• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.615-618
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• 2005

All over the world, many kinds of micro-actuators were already developed for various applications. The actuators are using various principles such as electromagnetic, piezoelectric and thermopneumatic etc. The most of the micro-actuators have been made using 2D based MEMS technology. In these actuators, it is difficult to drive 3-dimensional motion. This characteristic gives the limit of actuator application. However, micro-stereolithography technology has made it possible to fabricate freeform three-dimensional microstructures. In this technology, 2-dimensional micro-shape layer is cumulated on the other layers. This layer-by-layer process is the main principle to fabricate 3-dimensioal micro-structures. In this research, a micro-bellows actuator that is vertically moving was developed using the micro-stereolithography technology. When pressure was applied into the bellows, a non-contact actuating motion is generated. For actuation experiment, syringe pump and laser interferometer were used for applying pressure and measuring the displacement. Several hundreds micro-scale actuation was observed. And, to demonstrate the feasibility of proposed actuation principle, in this research, a micro-gripper was developed using half-bellows structure.

• Structural Engineering and Mechanics
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• v.89 no.3
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• pp.225-238
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• 2024

In this paper, a quasi-3D hyperbolic shear deformation theory for the bending responses of a functionally graded (FG) porous micro-beam is based on a modified couple stress theory requiring only one material length scale parameter that can capture the size influence. The model proposed accounts for both shear and normal deformation effects through an illustrative variation of all displacements across the thickness and satisfies the zero traction boundary conditions on the top and bottom surfaces of the micro-beam. The effective material properties of the functionally graded micro-beam are assumed to vary in the thickness direction and are estimated using the homogenization method of power law distribution, which is modified to approximate the porous material properties with even and uneven distributions of porosity phases. The equilibrium equations are obtained using the virtual work principle and solved using Navier's technique. The validity of the derived formulation is established by comparing it with the ones available in the literature. Numerical examples are presented to investigate the influences of the power law index, material length scale parameter, beam thickness, and shear and normal deformation effects on the mechanical characteristics of the FG micro-beam. The results demonstrate that the inclusion of the size effects increases the microbeams stiffness, which consequently leads to a reduction in deflections. In contrast, the shear and normal deformation effects are just the opposite.

• International Journal of Vascular Biomedical Engineering
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• v.1 no.2
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• pp.30-35
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• 2003

Flow characteristics of blood flow in a micro channel were investigated experimentally using a micro-PIV (Particle Image Velocimetry) velocity field measurement technique. The main objective of this study was to understand the real blood flow in micron-sized blood vessels. The Reynolds number based on the hydraulic diameter of micro-channel for deionized (DI) water was about Re=0.34. For each experimental condition, 100 instantaneous velocity fields were captured and ensemble-averaged to get the spatial distributions of mean velocity. In addition, the motion of RBC (Red Blood Cell) was visualized with a high-speed CCD camera. The captured flow images of nano-scale fluorescent tracer particles in DI water were clear and gave good velocity tracking-ability. However, there were substantial velocity variations in the central region of real blood flow in a micro-channel due to the presence of red blood cells.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.27-33
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• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.2 s.95
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• pp.74-81
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• 1999

The integrated chip of optical micro-encoder was fabricated and the feasibility as displacement measurement device was confirmed. The geometry of micro-encoder was designed to utilize the optical interference effect on the second order of diffracted beams. The hybrid-type micro-encoder consisted with light emitting diode, photodiode, polyimide wave-guide and micro-lens provides stable micro-encoding results for high speed displacements. The measurement shows the resolution of displacement of 1.00 +/- 0.02 ${\mu}m$ for the grating with scale pitch of 2.0${\mu}m$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.521-527
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• 1997

Irregular shapes and growth behavior of surface micro-crack showed very complex and nonlinear propeties and many investigators have performed theoretical analysesand experiments on them to characterize fatigue strength. They had difficulties in estimating fatigue life due to random distribution, growth and coalescence of surface micro-cracks. The straightness of crack growth along intergranular and transgranular was prevented from irregular microstructure and precipitates. Euclid geometry can't quantify shape of surface micro-crack but ftractal geometry can. Therefore, it is suggested that average fractal dimension of surface micro-cracks is able to estimate fatigue life but fractal dimension of maximum surface micro-crack is not in Al 2024-T3 alloy.

• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.503-507
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• 2002

Mask manufacturing is a high COC and COO process in developing of semiconductor devices, because of the mass production tool with high resolution. Direct writing has been thought to be one of the patterning method to cope with development or small-lot production of the device. This study focused on the development of the direct, mastless patterning process using stereolithography tool for the easy and convenient application to micro and miso scale products. Experiments are utilized by three dimensional CAD/CAM as a mask and photo-curable resin as a photo-resist in a conventional stereo-lithography apparatus. Results show that the resolution of the pattern was achieved about 300 micron because of complexity of SLA apparatus settings, inspite of 100 micro of inherent resolution. This paper concludes that photo resist and laser spot diameter should be adjusted to get finer patterns and the proposed method is significantly feasible to mastless and low cost patterning with micro and miso scale.

• 한국연소학회:학술대회논문집
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• 2002.06a
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• pp.95-98
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• 2002

A numerical investigation on the flame propagation and extinction in a micro combustor is described. Previous measurements of $H_2-air$ flame propagation in a submilimeter scale combustor exhibited significance of wall effects on burning velocity and extinction. The heat transfer to wall becomes important not only in the cooling of burnt gases but also during the flame ropagation, which has be by and large ignored in macro scale combustor calculations. In order to take the heat loss into account the combustion calculation, we developed a numerical code with a heat transfer model that was determined empirically from measured data. PISO algorithm was used for differencing of conservation equations. $H_2-air$ reaction was modeled with 10 species - 16 steps. Comparison with measured data showed good agreement in flame propagation speed. Also the pressure decrease after flame extinction was accurately predicted by the model. A further study is desirable for a better quenching model that can predict the quenching location.

• Journal of the Korean Society of Combustion
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• v.20 no.2
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• pp.46-53
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• 2015

The relationship between mass transfer and reaction within the washcoat is investigated in a monolith type micro-scale Pt-catalytic combustor. Nondimensionalized balance equation of butane is applied in a simplified washcoat geometry having the shape of slab. Both Thiele modulus and effectiveness factor are considered to compare reaction rate and diffusion rate according to the operation temperature and the diameter of alumina nano-pores. The effect of reaction becomes stronger as the temperature increases, while the effect of diffusion becomes relatively dominant as the diameter of nano-pores increases. From the analysis of butane distribution within the washcoat, design criterion for the thickness of washcoat is discussed.