• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.10 no.2
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• pp.723-743
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• 2016

Indoor positioning is considered an enabler for a variety of applications, the demand for an indoor positioning service has also been accelerated. That is because that people spend most of their time indoor environment. Meanwhile, the smartphone integrated powerful camera is an efficient platform for navigation and positioning. However, for high accuracy indoor positioning by using a smartphone, there are two constraints that includes: (1) limited computational and memory resources of smartphone; (2) users' moving in large buildings. To address those issues, this paper uses the TC-OFDM for calculating the coarse positioning information includes horizontal and altitude information for assisting smartphone camera-based positioning. Moreover, a unified representation model of image features under variety of scenarios whose name is FAST-SURF is established for computing the fine location. Finally, an optimization marginalized particle filter is proposed for fusing the positioning information from TC-OFDM and images. The experimental result shows that the wide location detection accuracy is 0.823 m (1σ) at horizontal and 0.5 m at vertical. Comparing to the WiFi-based and ibeacon-based positioning methods, our method is powerful while being easy to be deployed and optimized.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.2
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• pp.48-58
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool, optical device, measurement systen. In order ro keep a high precision displacement resolution, they use a position sensor and feedback the error. From the practical point of view, a high-resolution displacement sensor system are very expensive and difficult to guarantee such sensitive sensors work properly in the hard opera- tion environment of industry. In this study, a micro-positioning grinding table which does not require position sensor but uses piezoelectric voltage feedback, has been developed. It is driven by hystersis-considering reference input voltage which calculated from computer and then uses actuator/sensor characteristics of piezoelectric materials. From the result of experiments we proved a fast and stable response of micro-positioning system and suggested efficient technique to control the piezoelectric actuator. And through grinding experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as extremely small depth of grinding.

• Proceedings of the KIEE Conference
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• 2005.04a
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• pp.64-66
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• 2005

본 논문에서는 압전체의 타원 운동을 이용한 선형 Micro-Positioning Actuator(MPA)에 대한 설계 및 해석 기법을 제안하였다. 또한 MPA의 해석을 위해 3차원 압전체의 유한요소의 정식화를 통한 유한요소 해석기법의 검증을 수행하였다. 검증된 3차원 유한요소 해석을 이용하여 MPA의 공진 특성 즉 impedance, 모드, 그리고 타원운동 해석을 하였다. 마지막으로 제안된 해석기법을 이용하여 기계 시스템을 고려한 MPA의 최종 설계를 하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.230-236
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• 2008

In this paper, a model-based stick-slip compensation for the micro-positioning is proposed using an enhanced stick-slip model based on statistical rough surface contact model. The smart structure is comprised with PZT (lead (Pb) zirconia (Zr) Titanate (Ti)) based stack actuator incorporating with the PID (Proportional-Integral-Derivative) control algorithm, mechanical displacement amplifier and positioning devices. For the stick-slip compensation, the elastic-plastic static friction model is used considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model of system for the positioning apparatus was derived from the dynamic behaviors of structural parts. PID feedback control algorithms with the developed stick-slip model as well as feedforward friction compensator are formulated for achieving the accurate positioning performance. Experimental results are provided to show the performances of friction control using the developed positioning apparatus.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.11
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• pp.1134-1142
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• 2008

In this paper, a model-based stick-slip compensation for the micro-positioning is proposed using an enhanced stick-slip model based on statistical rough surface contact model. The smart structure is comprised with PZT(lead (Pb) zirconia(Zr) Titanate(Ti)) based stack actuator incorporating with the PID(proportional-integral-derivative) control algorithm, mechanical displacement amplifier and positioning devices. For the stick-slip compensation, the elastic-plastic static friction model is used considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model of system for the positioning apparatus was derived from the dynamic behaviors of structural parts. PID feedback control algorithms with the developed stick-slip model as well as feedforward friction compensator are formulated for achieving the accurate positioning performance. Experimental results are provided to show the performances of friction control using the developed positioning apparatus.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.