• Journal of the Korean Society for Nondestructive Testing
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• v.13 no.4
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• pp.32-41
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• 1994

The stabilized Michelson interferometer was developed in order to measure micro dynamic displacement at the surface of solids due to elastic wave propagation. The stabilizer was designed to compensate light path disturbances using a reference mirror driven by piezoelectric actuator. Using stabilizer, the effect of external vibration was reduced and the quadrature condition was satisifed. As the results, the output of photodetector had maximum sensitivity and linearity. The minimum detectable displacement was 0.3nm at the band width of 10 MHz. The epicentral displacements due to the glass capillary breaks and the steel ball drop impact were measured using the developed interferometer and the results were compared with the calculated one.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.12
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• pp.64-72
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• 2003

This paper presents a small loading and positioning device using VCM (voice coil motor). The developed device consists of a VCM-based linear actuating system, a capacitance displacement sensor and a cantilever deflection sensing system. The trust force of the VCM proportional to applied current moves the column supported on two pairs of parallel leaf springs. The infinitesimal displacement of moved column is detected by capacitance displacement sensor with a resolution of 0.1nm and a repeatability of 1nm. Also, a micro cantilever with known stiffness (200N/m), which is mounted on the end of the column, is used as a force sensor to detect the load applied to a specimen. After the cantilever contacts with the specimen, the deflection of cantilever and the load applied to the specimen are measured by using an optical lever system which consists of a diode laser, a mirror and a PSD (position sensitive detector). In this paper, an experimental system was constructed and its actuator and sensing parts were tested and calibrated. Also, the constructed system was applied to the indentation experiment and the load-displacement curve of aluminum was obtained. Experimental results showed that the developed device can be applied for performing nano indentation.

• Journal of Sensor Science and Technology
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• v.21 no.3
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• pp.217-222
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• 2012

Optical coherence tomography(OCT) is a noninvasive optical imaging tool for biomedical applications. OCT can provide depth resolved two/three dimensional morphological images on biological samples. In this paper, we integrated an OCT system that was composed of an SLED(Superluminescent Light Emitting Diode, ${\lambda}_0$=1305 nm bandwith= 141 nm), a reference arm adopting a rapid scanning optical delay line(RSOD) to get high speed imaging, and a sample arm that used a micro electro mechanical systems(MEMS) scanning mirror. The sample arm contained a compact probe for imaging dental structures. The performance of the system was evaluated by imaging in-vivo human teeth with dental calculus, and the results indicated distinct appearance of dental calculus from enamel, gum or decayed teeth. The developed probe and system could successfully confirm the presence of dental calculus with a very high spatial resolution($6{\mu}m$).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.8
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• pp.732-736
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• 2006

This paper describes the physical characterizations of polycrystalline 3C-SiC thin films heteroepitaxially grown on Si wafers with thermal oxide, In this work, the 3C-SiC film was deposited by LPCVD (low pressure chemical vapor deposition) method using single precursor 1, 3-disilabutane $(DSB:\;H_3Si-CH_2-SiH_2-CH_3)\;at\;850^{\circ}C$. The crystallinity of the 3C-SiC thin film was analyzed by XPS (X-ray photoelectron spectroscopy), XRD (X-ray diffraction) and FT-IR (fourier transform-infrared spectometers), respectively. The surface morphology was also observed by AFM (atomic force microscopy) and voids or dislocations between SiC and $SiO_2$ were measured by SEM (scanning electron microscope). Finally, residual strain was investigated by Raman scattering and a peak of the energy level was less than other type SiC films, From these results, the grown poly 3C-SiC thin film is very good crystalline quality, surface like mirror, and low defect and strain. Therefore, the polycrystalline 3C-SiC is suitable for harsh environment MEMS (Micro-Electro-Mechanical-Systems) applications.

• Journal of the Optical Society of Korea
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• v.18 no.2
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• pp.146-150
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• 2014

We propose an experimental holographic imaging scheme combining compressive sensing (CS) theory with digital holography in phase-shifting conditions. We use the Mach-Zehnder interferometer for hologram formation, and apply the compressive sensing (CS) approach to the holography acquisition process. Through projecting the hologram pattern into a digital micro-mirror device (DMD), finally we will acquire the compressive sensing measurements using a photodiode. After receiving the data of two holograms via conventional communication channel, we reconstruct the original object using certain signal recovery algorithms of CS theory and hologram reconstruction techniques, which demonstrated the feasibility of the proposed method.

