• Journal of Advanced Marine Engineering and Technology
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• 제39권5호
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• pp.522-526
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• 2015

Generally, underwater unmanned vehicle have adopted an inertial navigation system (INS), dead reckoning (DR), acoustic navigation and geophysical navigation techniques as the navigation method because GPS does not work in deep underwater environment. Even if the tactical inertial sensor can provide very detail measurement during long operation time, it is not suitable to use the tactical inertial sensor for small size and low cost UUV because the tactical inertial sensor is expensive and large. One alternative to INS is attitude heading reference system (AHRS) with the micro-machined electro mechanical system (MEMS) inertial sensor because of MEMS inertial sensor's small size and low power requirement. A cost effective and small size attitude heading reference system (AHRS) which incorporates measurements from 3-axis micro-machined electro mechanical system (MEMS) gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for UUV. The AHRS based MEMS overcome many problems that have inhibited the adoption of inertial system for small UUV such as cost, size and power consumption. Several evaluation experiments were carried out for the validation of the developed AHRS's function and these experiments results are presented. Experiments results prove the fact that the developed MEMS AHRS satisfied the required specification.

• 한국정밀공학회지
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• 제24권1호
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• pp.47-56
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• 2007

Recently, demands on mechanical micro machining technology have been increased in manufacturing of micro-scale precision shapes and parts. The main purpose of this research is to verify the accuracy and cost efficiency of the mechanical micro machining. In order to measure the precision and feasibility of mechanical micro machining, various micro features were machined. Aluminum molds were machined by a 3-axis micro stage in order to fabricate microchips with $200{\mu}m$ wide channel for capillary electrophoresis, then the same geometry of microchip was made by injection molding. To evaluate the cost efficiency of various micro manufacturing processes, cost estimation for mechanical micro machining was conducted, and actual costs of microchips fabricated by mechanical micro machining, injection molding, and MEMS (Micro electro mechanical system) were compared.

• 대한기계학회논문집A
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• 제27권10호
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• pp.1754-1761
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• 2003

The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.75-78
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• 1995

This paper presents the feasibility of laser ablation process in 3-D micro machining of MEMS (micro Electro Mechanical System)parts. The micro machining characteristics of polymer(Energy fluence, pulse repetition rate, number of pulse, ablation rate)are investigated and 3-D micro machined samples are demonstrated.

• International Journal of Precision Engineering and Manufacturing
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• 제6권2호
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• pp.5-11
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• 2005

Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.389-394
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• 2005

Microfactory is effective method for machining micro size component. Electro-chemical machining can be more suitable to a microfactory than other machining methods in terms of maintaining high accuracy. Surface profile of EDM Machined component is predicted by micro EDM simulation using superpositioning spark crater. Planar motor and micro pump are developed to construct microfactory system.

• 한국분말재료학회지
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• 제20권5호
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• pp.355-358
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• 2013

Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

• 해양환경안전학회지
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• 제19권6호
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• pp.666-673
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• 2013

본 연구는 빠른 운항 속도와 짧은 운용 시간을 요구하는 임무에 활용될 저가 소형 자율 무인잠수정에 고가 대형 관성 측정 장치를 대신하여 사용할 수 있는 저가 소형 자세 측정 장치 개발 및 성능 검증을 수행하였다. 저가 소형 자세 측정 장치 개발을 위해서 MEMS 기술을 적용한 gyro, accelerometer 및 magnetometer 채택하여 MEMS 기반 하드웨어를 제작하였으며, 좌표 변환 공식과 칼만 필터를 적용하여 자세 계산 알고리즘을 구현하였다. 또한 개발된 MEMS 기반 자세 측정 장치에 대한 기본 성능 검증을 위한 지자기센서 검증 시험, 정적 자세 시험, 차량 시험, 운동 모사 장치 시험을 수행하였으며, 각각 시험 결과를 제시하였다. 지자기센서 검증 시험 결과 외부 자기장 보정을 통하면 개발된 MEMS 기반 자세 측정 장치의 측정 결과가 외부 자기장에 강인함을 확인하였으며, 정적 자세 시험 및 차량 시험을 통하여 자세 변화가 크지 않는 환경에서 자세 측정 오차가 $0.5^{\circ}/hr$ 임을 확인하였다. 운동 모사 장치 시험을 통하여 5분 내외 자세 변화가 큰 운동 중에도 자세 측정 오차가 발산하지 않고 $1^{\circ}/hr$ 이내임을 확인하였다. 상기 시험 결과로부터 개발된 MEMS 기반 자세 측정 장치가 목표 성능인 $1^{\circ}/hr$이내 roll, pitch, yaw 오차를 보여주고 있음 확인하였으며, 이로부터 20분 내외 운용 시간 동안 정확한 자세 정보 제공 가능성을 확인할 수 있었다.