• Journal of Sensor Science and Technology
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• v.18 no.4
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• pp.311-315
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• 2009

This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on AlN(0.1 $\mu$m)/3C-SiC(1.0 $\mu$m) suspended membranes by surface micro-machining technology. The 3C-SiC and AlN thin films which have wide energy band gap and very low lattice mismatch were used sensors for high temperature and voltage environments. The 3C-SiC thin film was used as micro heaters and temperature sensor materials simultaneously. The implemented 3CSiC RTD(resistance of temperature detector) and the power consumption of micro heaters were measured and calculated. The TCR(thermal coefficient of the resistance) of 3C-SiC RTD is about -5200 ppm/$^{\circ}C$ within a temperature range from 25 $^{\circ}C$ to 50 $^{\circ}C$ and -1040 ppm/$^{\circ}C$ at 500 $^{\circ}C$. The micro heater generates the heat about 500 $^{\circ}C$ at 10.3 mW. Moreover, durability of 3C-SiC micro heaters in high voltages is better than Pt micro heaters. A thermal distribution measured and simulated by IR thermovision and COMSOL is uniform on the membrane surface.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.497-502
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• 2002

This paper describes a design methodology of a tri-axial silicon-based farce sensor with square membrane by using micromachining technology (MEMS). The sensor has a maximum farce range of 5 N and a minimum force range of 0.1N in the three-axis directions. A simple beam theory was adopted to design the shape of the micro-force sensor. Also the optimal positions of piezoresistors were determined by the strain distribution obtained from the commercial finite element analysis program, ANSYS. The Wheatstone bridge circuits were designed to consider the sensitivity of the force sensor and its temperature compensation. Finally the process for microfabrication was designed using micromachining technology.

• Journal of information and communication convergence engineering
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• v.9 no.2
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• pp.230-234
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• 2011

It is endeavoring for sea safety and fire[1] at sea prevention solidifying control of standard technology and safety supervision aspect in IMO[2] but sea accident and ship fire are happening continuously. Because using Robot in artistic talent of ship in this treatise, studied that correspond to Risk and manage. Attach fire perception sensor for Robot's Risk confrontation, and because using infrared rays sensor, TOUCH SWITCH, sound perception sensor, gas perception sensor, light perception sensor that is threaded in Robot and is achieved, controlled Robot, and establish Low-High value the speed of sound output use and DC MOTOR and COM SEN of when indicate Risk confrontation to Robot and establish Robot's Risk confrontation administration action.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1468-1469
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• 2008

기상관측 분야에서는 풍속센서의 소형화 요구가 커지고 있어 Air flow sensor를 이용한 MEMS(Micro Electro Mechanical System) 풍향 풍속센서의 응용연구가 활발하다. MEMS 풍향 풍속 센서는 수 mm 크기를 가지면서도 바람의 세기와 함께 방향을 측정하여야 하는데, 센서 칩이 노출되어 있어 외부환경으로부터 영향을 받기 때문에 센서소자의 내오염성과 내구성 확보가 중요하다. 따라서 본 연구에서는 절연막으로 비점착성의 테프론 막을 적용하여 외부환경으로부터 영향을 줄일 수 있는 열감지 방식의 MEMS 풍향 풍속 센서 칩을 제작하였다. 테프론 코팅막을 이용한 풍향 풍속 센서는 0.1m/s의 resolution을 가지며, 최대 15m/s까지 측정이 가능하여, 오염에 강하고 발수성을 센서를 제작하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.277-277
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• 2009

In this paper, PMPG (Piezoelectric Micro Power Generator) was investigated by ANSYS FEA (Finite Element Analysis) to decrease operating frequency and improve out power. The micro power generator was designed to convert ambient vibration energy to electrical power as a ZnO piezoelectric material. To find optimal model in low vibration ambient, the shape of power generator was changed with different membrane width, thickness, length, and proof mass size. Used the ANSYS modal analysis, bending mode and stress distribution of optimal model were analyzed. Also, the displacement with the frequency range was analyzed by harmonic analysis. From the simulation results, the resonance frequency of optimal model is about 373 Hz and confirmed the possibility of ZnO micro power generator for wireless sensor node applications.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.68-73
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• 2009

