• Transactions on Electrical and Electronic Materials
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• 제6권3호
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• pp.87-90
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• 2005

$SiO_2$ via-hole etching with a high aspect ratio is a key process in fabricating ULSI devices; however, accumulated charge during plasma etching can cause etching stop, micro-loading effects, and charge build-up damage. To alleviate this concern, charge-up damage sensor was fabricated for the ultimate goal of real-time monitoring of accumulated charge. As an effort to reach the ultimate goal, fabricated sensor was used for electrical potential measurements of via holes between two poly-Si electrodes and roughly characterized under various plasma conditions using statistical design of experiment (DOE). The successful identification of potential difference under various plasma conditions not only supports the evidence of potential charge-up damage, but also leads the direction of future study.

• 소성∙가공
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• 제11권7호
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• pp.601-607
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• 2002

Optically transparent materials such as fused silica, quartz and crystal have become important in the filed of optics and optoelectronics. Laser ablation continues to grow as an important technique for micromachining and surface modification of various materials, because many problems caused by direct contact between tools and workpiece can be avoided. Especially, laser ablation with excimer lasers enables fine micromachining of transparent materials such as fused silica, quartz and crystal, etc. In this study, laser-induced wet etching of fused silica in organic solution was conducted. KrF excimer laser was used as a light source and acetone solution of pyrene was used as etchant. Changing the number of laser pulses, micro holes of various depths are fabricated.

• 전기학회논문지
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• 제64권4호
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• pp.592-597
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• 2015

3D-IC is a novel semiconductor packaging technique stacking dies to improve the performance as well as the overall size. TSV is ideal for 3D-IC because it is convenient for stacking and excellent in electrical characteristics. However, due to high-density and micro-size of TSVs, they should be tested with a non-invasive manner. Thus, we introduce a TSV test method on test prober without a direct contact in this paper. A capacitive coupling effect between a probe tip and TSV is used to discriminate small TSV faults like voids and pin-holes. Through EM simulation, we can verify the size of eye-patterns with various frequencies is good for TSV test tools and non-contact test will be promising.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.144-149
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometerscale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective method to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• 한국막학회:학술대회논문집
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• 한국막학회 2003년도 The 4th Korea-Italy Workshop
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• pp.25-28
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• 2003

Low cost composite metallic membranes for the hydrogen separation and production have been prepared by using thin Pd-Ag foils reinforced by metallic (stainless steel and nickel) structures. Especially, “supported membranes” have been obtained by a diffusion welding procedure in which Pd-Ag thin foils have been joined with perforated metals (nickel) and expanded metals (stainless steel): in these membranes the thin palladium foil assures both the high hydrogen permeability and the perm-selectivity while the metallic support provides the mechanical strength. A second studied method of producing "laminated membranes" consists of coating non-noble metal sheets with very thin palladium layers by diffusion welding and cold-rolling. Palladium thin coatings over these metals reduce the activation energy of the hydrogen adsorption process and make them permeable to the hydrogen. In this case, the dense non-noble metal has been used as a support structure of the thin Pd-Ag layers coated over its surfaces: a proper thickness of the metal assures the mechanical strength, the absence of defects (cracks, micro-holes) and the complete hydrogen selectivity of the membrane. membrane.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.303-303
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• 2007

Photo-imageable thick-film lithography technology was developed for the fabrication of embedded passives such as inductors and capacitors. In this study, photo-imageable dielectric and conductor pastes have apoted a negative type. Sodalime glass wafer, alumina substrate and zero-shrinkage LTCC green tapes were used as substrates. In result, The lithographic patterns were designed as lines and spaces for conductor material, or via-holes for ceramic, LTCC, materials. The scattering and reflection of UV-beam on the substrate had negative effects on fine patterning. The patterning performance was varied with the exposing and developing process conditions, and also varied with the substrate materials. Fine resolution of less then $50/50{\mu}m$ in line and space was obtained, which is difficult in screen printing method.

