• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.63-64
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• 2002

In a micro-scale contact, surface forces such as capillary force and van der Waals Interaction significantly Influence the contact between asperities of rough surfaces. Little is, however, known about the variation of these surface forces as a function of chemical property of the surface (hydrophilicity), relative humidity and deformation of asperities In the real area of contact. A better understanding of these surface forces is of great necessity in order to find an optimal solution for reducing friction and adhesion of micro surfaces. We proposed an effective method to analyze capillary and van der Waals forces In nano-scale contact. In this method, Winklerian foundation model was employed to analyze the contact of rough surfaces that were obtained from atomic force microscopy (AFM) height Images. Self-mated contact of diamond-like-carbon (DLC) coatings was analyzed, as an example, by the proposed model. It was shown that the capillary force was significantly influenced by relative humidify and wet angle of the DLC surface. The deformation of asperities to a critical magnitude by external loading led to a considerable increase of both capillary and van der Waals forces.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 추계학술대회논문집
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• pp.93-96
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• 2003

Recently, various bulk metallic glasses (BMG's) haying good mechanical and chemical properties were developed. BMG's can easily be deformed in the supercooled liquid region, via viscous flow mechanism. In our previous work, we evaluated the deformation behavior and some other basic properties of Z $r_{41.2}$ $Ti_{13.8}$C $u_{12.5}$N $i_{10}$B $e_{22.5}$ alloy. In this study, we investigated the micro forming of Z $r_{41.2}$ $Ti_{13.8}$C $u_{12.5}$N $i_{10}$B $e_{22.5}$ alloy. The process condition was chosen based on the viscosity data from TMA, and superalloy and Si wafer with micro patterns on the surface were used as forming die. The alloy showed good replication of the patterns. However, some stripe patterns, resembling scratches, appeared on the deformed alloy surface. These scratches can be reduced or eliminated by polishing before forming.ing.ore forming.ing.

• 소성∙가공
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• 제13권1호
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• pp.9-14
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• 2004

Recently, various bulk metallic glasses (BMG's) having good mechanical and chemical properties were developed. BMG's can easily be deformed in the supercooled liquid region, via viscous flow mechanism. By using the viscous flow, the very low pressure is needed to deform the materials. In this study, we investigated the structural transition and deformation behavior of Vitreloy 1 (Zr/sub 41.2/Ti/sub 13.8/Cu/sub 12.5/Ni/sub 10/Be/sub 22.5/) using TMA and DSC. We applied the results to the micro forming process. The forming condition was chosen based on the viscosity data from TMA, and Si wafer with micro patterns on the surface was used as a forming die. The deformed surface was analyzed by SEM and 3D Surface Profiling System. The alloy showed good replication of the patterns. Quantitative measurement of roughness was useful to evaluate the replication. Surface condition of the deformed surface was determined by the initial surface condition.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.477-478
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• 2006

This paper presents the results of miniaturized micro milling machine tool development for micro precision machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Design optimization has been performed to optimize the design variables of micro machine tool to minimize the volume, weight and deformation of machine tool structure and to maximize the stiffness in terms of static, dynamic, and thermal characteristics. This study presents the assessment of the technology incentive for the minimization of machine tool in the quantitative context of static, dynamic stiffness, thermal resistance and thus the accuracy implications.

• 자원환경지질
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• 제16권2호
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• pp.111-123
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• 1983

The studied area is situated in tho southern part of the Ogcheon fold belt, where the "Ogcheon Group" is widespread with Jurassic and Cretaceous intrusions. The regional stratigraphy may be divided into three formations, the lower pebble bearing phyllitic, the middle dark grey phyllitic, and the upper black phyllitic formations. For the purposes of the present study, the area has been partitioned to three structural subareas based on major fold axes and fault line. The main subjects of the research have been discussed from two different points, multiple deformation and minor-micro fold styles. The former is analyzed by pebble elongation, folding and lineation in a pebbly formation as well as schistosity, crenulation cleavage and crenulated lineation in the phyllitic formation. The later describes the characteristic features of fold style in each formation and structural subarea. Although minor fold axes within broad pelitic rocks usually tend to trend northeast and to plunge northward, most of these were probably formed by two stages, first a similar fold phase and second a kink fold phase. Measured structural elements indicate that crenulation cleavage in phyllite formed parallel to fold axes of folded pebble followed a NE phase of first deformation and a fold axes of pebbles diagonal to bedding of phyllite are represented by a NW phase of a second deformation. Microscopically, quartz and mica grains form a micro fold enabling one to establish tectonic levels which occur in different deformation modes in each stratigraphic sequence. Microtextures such as crenulation cleavage, kink band, aggregate band of mica and pressure shadows of porphyroblast of quartz related to qarnet and staurolite may suggest the time relation of crystallization and tectonism. The result of this study may conform that three deformation phase, NE first phase-NE second phase-NW phase, occurred in the area.