One of the traditional optical methods to monitor a tool is a CCD sensor-based vision system which captures an aspect of the tool in real time. In the case using the CCD sensor, specific lens-modules are necessary to monitor the tool with higher resolution than its pixel size, and a microprocessor is required to attain desired data from captured images. Thus theses additional devices make the entire measurement system complex. Another method is to use a pair of an optical source and a detector per measuring axis. Since the method is based on the intensity modulation, the structure of the measurement system is simper than the CCD sensor-based vision system. However, in the case measuring the three dimensional position of the tool, it is difficult to apply to micro machine-tools because there may not be space to integrate three pairs of an optical source and a detector. In this paper, in order to develop a tool-origin measurement system which is employed in micro machine-tools, the improved method to measure a tool origin in x, y and z axes is introduced. The method is based on the intensity modulation and employs one pair of an optical source radiating divergent beams and a quadrant photodiode to detect a three dimensional position of the tool. This paper presents the measurement models of the proposed tool-origin sensor. The models were verified experimentally The verification results show that the proposed method is possible and the induced models are available for design.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1627-1628
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• 2006

In this paper, mesoporous only platinum electrode and micro pore platinum electrode with mesoporous Pt are fabricated and characterized on a silicon substrate to check their usability as enzymeless sensing electrodes for developing non-disposable glucose sensors integrated with silicon CMOS read out circuitry. Since most of electrochemical glucose sensors are disposable due to the use of the enzymes that are living creatures, these are limited to use in the in-vivo and continuous monitoring system applications. The proposed mesoporous Pt electrode with approximately 2.5nm in pore diameter and 150nm in height was fabricated by using a nonionic surfactant $C_{16}EO_8$ and an electroplating technique. The micro pore Pt electrode with mesoporous Pt means the mesoporous Pt electrode fabricated on top of micro pore arrayed Pt electrode with approximately $10{\mu}m$ in pore diameter and $80{\mu}m$ in height. The measured current responses at 10mM glucose solution of plane Pt, micro pore Pt, micro pore with mesoporus Pt, and mesoporous Pt electrodes are approximately $9.9nA/mm^2$, $92.4nA/mm^2$, $3320nA/mm^2$ and $44620nA/mm^2$, respectively. These data indicate that the mesoporous Pt electrode is much more sensitive than the other Pt electrodes. Thus, it is promising for non-disposable glucose sensor and electrochemical sensor applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.993-998
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• 1997

The advanced technology of micro-machining is starting to penetrate our lives. This technology, with which it is possible to make micro-structures by means of processing on the order of nm (micrometer = 1/1,000 mm) or less, is realizing machines that were only part of our wildest imagination. However, the fact is that many issues remain in the quest for a variety of applications. With the advent of computing technologies, information technologies, and telecommunications technologies, we foresee the need for new approaches in design, process, and the use of materials, technologies, and people in a globalized manufacturing enterprise. A new thinking paradigm is needed to focus on quality of service on the products we design and manufacture. Factories in different regions need to be co-ordinated through use of the state-of-the-art information on productivity, diagnostics, and service evaluation of manufacturing systems could be shared among different locations and partners. In this research, We develope the internet based Diagnosis system for micro machining and evaluate its characteristics by using mechatronic sensor like Dynamometer, acoustic emission, Acceleration sensor, micro phone, vision, infra-red thermometer.

• Ceramist
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• v.7 no.3
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• pp.38-47
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• 2004

최근 micro structure, micro sensor, micro actuator 및 microelectronics 등을 활용하는 microelectromecha-nical systems (MEMS) 기술은 마이크로 로봇, micro manipulation, 광학 소자 및 시스템, 유체, 열, 바이오 및 화학공정 등을 위한 시스템 그리고 atomic force와 scanning tunneling microscope 등에 사용되는 다양한 소자 등 많은 잠재력을 가지고 있다. 이들 응용 분야 들은 micro actuator와 같은 mechanical power source가 요구되는 경우가 있다. 압전 특성을 포함하는 강유전체 재료는 이러한 micro actuator를 위해 여러 가지 다양한 장점을 지니고 있는데, 이들을 정리하면 다음과 같다. (중략)

• Journal of Bio-Environment Control
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• v.1 no.1
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• pp.61-71
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• 1992

This study is performed to develop an automatic irrigation control of system for effective water management in greenhouse. The automatic irrigation control system is composed of an IR-RED optical sensor in tensiometer and an One-chip micro controller. The following results are obtained : 1. A practical IR-RED optical sensor in tensiometer, which shows the starting point of irrigation, was developed. 2. The automatic irrigation system with the optical sensor and One-chip micro controller was developed and also designed to be able to combine with the control system for temperature, curtain opening, etc. 3. A multiple irrigation control system for several greenhouses were suggested. 4. The results of the system test with the driving program for automatic water management were excellent.