, has been developed. It is driven by hystersis-considering reference input voltage which calculated from computer and then uses actuator/sensor characteristics of piezoelectric materials. From the result of experiments we proved a fast and stable response of micro-positioning system and suggested efficient technique to control the piezoelectric actuator. And through grinding experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as extremely small depth of grinding.

• JSTS:Journal of Semiconductor Technology and Science
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• 제6권4호
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.