• 한국정밀공학회지
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• 제23권8호
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• pp.54-63
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• 2006

Enhancement methods of sensitivity to in-plane strain measurement by micro-ESPI(Electronic Speckle Pattern Interferometry) technique were proposed using TiN and Au thin films. Micro-tensile strain over the micro-tensile specimens, prepared in micro-scale by those films, was measured by micro-tensile loading system and micro-ESPI system developed in this study. The subsequent measurement of in-plane tensile strain in the micro-sized specimens was introduced using the micro-ESPI technique, and the micro-tensile stress-strain curves for these films were determined. To enhance the sensitivity to measurement of in-plane tensile strain, algorithms of the phase estimation by using curve fitting of inter-fringe and the discrete Fourier Transform with object-induced dynamic phase shifting were developed. Using these two algorithms, the micro-tensile strain-stress curves were generated. It is shown that the algorithms for enhancement of the sensitivity suggested in this study make the sensitivity to measurement of the in-plane tensile strain increase.

• 한국기계가공학회지
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• 제8권1호
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• pp.48-56
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• 2009

This paper presents the results of miniaturized micro milling machine tool development for micro precision machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Design optimization has been performed to optimize the design variables of micro machine tool to minimize the volume, weight and deformation of machine tool structure and to maximize the stiffness in terms of static, dynamic, and thermal characteristics. This study presents the assessment of the technology incentive for the minimization of machine tool in the quantitative context of static, dynamic stiffness, thermal resistance and thus the accuracy implications. This study can also be provided a basic knowledge for further research of micro factory development.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1927-1931
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• 2003

Nanometer-sized structures are being applied to many fields including micro/nano electronics, optoelectronics, quantum computing, biosensors, etc. Micro contact printing is one of the most promising methods for manufacturing the nanometer-sized structures. The crucial element for the micro contact printing is the nano-resolution printing technique using polymeric stamps. In this study, a multi-scale analysis scheme for simulating the micro contact printing process is proposed and some useful analysis results are presented. Using the slip-link model [1], the dependency of viscoelasticity on molecular weight of polymer stamp is predicted. Deformation behaviors of polymeric stamps are analyzed using finite element method based upon the predicted viscoelastic properties.

• 반도체디스플레이기술학회지
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• 제3권2호
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• pp.27-33
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• 2004

This paper is concerned with development of a micro tensile testing machine for optical functional materials such as single or poly crystal silicon and nickel film. Two micro tensile testers have been developed for various types of materials and dimensions. One of the testers is actuated by a PZT and the other is actuated by a servo motor for a precise displacement control. The specifications of PZT actuated micro tensile tester developed are as follows: the volumetric size of tester is desktop sized of 710$\times$200$\times$270 $mm^3$; the minimum load capacity and the load resolution in the load cell of 1N are 3 mN and 0.1 mN respectively; the full stroke and the stoke resolution of piezoelectric actuator are 1 mm and 10nm respectively. A special automatic specimen installing equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimen for testing.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.702-705
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• 2005

Burr is an undesirable projection as result of plastic deformation. Burr minimization and effective deburring process are required strongly to reduce the cost of the parts. In doing these efforts, the precise burr measurement must be provided for the efficient process. For this purpose the conoscopic holography sensors are selected before. However, it has been very difficult to measure micro burrs less than $10{\mu}m$ due to their tiny and sharp geometries as well as the effect of ambient vibration during scanning. A new micro burr measurement system using high precision. Conoprobe sensor and XY table can measure the micro burrs which is less than $10{\mu}m$. Experiments were carried out showing that micro burr around $10{\mu}m$ was successfully measured and analyzed.