• KSTLE International Journal
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• v.7 no.1
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• pp.22-26
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• 2006

A simple finite element analysis is performed to simulate the thermal characteristics of a micro sensor package with thin film heater embedded in the glass wall of a micro-channel. In this paper, Electric characteristics of ITO sputtered heater were presented in this study, which can be used as a map of heater design in the range of available system temperature. The effects of thermo-physical properties of materials, geometrical structure and boundary condition on the thermal performance are also investigated. Finally, the design of micro-flow induced thermal sensor that is capable of measuring fluid flow with a lower flow detection limit of approximately 24pL/s is presented.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.45-48
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• 2007

Conventional force sensors such as piezoelectric sensor has limitations for measuring micro/nano-scale thrust. In this study we developed nano-scale measurement system using laser displacement sensor and cantilever. And electrospray microthruster was fabricated by using stainless capillary and extraction electrode, to generate nano-scale thrust. The measurement system can measure the around 90 nN thrust from this thruster. In addition, we designed and fabricated electrospray micro thruster based on PMMA(Polymethyl methacrylate), which has a nozzle protruded from the substrate.

• Journal of Sensor Science and Technology
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• v.18 no.3
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• pp.207-209
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• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• Journal of Sensor Science and Technology
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• v.32 no.5
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• pp.280-284
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• 2023

In this study, a prototype micro-scale photomask and microfluidic channel mold were fabricated using the thermal shrinkage of the polymer. A polystyrene (PS) sheet was used as the heat-shrink polymer, and the patterns of the photomask and microchannel are interdigitated electrodes. Patterns were formed on the PS sheets using a commercial laser printer. The contraction ratio of the PS sheet was approximately 60% at a temperature of 150 ℃, and the transmittance was reduced by approximately 0% at a wavelength of 365 nm. The microfluidic channel had a round shape. The proposed technique is simple, facile, and inexpensive for fabricating a micro-scale photomask and microfluidic channel mold and does not involve the use of any harmful materials. Thus, this technique is well-suited for fabricating diverse micro-scale patterns and channels for prototype devices, including sensors.

• Journal of Sensor Science and Technology
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• v.26 no.1
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• pp.60-65
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• 2017

This paper describes the low noise and low power IC using the opamp sharing technique for the capacitive micro-sensor sensing platform. The proposed IC reduces noise using correlated double sampling (CDS) and reduces power consumption using the opamp sharing technique. The IC is designed to be fully programmable, and can be digitally controlled by serial peripheral interface (SPI). The power consumption and the integrated input referred noise are 1.02 mW from a 3.3 V supply voltage and $0.164aF_{RMS}$ with a bandwidth of 400 Hz. The capacitive sensitivity, the input-output linearity and the figure of merits (FoM) are 2.5 mV/fF, 2.46 %FSO, and 8.4, respectively.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.9
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• pp.418-423
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• 2003

This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.10
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

• Journal of Sensor Science and Technology
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• v.3 no.3
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• pp.22-27
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• 1994

Design of potentiostat and I-V converter for micro pO2 sensor is described. Also, The operation of the designed circuit, in connection with the eqivalent model of micro pO2 sensor, is simulated. The potentiostat showed low output resistance of $l.1k{\Omega}$ and input voltage range of $-3{\sim}2.5V$. And the I-V converter showed low input resistance of $30{\Omega}$ and good linearity between input and output.

• Science of Emotion and Sensibility
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• v.25 no.4
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• pp.45-52
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• 2022

Recently, interest in and demand for sensors that recognize physical activity and their products are increasing. In particular, the development of wearable materials that are flexible, stretchable, and able to detect the user's biological signals is drawing attention. In this study, an experiment was conducted to improve the dip-coating efficiency of a single-walled carbon nanotube dispersion solution after fine holes were made in a hydrophobic material with a micro needle. In this study, dip-coating was performed with a material that was not penetrated, and comparative analysis was performed. The electrical conductivity of the sensor was measured when the sensor was stretched using a strain universal testing machine (Dacell Co. Ltd., Seoul, Korea) and a multimeter (Keysight Technologies, Santa Rosa, CA, USA) was used to measure resistance. It was found that the electrical conductivity of a sensor that was subjected to needling was at least 16 times better than that of a sensor that was not. In addition, the gauge factor was excellent, relative to the initial resistance of the sensor, so good performance as a sensor could be confirmed. Here, the dip-coating efficiency of hydrophobic materials, which have superior physical properties to hydrophilic materials but are not suitable due to their high surface tension, can be adopted to more effectively detect body movements and manufacture sensors with excellent durability and usability.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.33 no.10
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• pp.93-97
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• 2005

We have developed the FDSS (Fine Digital Sun Sensor) for the space technology of the STSAT-2 (Seience & Technology Satellite 2). The FDSS is firstly developed by using CMOS image sensor(CIS) in South Korea. The FDSS consists of the optics part, FPGA(Field Programable Gate Array) part, and MCU(Micro controller unit)part. This paper will focus on the optical characteristics of the optics part and describe the configuration of FDSS with the design of aperture. We also analyze the characteristic of optics about the pixel of the CMOS image sensor.