• Bulletin of the Korean Chemical Society
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• v.28 no.4
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• pp.533-537
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• 2007

This paper describes the heteroepitaxial growth of single-crystalline 3C-SiC (cubic silicon carbide) thin films on Si (100) wafers by atmospheric pressure chemical vapor deposition (APCVD) at 1350 oC for micro/nanoelectromechanical system (M/NEMS) applications, in which hexamethyldisilane (HMDS, Si2(CH3)6) was used as a safe organosilane single-source precursor. The HMDS flow rate was 0.5 sccm and the H2 carrier gas flow rate was 2.5 slm. The HMDS flow rate was important in obtaing a mirror-like crystalline surface. The growth rate of the 3C-SiC film in this work was 4.3 μm/h. A 3C-SiC epitaxial film grown on the Si (100) substrate was characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), reflection high energy electron diffraction (RHEED), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and Raman scattering, respectively. These results show that the main chemical components of the grown film were single-crystalline 3C-SiC layers. The 3C-SiC film had a very good crystal quality without twins, defects or dislocations, and a very low residual stress.

• Journal of the Optical Society of Korea
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• v.19 no.2
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• pp.149-153
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• 2015

A digital micro-mirror device (DMD) has the potential to modulate an incident wave with high speed, and the application for holographic display has been studied by many researchers. However, the quality of reconstructed image isn't good in comparison with that from a gray-scale amplitude-only hologram since it is a binary amplitude-only spatial light modulator (SLM). In this paper, we suggest a method generating a set of binary holograms to improve the quality of the reconstructed image. Here, we are concerned with the case for which the object plane is positioned at the Fourier domain of the plane of the SLM. In this case, any point in the Fourier plane is related to all points in the hologram. So there is a chance to generate a set of binary holograms illuminated by incident wave with constant optical power. Moreover, we find an interesting fact that the quality of reconstructed image is improved when the spatial frequency bandwidth of the binary hologram is limited. Therefore, we propose an iterative segmentation algorithm generating a set of binary holograms that are designed to be illuminated by the wave with constant optical power. The feasibility of our method is experimentally confirmed with a DMD.

• Journal of the Korean Society of Laryngology, Phoniatrics and Logopedics
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• v.21 no.2
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• pp.97-100
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• 2010

After introduction of operating microscopes and laser devices in the 1960's, monumental innovation for had been achieved in laryngeal microscopic surgery. The development of high-tech operating devices made the laryngeal surgery less invasive and more precise. There were long histories until developing of the modem instruments and surgical techniques. The simple oral mirror introduced by Bozzoni in 1807 is the beginning of laryngoscope. In 1859 Green carried out the laryngeal operation under direct view of larynx. The appearance of local topical anesthesia on throat had contributed to laryngeal surgery coming into wide use. Killian and Jackson made much contribution to developing the design of laryngoscope. After that, modem laryngeal surgery have been developed with development of the stabilizing holder of laryngoscope and optical devices. We propose carefully the direction of the development of the laryngeal surgery by historical consideration of laryngeal surgery and instrumental development.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.40 no.1
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• pp.19-29
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• 2003

This paper proposes a CMOS readout circuit for uncooled micro-bolometer arrays adopting a four-point step calibration technique. The proposed readout circuit employing an 11b analog-to-digital converter (ADC), a 7b digital-to-analog converter (DAC), and an automatic gain control circuit (AGC) extracts minute infrared (IR) signals from the large output signals of uncooled micro-bolometer arrays including DC bias currents, inter-pixel process variations, and self-heating effects. Die area and Power consumption of the ADC are minimized with merged-capacitor switching (MCS) technique adopted. The current mirror with high linearity is proposed at the output stage of the DAC to calibrate inter-pixel process variations and self-heating effects. The prototype is fabricated on a double-poly double-metal 1.2 um CMOS process and the measured power consumption is 110 ㎽ from a 4.5 V supply. The measured differential nonlinearity (DNL) and integrat nonlinearity (INL) of the 11b ADC show $\pm$0.9 LSB and $\pm$1.8 LSB, while the DNL and INL of the 7b DAC show $\pm$0.1 LSB and $\pm$0.1 LSB.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.6
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• pp.2457-2462
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• 2011

The need for rapid and accurate measurement of 3-dimensional objects is increasing due to the paradigmatic shift in manufacturing from mass production to small batch production. A three dimensional measurement technique which can provide the dimensional information of the object manufactured or to be manufactured has been developed. This method is based on phase shifting moire topology. Digital-Micromirror-Device (DMD) has been used in generating phase shifting moire fringes. And the mechanically moving optical components used for phase shifting, which might result in measurement errors, have been replaced by the DMD. Inherent $2\pi$-ambiguity problem, occurring in the calculation of phase from the light intensity distribution due to the nature of arctangent function, has been overcome by adapting the phase unwrapping method. The advantage of this technique is the easy change of the range and the resolution of the measurement by simply changing the computer generated grid pattern with the appropriate combination of projection lens of various focal length.