• 한국안전학회지
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• 제21권4호
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• pp.60-65
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• 2006

It is a well known fact that LCD is a central part of the IT industry which is important in the present and the future. But the biggest problem of LCD manufacturing is maintaining a cleaning room environment and administration. Therefore the purpose of this study is to first, prevent the yield depreciation and damage of products, and second, protect the worker ftom accidental electrostatic discharge during LCD manufacture. The soft x-ray ionizer is a type of electrostatic reducer device. It protects against electrostatic discharge in the cleaning room environment and is a necessary environmental factor during LCD production. The positive aspects of the soft x-ray are its shorter time and wider angle of exposure. But the negative aspect of the soft x-ray is its need for several shielding of protection from the harmful x-ray exposure. On this study, the development of the Air Nozzle-type ionizer to amend and refine some problems. For example, examined the electrostatic reduce device of a soft x-ray type and discovered the ion did not go inside well. also workers to be free from danger. An Air Nozzle-type ionizer is comprised of soft x-ray radiation and ionized air production. Air is injected through the nozzle after being ionized from radiation. It supplies air keeping the same pressure into the end foundation of ion production. The soft x-ray is the structure which radiates ionized air through the nozzle (21 holes) having micro holes of the ionizable radiation after ionizing the inside air by the ion production. A worker does not need a cover to protect against x-rays and the Air Nozzle-type ionizer is easy to set up and is more effective at eliminating electrostatic.

• Journal of Astronomy and Space Sciences
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• 제33권3호
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• pp.177-183
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• 2016

Active galactic nuclei (AGN) are too compact to be resolved by any existing optical telescope facility, making it difficult to understand their structure and the emission processes responsible for their huge energy output. However, variability, one of their characteristic properties, provides a tool to probe the inner regions of AGN. Blazars are the best candidates for such a study, and hence a considerable amount of effort is being made to investigate variability in these sources across the electromagnetic spectrum. Here, using the Mt. Abu infrared observatory (MIRO) blazar monitoring program, we present intra-night, inter-night, and long term aspects of the variability in S5 0716+71, 3C66A, and OJ 287. These stars show significant variability on short (a few tens of mins, to a few hours, to a few days) to long term (months to years) timescales. Based on the light travel time argument, the shortest variability timescales (micro-variability) provide upper limits to the size of the emission region. While S5 0716 shows a very high duty cycle of variability (> 80 %), 3C66A shows a much lower intra day variability (IDV) duty cycle (< 20 %). All three show rapid variations within 2.5 to 3.5 hr, which, perhaps, are generated near the vicinity of black holes. Assuming this, estimates of the masses of the black holes are made at ~10⁹, 8×10⁸, and 2.7×10⁹ M_⨀ for S5 0716+71, 3C66A, and OJ 287, respectively. Multi-wavelength light-curves for the blazar PKS 1510-089 are discussed to infer the emission processes responsible for the recent flaring episodes in this source.

• 한국자동차공학회논문집
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• 제12권6호
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• pp.111-118
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• 2004

The work presented in this paper concerns the aerodynamic characteristics and compression wave generated in a tunnel when a high speed train enters it. A large number of solutions have been proposed to reduce the amplitude of the pressure gradient in tunnels and some of the most efficient solutions consist of (a) addition ofa blind hood, (b) addition of inclined part at the entrance, and (c) holes in the ceiling of the tunnel. These are numerically studied by using the three-dimensional unsteady compressible Euler equation solver with ALE, CFD code, based on FEM method. Computational results showed that the smaller inclined angle leads to the lower pressure gradient of compression wave front. This study indicated that the most efficient slant angle is in the range from $30^{\circ}$ to $50^{\circ}$. The maximum pressure gradient is reduced by $26.81\%$ for the inclined angle of $30^{\circ}$ as compared to vertical entry. Results also showed that maximum pressure gradient can be reduced by $15.94\%$ in blind hood entry as compared to $30^{\circ}$ inclined tunnel entry. Furthermore, the present analysis showed that inclined slant angle has little effect on aerodynamic drag. Comparison of the pressure gradient between the inclined tunnel hood and the vertical entry with air vent holes indicated that the optimum inclined tunnel hood is much more effective way in reducing pressure gradient and increasing the pressure rise time.

• 한국전기전자재료학회논문지
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• 제29권12호
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• pp.786-790
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• 2016

Hole explosion behaviors were observed during drilling fine holes with laser beam on the LTCC green bar of $320{\mu}m$ thick after lamination of green sheets prepared by tape casting of thick film process. The incidence of these hole explosions was inversely proportional to hole sizes. The incidence of hole explosion was 20 % number of hole with the size of $60{\mu}m$ exploded for the UV radiation, while the explosion did not appear for hole sizes over $100{\mu}m$. To prevent hole explosion behavior during laser-drilling of fine holes, carbon black powder was added as an additive in the LTCC composition, which has superior thermal durability. As a consequence, hole explosion rate was suppressed to 0.8 % for the hole size of $50{\mu}m$ green sheet with the carbon black amount of 10 weight % and the laser power of 3 watt. Added carbon is thought to reduce the heat-affected region during laser drilling.