• Journal of the Microelectronics and Packaging Society
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• v.22 no.4
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• pp.25-29
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• 2015

Demand for a low-cost, high-throughput, and high-resolution patterning method for fabricating devices continues to increase. The roll-to-roll (R2R) imprint lithography technique has received a great deal of attention as a means of fabricating next-generation devices. In this paper, we propose a fabrication method for polymeric planar lightwave circuit (PLC) devices that uses R2R imprint lithography. The proposed technique uses an elastomeric polydimethylsiloxane (PDMS) mold. A Si wafer with micro patterns is used as the Si master. The PDMS mold is then replicated from the Si master. By applying a precise web tension and at a given web speed, we fabricated a micro-patterned PLC device. The insertion losses were 4.0 dB for a $1{\times}2$ optical splitter. As such, the proposed method of fabricating a PLC device by the R2R process was shown to be an effective solution.

• Design & Manufacturing
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• v.14 no.1
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• pp.36-41
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• 2020

Recently, due to the development of MEMS technology, researches for the production of effective micro structures and shapes have been actively conducted. However, the process technology based on chemical etching has a number of problems such as environmental pollution and time problems due to multi-process. Various processes to cope with this process are being studied, and one of the mechanical etching processes is the powder blasting process. This process is a method of spraying fine particles, which has the advantage of being an effective process in manufacturing hard brittle materials. However, it is also a process that adversely affects the material surface roughness and material properties due to the impact of the injection of fine particles. In this study, after fabricating micro-channels in fused silica glass with excellent optical properties among the hard brittle materials, we used the nano indentation system to analyze the micro parts using nano-particles as well as machinability and surface roughness analysis of the processed surface. The analysis was performed for the effective processing of powder blasting.

• Design & Manufacturing
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• v.11 no.3
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• pp.51-55
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• 2017

Micro fuel cells have high reliability and long usage time. Among them, PEMFC (polymer Electrolyte Membrane Fuel Cell) is suitable as a portable power source because it is easy to fix electrolyte and simple structure. The bipolar plate, a key component of the fuel cell, is produced by cutting. In the case of micro fuel cell separator, burr is very small and the flow channel size in the separator is very small. Therefore, it is difficult to remove burrs in the usual way such as a brushing or ultra-sonic method. Therefore, this study proposed electrolytic polishing process and analyzed the characteristics of each condition by introducing the concept of roughness reduction rate. In addition, the ultrasonic process was added to analyze the effect of ultrasonic addition.

• Proceedings of the Materials Research Society of Korea Conference
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• 2007.11a
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• pp.26.2-26.2
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• 2007

• Transactions of Materials Processing
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• v.23 no.8
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• pp.507-512
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• 2014

The objective of the current investigation is to establish techniques in micro pattern forming operations of polymeric circular tubes by using hydrostatic pressing. This method was developed and successfully applied to the micro pattern forming on polymeric plates. The key idea of the new technique is to pressurize multiple vacuum-packed substrate-mold stacks above the glass transition temperature of the polymeric substrates. The new process is thought to be a promising micro-pattern fabrication technique for two reasons; first, (hydro-) isostatic pressing ensures a uniform micro-pattern replicating condition regardless of the substrate area and thickness. Second, multiple curved substrates can be patterned at the same time. With the prototype forming machine for the new process, micro prismatic array patterns, 25um in height and 90 degrees in apex angle, were successfully made on the PMMA circular tubes with diameters of 5~40mm. These results show that this process can be also used in the micro pattern forming process on curved plates such as circular tube.

• Journal of Sensor Science and Technology
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• v.22 no.5
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• pp.352-356
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• 2013

We developed a novel fabrication method of polydimethylsioxane (PDMS) lens, which can easily control the shapes of the lens using soft lithography with common photolithography and water droplet molding. A mold for PDMS lens was prepared by patterning of hydrophobic photoresist on the hydrophilic substrate and dispensing small water droplets onto the predefined hydrophilic patterns. The size of patterns determined the dimension of the lens and the dispensed volume of the water droplet decided the radius of curvature of the PDMS lens independently. The water droplet with photoresist pattern played a robustly fixed mold for lens due to difference in wettability. The radius of curvature could be calculated theoretically because the water droplets could approximate spherical cap on the substrate. Finally, concave and convex PDMS lenses which could reduce or magnify optically were fabricated by curing of PDMS on the prepared mold. The measured radii of the fabricated PDMS lenses were well matched with the estimated values. We believe that our simple and efficient fabrication method can be adopted to PDMS microlens and extended to micro optical device, lab on a chip, and sensor technology.

• Transactions of Materials Processing
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• v.19 no.3
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• pp.152-159
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• 2010

Rapid mold heating has been recent issue to enable the injection molding of thin-walled parts or micro/nano structures. High-frequency induction is an efficient way to heat mold surface by electromagnetic induction in a non-contact manner, and has been recently applied to the injection molding due to its capability of rapid heating and cooling of mold surface. The present study covers a three-dimensional finite element analysis to investigate heating efficiency and structural safety of the induction heating process of an injection mold. To simulate the induction heating process, an integrated simulation method is proposed by effectively connecting an electromagnetic field analysis, a transient heat transfer analysis and a thermal stress analysis. The estimated temperature changes are compared with experimental measurements for various types of induction coil, from which heating efficiency according to the coil shape is discussed. The resulting thermal stress distributions of the mold plate for various types of induction coils are also evaluated and discussed in terms of the structural safety.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.92-96
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• 2004

In this paper, polishing method using bonded magnetic abrasive particle has been applied to the micro mold polishing. Through process control using the Run-to-Run control, it tried to form the surface roughness In order to grasp the influence of the surface roughness which is reached by selection of control factor and the factor, a design of experiment was been processed. The study is processed with a purpose of to embody and to maintain the surface roughness of nano scale by the basis of an influence between a control factor and the factors which has been selected in this way. As a result, the result of the process control converged at a target value of surface roughness Ra 10nm and Rmax 50nm

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1597-1600
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• 2005

Recently, the trends of TFT-LCD are large scale and thin thickness, so, the demands of Light Guide Panel(LGP) which is able to substitute for prism sheets are appeared. Functions of LGP obtaining polarization of light of the prism sheet as well as the incidence and reflection of light are demanded. This prismless type LGP to complete functions of the existing LGP and polarization at once must be supported by micro machining technology of LGP surface. In this research, we have used the STAMPER method for the mass product and In-Line process, and the optimized conditions are established by analyzing the cutting force and conditions according to the material and processing properties when the prismless type LGP mold is fabricated. Parameters of the cutting condition were the workpiece and cutting depth.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.12
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• pp.39-46
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• 2008

Asymmetric glass lens core for portable projection optic system was designed and simulated. And it was machined by newly developed non-rotational ultra precision grinding method. With the designed lens data which optimized for multi-collimation, we generated the we core surface data. Mold pressing conditions analyzed by FEM. In the machining process, ground profile errors were compensated based on measured data, minimized feed rate and depth of cut. The deviations of machined core profile were acceptable level for glass mold press. Mold pressed glass array lens was coated with $SiO_2\;and\;Ta_2O_5$ for anti-reflection.