• Title/Summary/Keyword: Micro-machined electro mechanical system

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A Study on Attitude Heading Reference System Based Micro Machined Electro Mechanical System for Small Military Unmanned Underwater Vehicle

  • Hwang, A-Rom;Yoon, Seon-Il
    • Journal of Advanced Marine Engineering and Technology
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    • v.39 no.5
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    • pp.522-526
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    • 2015
  • Generally, underwater unmanned vehicle have adopted an inertial navigation system (INS), dead reckoning (DR), acoustic navigation and geophysical navigation techniques as the navigation method because GPS does not work in deep underwater environment. Even if the tactical inertial sensor can provide very detail measurement during long operation time, it is not suitable to use the tactical inertial sensor for small size and low cost UUV because the tactical inertial sensor is expensive and large. One alternative to INS is attitude heading reference system (AHRS) with the micro-machined electro mechanical system (MEMS) inertial sensor because of MEMS inertial sensor's small size and low power requirement. A cost effective and small size attitude heading reference system (AHRS) which incorporates measurements from 3-axis micro-machined electro mechanical system (MEMS) gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for UUV. The AHRS based MEMS overcome many problems that have inhibited the adoption of inertial system for small UUV such as cost, size and power consumption. Several evaluation experiments were carried out for the validation of the developed AHRS's function and these experiments results are presented. Experiments results prove the fact that the developed MEMS AHRS satisfied the required specification.

Fabrication and Characterization of Micro parts by Mechanical Micro Machining: Precision and Cost Estimation (기계식 마이크로 머시닝을 이용한 마이크로 형상의 특성과 비용 평가)

  • Kang, Hyuk-Jin;Choi, Woon-Yong;Ahn, Sung-Hoon
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.1 s.190
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    • pp.47-56
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    • 2007
  • Recently, demands on mechanical micro machining technology have been increased in manufacturing of micro-scale precision shapes and parts. The main purpose of this research is to verify the accuracy and cost efficiency of the mechanical micro machining. In order to measure the precision and feasibility of mechanical micro machining, various micro features were machined. Aluminum molds were machined by a 3-axis micro stage in order to fabricate microchips with $200{\mu}m$ wide channel for capillary electrophoresis, then the same geometry of microchip was made by injection molding. To evaluate the cost efficiency of various micro manufacturing processes, cost estimation for mechanical micro machining was conducted, and actual costs of microchips fabricated by mechanical micro machining, injection molding, and MEMS (Micro electro mechanical system) were compared.

Three Dimensional Molecular Dynamics Simulation of Nano-Lithography Process for Fabrication of Nanocomponents in Micro Electro Mechanical Systems (MEMS) Applications (MEMS 부품 제조를 위한 나노 리소그래피 공정의 3차원 분자동력학 해석)

  • Kim, Young-Suk;Lee, Seung-Sub;Na, Kyoung-Hoan;Son, Hyun-Sung;Kim, Jin
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.10
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    • pp.1754-1761
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    • 2003
  • The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.

Laser application in 3-D micromachining (레이져를 이용한 3차원 형상가공에 관한 연구)

  • 윤경구;이성국;황경현
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.75-78
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    • 1995
  • This paper presents the feasibility of laser ablation process in 3-D micro machining of MEMS (micro Electro Mechanical System)parts. The micro machining characteristics of polymer(Energy fluence, pulse repetition rate, number of pulse, ablation rate)are investigated and 3-D micro machined samples are demonstrated.

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Micro/Meso-scale Shapes Machining by Micro EDM Process

  • Kim Young-Tae;Park Sung-Jun;Lee Sang-Jo
    • International Journal of Precision Engineering and Manufacturing
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    • v.6 no.2
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    • pp.5-11
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    • 2005
  • Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

Microfactory for Electro-Chemical Machining (마이크로 전기${\cdot}$화학 복합형상 제거시스템)

  • Lee H.W.;Kook K.H.;Kim K.W.;Kim T.G.;Ryu B.H.;Jung J.W.;Han M.S.;Jung Y.H.;Min B.K.;Lee S.J.
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2005.05a
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    • pp.389-394
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    • 2005
  • Microfactory is effective method for machining micro size component. Electro-chemical machining can be more suitable to a microfactory than other machining methods in terms of maintaining high accuracy. Surface profile of EDM Machined component is predicted by micro EDM simulation using superpositioning spark crater. Planar motor and micro pump are developed to construct microfactory system.

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Comparison of Micro Trench Machining Characteristics with Nonferrous Metal and Polymer using Single Diamond Cutting Tool (단결정 다이아몬드 공구에 의한 비철금속과 폴리머 소재의 마이크로 트렌치 가공특성 비교)

  • Choi, Hwan-Jin;Jeon, Eun-Chae;Choi, Doo-Sun;Je, Tae-Jin;Kang, Myung-Chang
    • Journal of Powder Materials
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    • v.20 no.5
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    • pp.355-358
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    • 2013
  • Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

Development of Attitude Heading Reference System based on MEMS for High Speed Autonomous Underwater Vehicle (고속 자율 무인잠수정 적용을 위한 MEMS 기술기반 자세 측정 장치 개발)

  • Hwang, A-Rom;Ahn, Nam-Hyun;Yoon, Seon-Il
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.19 no.6
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    • pp.666-673
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    • 2013
  • This paper proposes the performance evaluation test of attitude heading reference system (AHRS) suitable for small high speed autonomous underwater vehicle(AUV). Although IMU can provides the detail attitude information, it is sometime not suitable for small AUV with short operation time in view of price and the electrical power consumption. One of alternative for tactical grade IMU is the AHRS based micro-machined electro mechanical system(MEMS) which can overcome many problems that have inhibited the adoption of inertial system for small AUV such as cost and power consumption. A cost effective and small size AHRS which incorporates measurements from 3-axis MEMS gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for AUV and the attitude calculation algorithm is derived based the coordinate transform equation and Kalman filter. The developed AHRS was validated through various performance tests as like the magnetometer calibration, operating experiments using land mobile vehicle and flight motion simulator (FMS). The test of magnetometer calibration shows the developed MEMS AHRS is robust to the external magent field change and the test with land vehicle proves the leveling error of developed MEMS AHRS is below $0.5^{\circ}/hr$. The results of FMS test shows the fact that AHRS provides the measurement with $0.5^{\circ}/hr$ error during 5 minutes operation time. These results of performance evaluation tests showed that the developed AHRS provides attitude information which error of roll and pitch are below $1^{\circ}$ and the error of yaw is below $5^{\circ}$ and satisfies the required specification. It is expected that developed AHRS can provide the precise attitude measurement under sea trial with real AUV.