• Interaction and multiscale mechanics
• /
• v.2 no.1
• /
• pp.1-14
• /
• 2009

This paper proposes an interaction field concept based on the field theory of plasticity. Relative deformation between two arbitrary scales, e.g., macro and micro fields, is defined which can be implemented in the crystal plasticity-based constitutive framework. Differential geometrical quantities responsible for describing dislocations and defects in the interaction field are obtained, based on which dislocation density and incompatibility tensors are further derived. It is shown that the explicit interaction exists in the curvature or incompatibility tensor field, whereas no interaction in the torsion or dislocation density tensor field. General expressions of the interaction fields over multiple scales with more than three scale levels are derived and implemented into the present constitutive equation.

• Interaction and multiscale mechanics
• /
• v.3 no.3
• /
• pp.257-266
• /
• 2010

A novel resonance based proximity DC current sensor is proposed. The sensor consists of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end. When the sensor is placed in proximity to a wire carrying DC current, resonant frequency of the beam changes with change in current. This change in resonant frequency is used to determine the current through the wire. The structure is simulated in micro and meso scale using COMSOL Multi physics software and the sensor is found to be linear with good sensitivity.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.6
• /
• pp.36-40
• /
• 2009

Development of maskless lithography techniques can provide a potential solution for the photomask cost issue. Furthermore, it could open a market for small scale manufacturing applications. Since femtosecond lasers have been found suitable for processing of a wide range of materials with sub-micrometer resolution, it is attractive to use this technique for maskless lithography. As a femtosecond laser has recently been developed, both of high power and high photon density are easily obtained. The high photon density results in photopolymerization of photoresist whose absorption spectrum is shorter than that of the femtosecond laser. The maskless lithography using the two-photon absorption (TPA) makes micro structures. In this paper, we present a femtosecond laser direct write lithography for submicron PR patterning, which show great potential for future application.

• Journal of the Korean Society for Precision Engineering
• /
• v.27 no.3
• /
• pp.104-110
• /
• 2010

Cyclic deformations of polymer foam film are simulated using the finite element method. Material of polymer foam film is polypropylene (PP). The calculated polymer foam film is micro-scale thin film has cellular structure. The polymer foam film is used in ferro-electret applications. The polymer foam film is idealized to one cell structure as lens shaped stretched truncated octahedron model. Cyclic deformation is performed by uniaxial stretching. Stretching direction is perpendicular to plane of cellular film. Various cyclic strain amplitudes, pore wall thicknesses, pore shape are investigated to find deformation tendency of cellular structure. Consequently, cellular structure has various macroscopic stresses on cyclic deformation with various pore thickness and pore shape.

• Journal of the Korean Society for Precision Engineering
• /
• v.30 no.12
• /
• pp.1273-1279
• /
• 2013

We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.

• Journal of the Korean Society of Visualization
• /
• v.9 no.1
• /
• pp.17-19
• /
• 2011

The bubble oscillations play an important role in ultrasonic cleaning processes. In the ultrasonic cleaning of semiconductor wafers, the cleaning process often damages micro/nano scale patterns while removing contaminant particles. However, the understanding of how patterns in semiconductor wafers are damaged during ultrasonic cleaning is far from complete yet. Here, we report the observations of the motion of bubbles that induce solid wall damage under 26 kHz continuous ultrasonic waves. We classified the motions into the four types, i.e. volume motion, shape motion, splitting or jetting motion and chaotic motion. Our experimental results show that bubble oscillations get unstable and nonlinear as the ultrasonic amplitude increases, which may exert a large stress on a solid surface raising the possibility of damaging microstructures.

• Journal of the Korean Society of Visualization
• /
• v.6 no.2
• /
• pp.9-13
• /
• 2008

The reproducibility of water droplet formation which is indispensible in the investigation of a drop-on-demand piezoelectrically driven inkjet was verified by checking the size of droplet and distance from the nozzle tip of inkjet head to droplet. Based on the reproducibility of droplet formation, we visualized the formation of micro-scale droplets by acquiring consecutive images at the jetting frequency of 500 Hz for which air bubbles were not generated. Two different electric waveforms were used to drive the piezoelectric actuator. The visualization system consists of a high-speed camera that can capture images up to 250,000fps, a long-distance microscope and a halogen lamp as a light source.

• International Journal of Precision Engineering and Manufacturing
• /
• v.5 no.2
• /
• pp.39-45
• /
• 2004

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for the last few decades. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of Si and ${Si}_3$$N_4$ tips were in the range of ${10}^{-1}$~${10}^{-3}$and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was investigated. It was found that the tip wear has more severe for harder counter surface materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• The Bulletin of The Korean Astronomical Society
• /
• v.35 no.1
• /
• pp.25-25
• /
• 2010

The spectroscopy over a region from 3 to 17 ${\mu}m$ based on the tuneable diode lasers (TDLAS) is the most powerful technique for in situ studies of the diagnostics of small molecules. The increasing interest in small molecules especially containing carbon, oxygen, hydrogen, and fluorine containing ones can be fulfilled by TDLAS at 0.0001 cm-1 resolution, because most of these compounds are infrared active. TDLAS provides a means of determining the absolute concentrations of the ground states of stable and transient molecular species, which can be employed for the time dependent studies in sub micro second scale. Information about gas temperature and population densities can also be derived from TDLAS measurements. Collisional energy transfer between the small molecules can be studied with TDLAS. Also, a variety of free radicals and molecular ions have been detected by TDLAS. Since plasmas with molecular feed gases are used in many applications, there are new applications in industrial field. Recently, the development of quantum cascade lasers (QCLs) offers an attractive new option for TDLAS.

• International Journal of Control, Automation, and Systems
• /
• v.6 no.3
• /
• pp.386-393
• /
• 2008

A position control method for interpolating aspherical grinding and polishing tool path was reviewed and experimented in a nano precision machine. The position-base algorithm was reformed from the time-base algorithm, proposed in the previous study. The characteristics of the algorithm were in the velocity control loop with position feedback. The aspherical surface was divided by an interval at which each velocity and acceleration were calculated. The theoretical velocity was corrected by position error during processing. In the experiment, a machine was constructed and nano-scale linear encoders were installed at each axis. Relation between process parameters and the variation of position error was monitored and discussed. The best result from optimized parameters showed that the accuracy was 150nm and improved from the previous report.